TW200402246A - Method for producing organic electroluminescence element and the organic electroluminesence element made thereby - Google Patents

Abstract

Provided is a method for producing an organic electroluminescence (EL) element and a product made thereby. By this method, the mixing of organic EL materials applied onto the partitioned spaces formed on a substrate can be prevented. After a hole conveying material 8 has been selectively supplied to each element space SP, a hole conveying layer is formed by drying the material with heat-treatment applied to substrate 2 thereby the material 8 may be prevented from staying on the top of partition. Further, a liquid-repellent treatment is applied to the tops of partitions. More particularly, a layer 12 containing fluorine is formed on the tops of partitions as liquid-repellent. After such treatment, the organic EL material 14R is supplied to the partitioned space. At this time, the movement of the material to the neighbor space will be stopped by the layer 12, therefore the mixing of organic EL material having plural colors can be prevented effectively.

Description

200402246 Description of the invention: [Technical field to which the invention belongs] The present invention relates to an organic electro-excitation device for manufacturing organic electro-excitation light elements by coating an organic electro-excitation light (EL, eleetrolmrunescence) material into a predetermined pattern shape on a substrate. Manufacturing method of optical element and organic electroluminescent display device. [Prior technology] Do not use organic electro-optic light emitting elements of white 0, as described below = "First, on a transparent substrate such as a glass substrate (hereinafter, referred to as" substrate "): 1το (oxidation) Indium tin) film. Next, photolithography was used to form a pattern on the substrate formed on the substrate and the pancreas was patterned on the first electrodes of several strips. The first band of the i-th electrode is nuclear Xigu, Caitian Fang; dangerous pole. After that, the electrical properties of the surrounding strips:! · ... Use the light lithography technology to form the next door that protrudes on the substrate. After the nozzle IT forms the hole-transporting layer on the first electrode, the shell is coated with organic electro-excitation light-emitting material. The first electrode is coated with an organic electrode and a partition, and the strip between the partitions rotates. Coating method + 枓. As a whole, the film is formed on the substrate by using the slurry and r materials. Drying is performed on the surface of the first electrode, and then reused.

After the method described above is buried by the + π ^ pore material transport layer, the organic electro-excitation light in the same color as the transport layer is in the first place. That is, the upper 70% of the red, green, and blue light-emitting materials using red organic electrical excitation light It—the stripe-shaped first electrode between the partitions. The first electrode of the square-shaped electrode light-emitting material adjacent to the side that is coated with a red organic electrophoresis material is coated with the first electrode of the M-color organic electroluminescent material. 3] 4574 5 200402246 The organic electroluminescent material is coated with a green nozzle. The color of the organic electro-excitation light-emitting material; coated with green, the next adjacent first electrode of the light-emitting material is coated with a blue phosphorescent material. On the next first electrode, which is adjacent to the coated blue electrode, the electrode, 4 ': = the first material of the material. As mentioned above, the red organic red electro-excitation light-emitting material is applied to the first poles in this order: the receiver of the organic electro-excitation light of the color 'hunting by vacuum steaming H will be perpendicular and opposite to the first electrode. Two second electrodes are arranged side by side and opposite to each other: the ytterbium material is sandwiched between the U-th electrode and the organic electricity equivalent to the cathode. By the method described above, that is, the electrodes are arranged in a simple XY matrix, the 1 and 2 electrode optical elements are arranged. The organic electro-excitation of the non-king color [Content of the Invention] (Problems to be Solved by the Invention) However, when the organic electro-excitation light M ^ is applied, when the organic coating applied between the adjacent walls = 2 When there is a partition next to the wall, two materials will be generated: the material will move beyond the partition and the materials will be mixed in, and the organic electro-optical excitation problems of other colors around the students will be pushed and described. The present invention is in view of the above-mentioned one kind: the purpose of forming a spacer on a substrate is to provide an electro-excitation light material when it is supplied to manufacture an organic electro-excitation light element, adjacent Color mixing occurs between the next walls: a method for manufacturing electrically-exciting light-emitting materials with rich electrical excitation light materials and 314574 6 200402246 electromechanical excitation light display device. (Means for solving problems in the corner) In order to achieve the above-mentioned object, the present invention has, ^, w corresponding to a predetermined map; the next wall forming step, p 〃 on the substrate forming the next wall, and respectfully recognize the court Optional: Γ ::; Γ sends material to form a hole-feeding layer; the step of applying a liquefaction to the top of the aforesaid partition; after the coating step and the step of liquefying, Organic electricity is supplied at intervals: a second coating step for forming an organic electro-excitation light layer. … According to the invention that formed the above structure, the red, u ,, ν, ee. ^ ^ ^ ^ ^ ^ Chemical treatment on the top of the next wall before supplying organic lightning materials between the walls. Therefore, when the organic electroluminescent material is supplied between the adjacent walls, the soil T 4 organic electroluminescent material is # _ which moves over the top of the next wall and moves, but the bamboo shoots are changed by # U U, # 卩 from the yoke to the liquefaction treatment The top wall of the partition can prevent the organic electroluminescent material from moving privately to other partitions, so it can prevent the problem of color mixing of organic electro-active materials of multiple colors. Here, in order to achieve the above-mentioned good color mixing prevention effect, it is even more important to apply a liquefaction treatment to the top of the partition wall. In particular, the transmission of the present invention is to selectively supply the hole transport material to the partition wall to form an electrical hole. Conveying the I-Kunshi layer I, that is, in the method of forming the hole transporting layer, as in "5 of the prior art, the square transfer coating method has been mostly used in the past. The hole conveying material is attached to the side; the substrate is comprehensive, so it is impossible to apply the liquefaction treatment to the next door. In contrast, the present invention restricts the hole transporting material _ bamboo material / the emperor's dry enclosure to the partition wall ′, thereby preventing the hole transporting material from attaching to the top of the sense partition wall. In this way, the liquid-repellent treatment can be surely applied to the top of the next wall to prevent the color mixture from occurring. 314574 7 200402246 Here, in the first coating step, the holes can be discharged from the first nozzle and the material can be conveyed while the first nozzle is moved along the partition wall and relative to the substrate. As described above, since the hole transporting material 1 discharged from the first nozzle flows into the partition wall for coating, the application of the hole transporting material to the substrate can prevent the hole transporting material from returning to the hole and make the hole Coating control of the conveyed material becomes easier. In addition, by preventing the hole transporting material from being returned, it is possible to prevent the hole transporting material from being attached to the top of the next wall, and it is possible to more reliably perform the liquefaction treatment on the top of the next wall. 4 〃 〃 from the branch or a plurality of branches, 4 inches do not send the coating of the material when using a plurality of first nozzles. It is expected that two holes will be used for hole transmission ^ 1 τ In the y knife type, the first nozzles are simultaneously ejected = while the material is being sent, the plurality of i-th nozzles will be along the next wall and the two will be effective. Of coating treatment. In addition, it is better to match the 胄 that the Karma moves with respect to the substrate, and it is best to match the 由 from the next wall with the 由 of the first nozzle. This allows the holes to be transported by a plurality of nozzles. As described in the above section, “The wall corresponding to the soil is not suitable for the installation of a plurality of nozzles, and the nozzles are changed in the interval system. The installation of the wall is the same as that of the coating method. In addition, the second coating step is from the first 2 nozzles are ejected ... The same procedure is used for the cloth. The second nozzle i "is moved along the next wall and relative to the substrate while the organic electro-active material is being ejected to move the second substrate. The customer "Shanshi rabbit / put the luminescent material into the next room for coating. The luminescent material is applied to A 彳 Shi soil, and the organic electro-active substrate can prevent the organic electro-chemical excitation from u 1 bomb, and make the Electromechanical excitation / X first material to generate Q㈣ coating control is easier. In addition, 314574 8 200402246 by preventing organic electrical excitation tamping materials ,; see into four @ & material rebound can prevent organic electrical excitation light v In addition, since the partitions give the right soil to the partitions and the liquefaction treatment, so even if the organic electroluminescent material in the partitions enters the adjacent partitions, p ^ is full. , And will not cause the flow of P ^^ pieces to prevent The occurrence of color mixing. Therefore, it is possible to misunderstand the amount of coating on the top of the wall of the P wall by the allowable coating amount when the material is aligned. In addition, in order to achieve the above-mentioned purpose, the 戸 刀 戸 is composed of 4 * μ 4% of the seven Ming lies: in accordance with the application #patent scope of the right # ,,, and the eve of the ancient secret An organic electroluminescent device produced by the manufacturing method of any one of 5 items. In addition, the description of 蚩 Φ + "; transport layer" refers to the package / "electricity, and the same planting two transport layers" is not a narrow "electric hole material" refers to the "electricity, the same f: "The concept of" "and" the hole is lost and the seasons are different. " [Embodiment] Fig. 1 and Fig. 2 show the manufacturing method of the display + politician-implementation type of the organic electro-optical excitation light element of the present invention. In this embodiment, first, as shown in (), after forming an ITO film on a glass substrate, a transparent plastic plate, etc., a pattern t is formed using a soil / plate substrate 2. The first! Electrode phase ~ 'θ 卞 昂 1 hair electrode is equivalent to the anode, which shows the corresponding m, red, green, blue m, 1 Libei's 1 electrode 4 R, 4 Π, 4B. In addition, the above-mentioned first electrode is preferably a transparent electrode. In addition to the upper: IT0 film, a tin oxide film and an oxide film can be used. 〃Emulsified zinc compound 接着 Next, for example, photolithography is used to provide Xiaocheng with electrically insulating barriers 314574 9 200402246 (bank) 6, and each of the first electrodes (anodes) H4B (separate heart ... … So as not to cause the organic electro-excitation well π which will be described later to generate color mixing, and the pixel leaks e§, L,. „, /, 彳,, r, and the first leak in between. As long as it is a hole-rotating material and organic electro-excitation product A — Eucalyptus has a durable material, it can be restricted by M- 疋. For example, organic materials such as polyimide resin can be used Known, ^ Chengcai Branch, liquid broken glass and other inorganic materials. Then, selectively

Deliver material 8 to the holes, and supply them in the "/" space of each element _ to form the hole transport layer 1G (the first coating to form the hole) on the first electrode MR 4G, 4B in each element space The organic compound of the transport layer 1. For example, it is prepared as follows: medium one ..., one I / tyi ene SUlpphate), and is selectively supplied to each element. )), And then use the soil plate 2 to know the heat treatment hole transport layer 10 (Figure!...), Material 8 is dried to form for ",, n in ,,, BC * this' for each element Space SP selects 1 / ..., 0 pack hole conveying material, and chooses the ^ ^ cloth device. For the 3rd 円 ..., the farm house, you can use the coating shown in Figure 3 to make the hole conveying material clear the coating device. Structure. In addition, for the display or liquid crystal display of the 箄 箄 "... using the manufacturing + conductor decoration of the temple Rishou baking equipment used, and so on, and then by the top of the next door, into the pole Yutian 'gas) # 老 贝 丨 进 仃 uses cf4 gas (carbon fluoride by this, such as the first = treatment, the top of the next wall 6 is vaporized (liquefied). (Contained in the next wall A step of liquefying the layer formed by forming a fluorine-containing layer material on one part is included. In addition, the 314574 10 200402246 liquefaction treatment is not limited to the above-mentioned fluorination treatment, as long as the organic electroluminescent material described later has a Liquid processing is not necessary, for example, it can be used: impregnation treatment by swelling the material constituting the partition wall 6 by coating a polymer or a solvent. Specifically, by coating on the top of the partition wall 6 with polytetrafluoroethylene =,) The four-gas ethylene-hexagas propylene copolymer is called four-soy ethylene-b ::, ETFE, and polyvinylidene fluoride: PVDF, etc. Selected outgassing: and :: impregnation, liquefaction is also possible In addition, it can also be impregnated and liquefied by coating with ethanol, such as toluene, methylbenzene, and benzene, which are insoluble in the water of the main material branch of the Electric Power Plant. —

# 心 ： 第 ：： f mouth sweeping method will form a red organic electro-excitation light material MR in two; the two R corresponding to the next wall, and cut through the hole to form an organic electro-excitation light layer ⑽ (2fen Cloth: To U. Specifically, as shown in Fig. 1 (i), the electromechanical excitation light material is provided to the next door. 4R Mu Zhaogudi; 1 ,, σ organic: until the organic electrical excitation light material from the pair; S γ + pole 4R between the next wall overflows and when the partition 6 ... widely corresponds to Di 1 electricity, because the gas is formed in the next wall portion; = until full overflow. This portion is subjected to liquefaction treatment, so organic S 2 ' And the top partition wall 6 of the partition wall 6 flows into the surrounding partition wall 15 and the 15 light materials will not pass over to form a full state. In addition, as a supply: to stay on the top of the partition wall 6 and set it, for example, you can use. The material is used in one article. The coating device of Japanese Patent Application Laid-Open No. 2000, etc., is used for coating. 2 + nozzles described in the publication No. 640. It is equivalent to "the second and third" in the present invention. The substrate 2 is heated by forming an organic electro-excitation light supply device, etc. ::: After supply, the organic Exciting light material]] 314574 200402246 Dry Jiucheng organic electro-laser material layer 16R (Figure 2 (a)). Holding the hole hole to send the layer 1 0 on the first electrode 4G to form a bleed organic electrical excitation 10G layer of green material is formed on top of 16G ', and then, through the dielectric hole transport layer 1 electrode 4B is formed Zhu Zhushi B, said 〇 and Yu Di ,,,, the organic electro-excitation light layer 16B (the second (Illustration)). In addition, because the steps of the above # ^} layer are the same, the name μμ 少 々 廿 ^ ^ ^ 15 ^ μ ^ ^ is omitted / explained. In addition, the organic electro-excitation light = :, according to different colors Separately, or at the same time, three colors of the material im14B are firstly dried, and then dried. The three colors are formed as described above.

Then, as shown in Figure 2 (c), -t is excited 16R, 16G, 16B

^ No, in order to make it perpendicular to the first electrodes 4R, 4G, 4B and face each other, 4β ^ 2 ^ ^ 1 Suppose that the organic electro-excitation light beam is formed in the base of the base, and the structure is described as the formation of the present two #, that is, in the j-th pole 4R, 4G, 4Bi with the function of an anode, and the right 昤 饩 7 昤 饩 1 ^ ^ The second electrode 18 having the function of a cathode is sandwiched between 8 organic electro-excitation light layers 16R, 16Γ, and ^ 4ρ 16B. In addition, the first electrode 4R, 4G, and 4] B are also manufactured- In /, Ang 2 hair poles 18 are arranged in a simple X-matrix-like form of organic electro-excitation light, which can be glorified and not colored. In addition, this embodiment is constituted in the J way, that is, its field ^ ^ ^ 4i, the bright layer on the square and the substrate 2 forms a sealing layer 20 composed of epoxy resin and various organic materials to prevent branching *; deterioration and damage of the light emitting element, etc. As described above, this implementation Type

Xin Ding, after the selective space SP 7 for each element space, and after the turtle hole conveys the material 8, it is said that the substrate 2 is processed and your hole conveys the material " begging to form holes ...,仃… and cut the layer 1 辟 in the door opening season. Therefore, the hole wheel MQ Α 士% V material # 8 can be formed without attaching the hole to the crew. 314574 12 200402246 〇. In addition, you, "Ding, after completing the treatment of each next door," supply to the next room * "Into the lamp to liquefy due to the electric power of the light emitting materials 1 4R, 1 4G, 1 4B, so even if The organic electricity excites the top to cause movement. Also, "B crosses the next wall 6 19 ^ The fluorine containing sound at the top of the next wall 6 contains sound 1 2, which prevents the heartbeat 3 layered electric excitation light-emitting material from moving to The other partition door puts the ancient '3 to prevent the color mixing of organic electro-active light materials with multiple colors. C == As mentioned above, by applying the liquefaction treatment to the top of the partition 6, the following effects can be obtained. Materials can be mixed, or p, in order to avoid organic electro-excitation of the light material to make the partition mode 4, that is, to increase the partition wall 6, and the earthen workshop, that is, the organic +% of the component office is larger than the supply To the next door, the mechanically electro-optically excited light material 14R, i4G, denier, and self-element allowable gate QT > Spoon Valley 'are used to prevent organic electrophoretic overflow from a component workshop SP. However, η ▲ materials 14R, 14G, and _ produce problems. Mpq ^ causes the organic electroluminescent element to be larger than 16G, 16 ... and the organic electroluminescent layer 16R, the electrode 18 is disconnected, resulting in a wide ... It's easy to cause the second problem of lowering the mouth and mouth of today's babies. The application type is to make F 辟 ^ XI Qi to the other party; therefore, the excitation light materials 14R, 14G, and 4B ~ 3B ~ 3B are applied to the top of soil 6 to make the organic electrical state, and increase On the top of the next wall 6, the high sound value of the overflow-like next wall 6 is your daughter. That is, even if it is necessary to form an organic electro-excitation light material to form an organic electro-excitation light layer, an organic electro-excitation light element is necessary. ^ The following is small and of good quality, with reference to Figure 3, which is used to explain the use of oblique — for the brother month to selectively select the space SP of each element, and the electric hole hole rotation material 8 coating for each household 'yoke type state. Figure 3 3] 4574 13 200402246 This is an example of the consistent application pattern of the manufacturing method of the organic electro-excitation light element of the present invention. As shown in FIG. 3, the mounting device of the coated coat is shown in FIG. 3, and the carrier a of the substrate 2 forming the organic electro-optical light-emitting element by the formula 40: a = the stage 4. To the predetermined direction (left-right direction in FIG. 3) = mark position ^ moving structure portion 42; position mark detection portion 44 for detecting positioning marks and spray nozzles formed on the substrate 2; supply hole transporting material 8 To 3 ... 6c supply device:? Nozzle moving mechanism that moves in a predetermined direction (see Fig. 3M so that Kebe is 46a to 46c section 50; controls the wearing time: vertical direction) is constituted by the control section 52 of each section of the garment. And the supply device 48 in the spare element is shown in FIG. 3, and the 1 chrysanthemum is used to store the mine 54 series and 3 supplies ":: the supply source 54 of material 8, and the 3 supply units of the supply source will be stored in #Cognition, @ 5: The same structure, the supply unit 56a is biased to 46 Γ The hole conveying material 8 is pressure-fed to the nozzles 46 ... 6c, and then they are directed toward the substrate?% To 56c is equipped with: for = And Lu, the pump 58 of each supply unit, the source, the source, the source, the source, and the source 54 take out the hole conveying material 8 except the flowmeter of the flow rate of the :: = ::: 8. This implementation mode consists of two: By the way of ^ rotating the material 8, the == function of the "first! Nozzle" of the substrate 2 to spit out the holes. After the meal 46 ^, the present invention has a nozzle retaining mechanism (50) and three nozzles 46a to 46c are provided to maintain the retaining member (not shown). The coating of the nozzles 46a to 46c is right. Change the setting soil interval. Therefore, the coating pitch can be changed according to the arrangement state of the partition wall formed on the substrate 314574 14 200402246 plate 2. In addition, the 'location mark detection unit 44 may use, for example, a CCDC charge-conpled device. That is, when the s-bit mark detection unit 44 receives an instruction from the control unit 8 ... 1 ° 5 2, that is, the position of the four corners of the substrate 2 formed on the substrate 2 is captured by y knife, and it is redundant (not shown), and The captured image data of the positioning mark is output to the control unit 52. On the other hand, the control unit 52 detects the position of the image data taken by the feed tube ^ aL 44 based on the positioning mark detection; a indicates the position of δ; In addition, because the .port is stored in the control section 52 in advance, the younger brothers such as 1 electrode 4R, 4G, 4B, or 6 next door, which are designed using CAD (Computer Aided Design), are stored here. Therefore, the control 邛 52 can calculate the starting point of the coating ^ ^ ^ according to the results of the location of the positioning mark 储存 3, U5 and the configuration data of the soil barrier, and calculate the opening of the coating hole. Material 8 starting position for coating. In addition to performing the above calculations, 々 々 The Hai control unit 52 also controls the loading port spear moving mechanism unit 42 so as to cause the loading port a 4〇γ cat — the war port 40 to move to the right and left directions (see the figure 3) according to a predetermined amount), and control the nozzle The moving mechanism part also enables the nozzles 46a to 46e to move in the vertical direction of the drawing surface perpendicular to the mounting table), and moves in the surrounding area of the pre-target target, and makes the spray to Loose can be moved relative to the substrate 2 in a two-dimensional manner. In addition, 'M nozzle ... to 46C moves with respect to the substrate 2 while the 邛 52 is based on the measured values a to c of each flowmeter 604t ^, and the pump 58 outputs the daily order d to f and the nozzle 46 Ancient materials 8. 6a to-hole delivery out of a predetermined flow rate In addition, in the coating device configured as described above, the substrate 2 before the application of the hole rotation 314574 15 200402246 material is placed on the stage 4. After that, the protective unit 52 transmits the operation instruction to the unit 'according to the detection value of each unit of the device, and applies the hole transporting material 8 to each of the partitions by the method of two downs; First, according to the marker photography order of the control unit 52, the detection unit is caused to take a picture of the substrate 置于 placed on the stage 40. Position the staircase 'and output the image data to the control unit 52. The receiving control unit 52 calculates the positioning mark based on the image data, and generates the starting point of the copy. Next, the stage movement mechanism section 仏 and the nozzle 2 mechanism section 50 actuate according to the movement instruction of the control section 52 to position 46a to Gamma at the starting point. As a result, the three nozzles 46 ^ 46c are positioned in a one-to-one manner between three partitions (element space SP). At this time, the nozzles 46a to 4 (the centerpiece space SP) are changed according to the barrier :: arrangement state. In addition, when the number of nozzles in Taiyin is arbitrarily arbitrary, the number of nozzles can be arbitrarily formed. After the coating can be started, the control unit gathers 58 to start the hole rotation of the material 8 from each nozzle to the inflow / basic opening. In the same day temple in the next room (wooden space SP) of the board, the nozzles 46a to 46c are moved in the vertical direction of I, t, and the hole conveying material 8 can flow into the next room next to the soil. Next door. By this: the material 8 can flow into three component spaces SP at the same time. After that, when the mouth 46 is moved to the end of the element space ^, the stop is conveyed to each fruit 58 to stop the hole transporting the material 8 from each nozzle 仏 to 46c. 3] 4574 16 200402246 pieces of space sp Back to the taxi, the movement mechanism of the stop nozzle 5G transmits the stop command. The U-reading unit 52 at each position of sp is used to make the strip-shaped component space biased to 46c ^ 4. The average coating amount is 8 to match the mouth. The degree of frustration is controlled by flooding the Taidan ^ to complete the three main elements of the main μ. The wrong way, the outside, flows into the element space; where = coating of the hole transport material 8. This 8, which uses its own pure uniformity ^ The hole-rotating material on the ground 14 forms a uniform thickness and diffuses in the element space SP, and

Hole hole conveying material 8 — adjust the amount of SP into the component space. In addition, the inflow receiver of the material 8 can be transported through the holes, and the elements in the lower three rows are arranged one by one *: The three stages are spaced apart from each other by the moving stage 40, so that the gap between the three rows is the same as the original one.涂布 Coating of hole transporting material 8. One end side is set to the middle of the cloth cloth, the stop position of the element space SP is set to make the nozzles 4 to 46, and the other end side is set to the coating stop material 8 to move between the next door and the electric Hole round

In the third row, move to the next element space SP, so that: from ... to the direction opposite to the movement direction

丨 Where the hole conveying material 8 is produced by the empty pq Q, the end-to-side side is moved to the -end side, and ^ "L is entered into each element space SP. The above-mentioned action between the walls (element * H QD, Make the electric Λ buckle reach the material (δ ^ into the partition) ° In addition, because it is through the mouth hole hole hole w 222 from Beibei to ♦ the +, n ^ partition (the space of SP) for coating Therefore, the hole transporting material 8 is coated with the spring back of the coating 8. In addition, also: cloth; substrate 2 can prevent the hole transporting material y and help the coating control of the hole transporting material 8. 314574 547 200402246 Therefore, In the above manner, it is possible to selectively allow only the Thai moxibustion rabbit hole knowing material 8 to flow into the next room (the component space sp) in a state where the hole conveying material 8 is not attached to the top of the wall 6. Figure 3, Xi, He Taizhuang., Yiyi cloth is a useful device for the manufacturing method of the organic electroluminescent device described previously. In addition, the present invention is not limited to too private B Hitachi. The above formula and the above-mentioned regular application pattern can be used in the above example without departing from the scope of this month. There are various variations such as the method for manufacturing the organic electro-optical light emitting element of the above-mentioned embodiment. The method is to complete the coating and liquefaction treatment of the hole transporting material 8, and also to chemically convert the part of the battery 6 ... The order of the coating treatment and the liquefaction treatment of 8 is reversed. The electric: I: ,, ::: through-application type f 'is the coating material shown in Figure 3, and the electric material is applied to the next room, but no Specially limited, the structure is βL. The structure of the device is "" :: The coating device that supplies the hole transport material to each soil. "Spray coating can be used. [Effect of the invention] can be used for years. ❿ As mentioned above According to the present invention, the following system is adopted: an electric hole conveying material is selectively supplied to the partition wall to form a layer, and the partition section is subjected to a liquefaction treatment, and after the partition = :: liquefaction treatment ' An electro-active light source is provided to the next room to prevent the supplied organic electro-light-excitation material from exceeding the next-door branch: The next-door space can be effectively moved privately to produce mixed colors. Schematic description of the color organic electro-light-excitation material diagram 314574 18 Γ20040 2246, Fig. ⑷ is a diagram showing an implementation form of an organic electro-excitation manufacturing method of the present invention. Figs. 2 to ⑷ are diagrams showing an implementation form of an organic electro-excitation manufacturing method of the present invention. Fig. 3 is a view showing an embodiment of a coating device suitable for the method for manufacturing an organic electroluminescent light according to the present invention. Clothing 2 substrate 4B, 4G, 4R first electrode 6 partition wall 8 hole transport material 10 hole Transport layer 12 Fluorine-containing layer 14B, 14G, 14R organic electroluminescent material 16B, 16G, 16R organic electroluminescent layer 18 2nd electrode 20 Sealing layer 40 Stage 42 Stage movement mechanism section 44 Positioning mark detection section 46a 46b, 46c Nozzle 48 Supply device 50 Nozzle moving mechanism section 5 2 Control section 54 Supply source 5 6a, 5 6b, 5 6c Supply section 58 Pump 60 Flow meter 62 Filter SP element space (partition 314574) 9

Claims (1)

WU4U2246, patent application scope: _Heavy organic electro-excitation first-open pattern and ... The manufacturing method of the part is provided with the corresponding step of forming the partition wall to form the partition wall on the soil plate; The first coating step of forming a hole-transporting layer between the aforementioned partitions; the liquefaction step of applying a liquefaction treatment to the top of the partition wall; after the first coating step and the liquefaction step of the machine, a light-emitting element is supplied The second coating step is performed between the partition walls to form an organic electro-excitation first layer. ^ Wenxin 2. For the manufacturer of the organic electro-optical light-emitting device in the scope of the patent application No. 1 item, where the aforementioned 丨 coating step: the two-party hole output material is the same as KM i in Yau Di Bei ^ spit out something else Steps for moving the substrate relative to the LED.丨 ^ and 3. If the method of applying for the scope of patent application No. 丨, wherein the above-mentioned spit out the aforementioned hole output material when the manufacturer of coated cattle furnace excitation light element :: is attached to each of the plurality of first nozzles along the same mouth It is possible to make a plurality of branches of the first branch spraying between the adjacent walls relative to the first day (as described on the right of the third patent application range, the substrate moving step. Method, wherein the i-th coating step: the electro-active optical element Before the manufacturer moves with respect to the substrate, the interval between the plurality of first nozzles and the plurality of first nozzles is changed according to the arrangement status of the partition wall. The organic electro-excited photoelectric hole transport material of any one of Lizhong, Li, and Li is supplied to the formation in Mobei. 1 The coating step is after the space between the above and the next walls, and the first 3) 4574 20 200402246 ι two. Holes feed materials ... the two holes deliver sound. The order is not processed to form the aforementioned electricity. 6. For example, the patent application method, wherein the organic electro-excitation device of the organic electro-excitation light element of the first μ μ and the organic electro-excitation It: 1 coating step is performed by ejecting the aforementioned space from the second nozzle. And relative to the front: 1, the step of moving the second nozzle along the above-mentioned partition next to the other party's substrate. • If the scope of the patent application is unresolved, the manufacturer of the organic electro-optical light-emitting element of item I, and A is the same as that described by Nishiro's second coating step in which the plural second nozzles are ejected from the plurality of second nozzles. Suspect + Cap? / At the same time that the material is released, make the aforementioned plurality of supporters 2 feed the nozzle along the aforementioned P Μ Ώ ^ ^ step between the same soil and relative to the aforementioned substrate Manufacture of organic electro-optical light-emitting devices /, Zhongyue] The second coating step is before the plurality of branches are moved relative to the substrate. The interval between the plurality of second nozzles is changed. 9 · If the patent application scope of the first, sixth, seventh $ 篦 hi > t A 7 or 8 of the organic electroluminescent device manufacturing method, straight middle, a ^?, Then the 2 coating steps are described The aforementioned organic electro-excitation light material is supplied to the above-mentioned partition wall, and it is released from the partition wall until the overflow on the top of the above-mentioned partition wall, and then the overflowing "electromechanical excitation light-emitting material is dried and formed on the aforementioned hole transport layer. Describe the steps of the organic electro-excitation light layer. Ι〇 ·-An organic electro-excitation light display device, which is provided with: Organic electro-manufactured according to the manufacturing method of any one of items 1 to 9: : Light emitting element. 314574 2]