KR100547043B1 - Method for manufacturing organic electroluminescence device and organic electroluminescence display unit - Google Patents

Abstract

When manufacturing an organic EL element by applying an organic EL material between partitions formed on a substrate, there is provided a method for manufacturing an organic EL element and an organic EL display device which can prevent the organic EL material from mixing between adjacent partitions. do.

After the hole transport material 8 is selectively supplied to each element space SP, the hole transport material 8 is dried to form the hole transport layer 10 by applying heat treatment to the substrate 2. For this reason, adhesion of the hole transport material 8 to the partition wall part is prevented. Then, the liquid-repellent treatment is performed for those partition governments. Specifically, the fluorine-containing layer 12 is formed in the top of the partition 6. Further, following this liquid repelling treatment, the organic EL material 14R is supplied between the partition walls. At this time, the presence of the fluorine-containing layer 12 prevents the movement of the organic EL material between the other partitions, and effectively prevents the mixing of a plurality of organic EL materials.

Organic EL, fluorine-containing layer, nozzle

Description

TECHNICAL FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE DEVICE AND ORGANIC ELECTROLUMINESCENCE DISPLAY UNIT}

1 is a view showing an embodiment of a method of manufacturing an organic EL device according to the present invention;

2 is a view showing an embodiment of a method of manufacturing an organic EL device according to the present invention;

Fig. 3 is a diagram showing one embodiment of a coating apparatus suitable for the method for producing an organic EL element according to the present invention.

(Explanation of the sign)

2 boards

6 bulkhead

8 hole transport material

10 hole transport layer

12 Fluorine-containing layer

14R organic EL material

16R, 16G, 16B organic EL layer

46a to 46c (first) nozzle

SP device space (between bulkheads)

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an organic EL element and to an organic EL display device, which fabricate an organic EL element by applying an organic EL (electroluminescence) material in a predetermined pattern on a substrate.

Conventional organic EL elements are manufactured as described below. First, a transparent ITO (indium stone oxide) film is formed on the surface of a transparent substrate (hereinafter, simply referred to as a "substrate") such as a glass substrate. Next, an ITO film formed on the substrate is patterned on a plurality of stripe-shaped first electrodes using photolithography. This first electrode corresponds to the anode. Next, an electrically insulating partition wall which protrudes on the substrate so as to surround the stripe-shaped first electrode is formed using photolithography technology.

After forming the hole transporting layer on the first electrode, the organic EL material is ejected between the partition walls from the inkjet nozzle, and the organic EL material is applied onto the stripe-shaped first electrodes between the partition walls. Specifically, a hole transporting material is formed on the entire surface of the substrate by a spin coating method and a drying treatment is performed to form the hole transporting layer on the first electrode, and then red, green, and blue organic ELs are formed as follows. On the first electrode via the hole transport layer. That is, a red organic EL material is coated on the stripe-shaped first electrode between certain partitions by a nozzle for red organic EL material. The green organic EL material is coated on one of the first electrodes adjacent to the first electrode coated with the red organic EL material by a nozzle for the green organic EL material. Further, on the next first electrode adjacent to the first electrode coated with the green organic EL material, the blue organic EL material is applied by the nozzle for the blue organic EL material. A red organic EL material is coated on the next first electrode adjacent to the first electrode coated with the blue organic EL material. In this way, red, green, and blue organic EL materials are individually applied on the first electrode in that order.

Next, a plurality of stripe-shaped second electrodes facing each other so as to be perpendicular to the first electrode are formed so as to be arranged in parallel on the substrate by vacuum deposition, and an organic EL material is interposed between the first electrode and the second electrode. . This second electrode corresponds to the cathode. In this way, a full-color displayable organic EL device in which the first electrode and the second electrode are simply arranged in an XY matrix shape is manufactured.

However, when the organic EL material is applied between the partition walls on the substrate, if the organic EL material applied between the partition walls exceeds the partition walls and moves between the surrounding partition walls, the organic EL material is mixed with the surrounding organic EL materials and mixed in multiple colors. There is a problem that the organic EL material is mixed.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and when an organic EL device is produced by applying an organic EL material between partitions formed on a substrate, the organic EL device can prevent the organic EL material from mixing between adjacent partitions. It is an object to provide a manufacturing method and an organic EL display device.

In order to achieve the above object, the present invention provides a barrier rib forming step of forming a barrier rib on a substrate in accordance with a predetermined pattern, and a first coating process of selectively supplying a hole transport material between the barrier ribs to form a hole transport layer; After the liquid-repellent process which performs a liquid-repellent process to the part of a partition, and after a 1st application | coating process and a liquid-repellent process, the agent which supplies an organic EL material between partitions and forms an organic EL layer 2 coating steps are provided.

In the invention constituted as described above, the liquid-repellent treatment is performed on the government of the partition before supplying the organic EL material between the partitions. For this reason, when the organic EL material is supplied between the partition walls, even if the organic EL material tries to move beyond the top of the partition wall, the liquid EL process prevents the movement of the organic EL material between the other partition walls. The mixing of color organic EL materials is prevented. In this case, in order to achieve a good mixing prevention effect as described above, it is important to perform the liquid-repellent treatment for the government of the partition, in particular, in the present invention, by selectively supplying a hole transporting material between the partitions to form a hole transporting layer. Doing. That is, as the method for forming the hole transport layer, as described on the page of "Prior Art", the spin coating method is conventionally used a lot, and since the hole transport material adheres to the entire surface of the substrate by using the spin coating method, the partition wall The government could not carry out liquefaction. On the other hand, in this invention, adhesion | attachment of the hole transport material to a partition part government is prevented by restrict | limiting the application range of a hole transport material between partition walls. Therefore, the liquid-repellent treatment can be reliably performed on the government of the partition, and it is possible to reliably prevent color mixing.

Here, in the first coating step, the first nozzle may be moved relative to the substrate along the partition walls while discharging the hole transport material to the first nozzle. By injecting and applying the hole transporting material at the first nozzle between the partition walls in this way, the return of the hole transporting material when the hole transporting material is applied to the substrate is prevented, and the application control of the hole transporting material is facilitated. . In addition, by preventing the return of the hole transporting material, adhesion of the hole transporting material to the partition wall part is reliably prevented, thereby making it possible to more reliably liquefy the partition wall part.

The number of first nozzles may be one or plural, but in particular, when a plurality of first nozzles are used, the hole transporting material can be applied as follows. That is, the plurality of first nozzles may be moved relative to the substrate along the partition walls while simultaneously discharging the hole transporting material from each of the plurality of first nozzles. Thereby, an efficient coating process can be performed. Moreover, it is preferable to change the space | interval of a some 1st nozzle according to the state of a partition of a partition, prior to the relative movement of a some 1st nozzle with respect to a board | substrate. As a result, the hole transporting material is reliably applied between the corresponding partition walls at each of the plurality of first nozzles. In this way, the point of providing a plurality of nozzles and the point of changing the nozzle spacing according to the state in which the partitions are installed are the same in the second coating step.

In addition, also in the second coating step, the organic EL material in the second nozzle is moved relative to the substrate along the partition walls while discharging the organic EL material through the second nozzle, similarly to the first coating step. Is injected between the barrier ribs and applied, thereby preventing the organic EL material from returning when the organic EL material is applied to the substrate, thereby facilitating application of the organic EL material. In addition, by preventing the return of the organic EL material, the organic EL material is prevented from being mixed between the partition walls around it.

In addition, since the liquid-repellent treatment is performed on the partition wall part, even if the organic EL material is supplied between partition walls until it becomes a female state, it does not flow between adjacent partition walls, thereby preventing mixing. For this reason, the allowable coating amount at the time of application | coating of an organic EL material can be increased by the liquid-ignition process and female supply to a partition part.

Moreover, this invention has the organic EL element manufactured by the manufacturing method of any one of Claims 1-5 in order to achieve the said objective, It is characterized by the above-mentioned.

In addition, the "hole transporting layer" in this specification does not mean only the "hole transporting layer" of consultation, but is a concept which further contains a "hole injection layer", and a "hole transporting material" is a material which comprises the "hole transporting layer". It means.

Embodiment of the Invention

1 and 2 show one embodiment of a method for manufacturing an organic EL device according to the present invention. In this embodiment, first, as shown in Fig. 1A, an ITO film is formed on a substrate 2 such as a glass substrate or a transparent plastic substrate, and then a plurality of stripe-shaped first electrodes are formed using photolithography. Patterning develops. This first electrode corresponds to an anode, and three types of first electrodes 4R, 4G, and 4B corresponding to red, green, and blue are shown in FIGS. 1 and 2. As the first electrode, a transparent electrode is preferable. In addition to the above-described ITO film, a tin oxide film, a composite oxide film of indium oxide and zinc oxide, or the like can be used.

Next, an electrically insulating partition (bank) 6 is formed using, for example, photolithography or the like, and the gap between the first electrodes (anodes) 4R, 4G, and 4B is filled (partition forming step). Thereby, prevention of the mixed color of the organic EL material formed later, light leakage between a pixel, and a pixel can be prevented. Here, the material constituting the partition wall 6 is not particularly limited as long as it has durability with respect to the hole transporting material and the organic EL material described later, for example, organic materials such as acrylic resin, epoxy resin, polyimide, liquid glass, and the like. Inorganic materials and the like can be used.

Then, the hole transporting material 8 is selectively supplied between the partition walls, that is, the respective device spaces SP so that the hole transporting layer 10 is formed on the first electrodes 4R, 4G, and 4B in each device space SP. It forms (the 1st coating process). Specifically, a hole transport material 8 in which an organic compound for forming the hole transport layer 10, for example, polyethylene dioxythiophene (PEDT) -polystyrene sulphonate (PSS), is dissolved in a solvent is prepared in advance, and each nozzle scan method is used. After selectively supplying the device space SP (Fig. 5 (b)), the hole transporting material 8 is dried to form a hole transporting layer 10 by applying heat treatment to the substrate 2 (Fig. 5). (c)). In this manner, as an apparatus for selectively supplying the hole transport material 8 to each element space SP, an application apparatus as shown in FIG. 3 can be used, for example. The structure of this coating apparatus is demonstrated later, referring FIG. As the drying apparatus for drying the hole transport material 8, a baking apparatus or the like used in manufacturing a semiconductor device, a liquid crystal display device, or the like can be used.

Next, by performing a plasma treatment using CF ₄ gas (fluorocarbon gas) on the government of the partition 6, the government of the partition 6 is fluorinated (liquidized). As a result, as shown in Fig. 1 (d), a fluorine-containing layer (layer made of a material containing fluorine) 12 is formed on the top of the partition 6 (liquidization step). The liquid repelling treatment is not limited to the above-mentioned fluorination treatment, and may be a treatment having liquid repellency for the organic EL material described later. For example, the barrier rib 6 may be formed by application of a polymer and a solvent. An impregnation treatment in which the material swells can be used. Specifically, a polytetrafluoroethylene (PTFE), a tetrafluoroethylene-hexafluoropropylene copolymer (FEP), a tetrafluoroethylene-ethylene copolymer (ETFE), and polyvinyl chloride are attached to the government of the partition 6. It may be impregnated by applying a fluorine resin selected from lidene fluoride (PVDF) to liquefy liquid. Moreover, you may make it immerse and liquefy by apply | coating alcohol, such as toluene, xylene, and benzene which show insolubility to water which is a main material of the solvent of the hole transport material 8 ,.

Next, the red organic EL material 14R is supplied between the partition walls corresponding to the first electrode 4R by the nozzle scan method, and the organic EL layer (through the hole transport layer 10 is disposed on the first electrode 4R). 16R) is formed (second coating step). Specifically, as shown in Fig. 1 (e), the organic EL is filled until partitions are formed between the partitions corresponding to the first electrodes 4R and the females are formed in the government of the partitions 6, respectively. The material 14R is supplied between the partition walls. At this time, since the fluorine-containing layer 12 is formed in the government of the partition 6 and the government of the partition 6 is liquefied, the organic EL material 14R exceeds the partition 6 and flows in between the surrounding partitions. It stops in the government of the partition 6, and becomes a female state. As the apparatus for supplying the organic EL material 14R, for example, a coating apparatus described in JP-A-2002-75640 can be used, and the nozzle of the coating apparatus corresponds to the "second nozzle" of the present invention. .

When the supply of the organic EL material 14R is completed, the organic EL material 14R is dried to form an organic EL layer 16R by applying heat treatment to the substrate 2 by a baking apparatus or the like (Fig. 2). (a)).

Next, a green organic EL layer 16G is formed on the first electrode 4G through the hole transport layer 10, and a blue organic EL is formed on the first electrode 4B through the hole transport layer 10. Layer 16B is formed (Fig. 2 (b)). In addition, since the formation process is the same as that of the red color, description is abbreviate | omitted here. The organic EL layer may be formed for each color, and three colors of organic EL materials 14R, 14G, and 14B may be simultaneously supplied and dried.

When the formation of the organic EL layers 16R, 16G, and 16B is completed with respect to the three colors as described above, as shown in FIG. A plurality of second electrodes 18 are formed on the substrate 2 by a vacuum deposition method or the like. By configuring in this way, the "organic EL element" of the present invention is formed. In other words, the organic EL layers 16R, 16G, and 16B are interposed between the first electrodes 4R, 4G, and 4B serving as the anode and the second electrode 18 serving as the cathode. Further, an organic EL display device capable of full color display in which the first electrodes 4R, 4G, 4B and the second electrode 18 are arranged in a simple XY matrix shape is manufactured. Moreover, in this embodiment, the sealing layer 20 which consists of sealing materials, such as an epoxy resin, an acrylic resin, and liquid glass, is laminated | stacked on the board | substrate 2, and is comprised so that deterioration, damage, etc. of each organic EL element may be prevented.

As described above, in this embodiment, the hole transport material 8 is selectively supplied to each element space SP, and then the hole transport material 8 is dried to heat the substrate 2 by heat treatment. Since the transport layer 10 is formed, the hole transport layer 10 can be formed without adhering the hole transport material 8 to the government of the partition 6. After the liquid-repellent treatment is performed on each of the partitions 6, the organic EL materials 14R, 14G, and 14B are supplied between the partitions, so that the organic EL materials 14R, 14G, and 14B are partitioned ( Even if it tries to move beyond the part of 6), the presence of the fluorine-containing layer 12 formed in the part of the partition 6 prevents the movement of the organic EL material between the other partitions, and effectively prevents mixing of multiple colors of the organic EL material. can do.

In addition, by performing the liquid-repellent treatment for the government of the partition 6 in this manner, the following effect is also obtained. That is, in order to avoid mixing of the organic EL material, the partition wall 6 so that the volume between the partition walls, that is, the volume of the element space SP is larger than the amount of the organic EL material 14R, 14G, 14B supplied between the partition walls. It is also possible to increase the height and to prevent the overflow of the organic EL materials 14R, 14G, and 14B in the device space SP. However, by simply increasing the partition wall 6, the problem of causing an enlargement of the organic EL element, the step between the government of the partition wall 6 and the organic EL layers 16R, 16G, and 16B become high. The problem arises that the second electrode 18 is easily disconnected at the portion and causes a decrease in product quality. In contrast, in the present embodiment, the liquid liquefaction treatment is performed on the government of the partition 6 so that the organic EL materials 14R, 14G, and 14B are made into the female state in the government of the partition 6. It is possible to increase the allowable coating amount of the organic EL material. That is, while the height of the partition 6 is relatively low, the amount of organic EL material necessary for forming the organic EL layer can be applied, and it becomes possible to manufacture an organic EL element of small size and good quality.

Next, an embodiment of the coating apparatus for selectively supplying the hole transporting material 8 to each element space SP will be described with reference to FIG. Fig. 3 is a diagram showing one embodiment of a coating apparatus suitable for the method for producing an organic EL element according to the present invention. As shown in the drawing, the coating device includes a stage 40 on which the substrate 2 on which the organic EL elements are formed is mounted as described above, and the stage 40 is moved in a predetermined direction (the same drawing). Hole transport material to the stage moving mechanism portion 42 for moving in the right and left directions, the alignment mark detection portion 44 for detecting the position of the alignment mark formed on the substrate 2, and the three nozzles 46a to 46c. (8) a supply unit 48 for supplying, a nozzle moving mechanism portion 50 for moving the three nozzles 46a to 46c in a predetermined direction (vertical direction in the drawing plane of the drawing), and a control unit for controlling the respective devices ( 52).

Among these components, the supply unit 48 is provided with the supply source 54 which stores the hole transport material 8, as shown in the figure, and this supply source 54 has three supply parts 56a-56c. ) Is connected to the pipe. Moreover, these three supply parts 56a-56c all have the same structure, and these supply parts 56a pressurize the hole transport material 8 stored by the supply source 54 to nozzles 46a-46c, respectively. V) and discharged toward the substrate 2. Specifically, each supply section 56a to 56c includes a pump 58 for extracting the hole transport material 8 from the supply source 54, a flow meter 60 for detecting the flow rate of the hole transport material 8, The filter 62 for removing the foreign material in the hole transport material 8 is provided. Thus, in this embodiment, it is comprised so that the hole transport material 8 may be discharged | emitted from each nozzle 46a-46c toward the board | substrate 2, These nozzles 46a-46c are the "1st nozzle" of this invention. It is functioning as.

Moreover, the nozzle moving mechanism part 50 maintains three nozzles 46a-46c in parallel with the holding member (not shown), and can change and set the application pitch interval by these nozzles 46a-46c. It is. For this reason, an application pitch can be changed according to the excretion state of the partition formed in the board | substrate 2.

As the alignment mark detection unit 44, for example, a CCD camera can be employed. That is, when the alignment mark detection unit 44 receives an instruction from the control unit 52, the alignment mark detection unit 44 images the alignment marks (not shown) respectively formed at the four corners of the substrate 2, and the images of the imaged alignment marks. Data is output to the control unit 52. On the other hand, the control unit 52 calculates the position of the alignment mark based on the image data picked up by the alignment mark detection unit 44. In addition, since the control unit 52 has already been given layout data such as the first electrodes 4R, 4G, 4B and the partition wall 6 designed using Computer Aided Design (CAD), the control unit 52 is aligned. Based on the calculation result of the mark and the layout data of the partition wall 6 already provided, the start point of coating, that is, the coating start position at which the coating of the hole transport material 8 is started is calculated.

The control unit 52 controls the stage moving mechanism unit 42 to move the stage 40 by a predetermined amount in a predetermined direction (left and right directions in FIG. 3), in addition to the arithmetic processing, and controls the nozzles 46a to 46c. The nozzles 46a to 46c are controlled two-dimensionally with respect to the substrate 2 by controlling the nozzle moving mechanism 50 to move by a predetermined amount in a direction orthogonal to the stage 40 (the direction perpendicular to the drawing plane). Move relative to Moreover, with the relative movement of the nozzles 46a-46c with respect to this board | substrate 2, the control part 52 responds to the nozzles 46a-46c according to the detection values a-c from each flowmeter 60. Commands d to f are output to the respective pumps 58 so that the hole transport material 8 at a predetermined flow rate flows out from the pumps 58.

And in the coating apparatus comprised in this way, when the board | substrate 2 before performing the application | coating process of the hole transport material 8 is mounted in the stage 40, the control part 52 will be based on the detection value from each part of an apparatus, etc. The operation instruction is given to each part, and the hole transport material 8 is applied between each partition (space element SP) as follows.

First, in accordance with a mark imaging command from the control unit 52, the alignment mark detection unit 44 images the alignment marks at the four corners of the substrate 2 placed on the stage 40, respectively, and the image data is captured. It outputs to the control part 52. The control part 52 which received these calculates the position of the alignment mark based on the image data, and also calculates the start point of application | coating. Then, the stage moving mechanism part 42 and the nozzle moving mechanism part 50 operate according to the movement command from the controller 52 to position the nozzles 46a to 46c at the start point. In this way, the three nozzles 46a to 46c are positioned one to one between the three partition walls (element space SP). At this time, by changing the partition walls of the nozzles 46a to 46c in accordance with the state of the partition 6 being disposed, the nozzles 46a to 46c can be accurately positioned between the corresponding partitions (element space SP), respectively. In addition, in this embodiment, although the number of nozzles is three, the number of nozzles is arbitrary.

In this way, when it becomes a state which can start application | coating, the control part 52 will start the inflow start of the hole-transport material 8 into the partition wall on the board | substrate 2 (element space SP) from each nozzle 46a-46c. At the same time as instructing each of the pumps 58, the nozzles 46a to 46c are moved in the vertical direction of the ground in Fig. 3 so that the hole transporting material 8 flows between the partitions on the substrate 2 and flows in between the partitions. . As a result, the hole transport material 8 flows into the three element spaces SP at the same time. Then, when the nozzles 46a to 46c move to the end of the element space SP, a stop command is given to each pump 58, so that the element space SP on the substrate 2 at each nozzle 46a to 46c. At the same time as the inflow of the hole transporting material 8 into the c) is stopped, a stop command is given to the nozzle moving mechanism 50 to stop the nozzle movement. In addition, the control unit 52 controls the coating amount according to the moving speed of the nozzles 46a to 46c so that the coating amount of the hole transporting material 8 at each point of the stripe-shaped element space SP becomes uniform. Doing. In this way, the application of the hole transporting material 8 to the element space SP for three rows is completed. In addition, the hole transport material 8 introduced on the hole transport layer 14 of the element space SP flows and is leveled so as to spread in the element space SP by its viscosity, and thus a hole transport material having a uniform thickness. (8) is formed. In addition, the thickness of the hole transport material 8 introduced into the element space SP can be adjusted by the flow amount of the hole transport material 8.

Next, the stage 40 is pitch-transmitted by three rows of element spaces SP so as to apply the hole transporting material 8 to the next three rows of element spaces SP. In the first three rows of grooves 11 described above, one end side of the element space SP is used as the coating start position, and the other end side is used as the coating stop position, and the nozzles 46a to 46c are moved along the partition walls. The hole transport material 8 was introduced into the element space SP. However, in the next three rows of the element space SP, the nozzles 46a to 46c are moved in the opposite direction to the moving direction, and the other side of the element space SP is provided. The hole transport material 8 is introduced into each device space SP by moving from one end to one end side.

By repeatedly performing such an operation, the hole transport material 8 can be flowed in between the partition walls (element space SP). In addition, since the hole transport material 8 at the nozzles 46a to 46c is applied by flowing it between the partition walls (element space SP), the hole when the hole transport material 8 is applied to the substrate 2 is applied. The return of the transport material 8 can be prevented. In addition, application control of the hole transport material 8 is also facilitated. Therefore, in such a point, the hole transport material 8 can be selectively flown between the partition walls (element space SP) without attaching the hole transport material 8 to the government of the partition 6. As described above, the coating apparatus of FIG. 3 is an apparatus useful in the manufacturing method of the organic EL element described.

In addition, this invention is not limited to said one embodiment, It is possible to perform various changes other than what was mentioned above unless the meaning is deviated. For example, in the manufacturing method of the organic EL element according to the above embodiment, the liquid-repellent treatment is performed on the government of the partition 6 after the application of the hole transport material 8, but the coating process and the foot of the hole transport material 8 are performed. The order with the liquefaction process may be changed.

In addition, although the coating apparatus of FIG. 3 is used in order to apply | coat the hole transport material 8 between partition walls in the said embodiment, the structure of a coating device is not limited to this, The hole transport material 8 between each partition walls is used. ), Any device such as an inkjet coating device may be used.

As described above, according to the present invention, by selectively supplying the hole transporting material between the partitions to form a hole transporting layer, the liquid-repellent treatment for the partition wall government can be performed and the liquid-repellent treatment is performed for the partition wall government. Afterwards, the organic EL material is supplied between the partition walls, thereby preventing the supplied organic EL material from moving between the other partition walls beyond the top of the partition wall, and effectively preventing the multicolor organic EL material from mixing. can do.

Claims (10)

delete A partition wall forming step of forming partition walls on a substrate corresponding to a predetermined pattern; A first coating step of selectively supplying a hole transporting material between the partitions to form a hole transporting layer; A liquid-repellent process for performing a liquid-repellent treatment on the top of the partition, A second coating step of forming an organic EL layer by supplying an organic EL material between the partition walls after the first coating step and the liquid repelling step; And the first coating step is a step of relatively moving the first nozzle with respect to the substrate along the partition walls while discharging the hole transporting material from the first nozzle. The method of claim 2, The first coating step is a step of relatively moving the plurality of first nozzles with respect to the substrate along the partition walls while simultaneously discharging the process transport material from each of the plurality of first nozzles. . The method of claim 3, wherein In the first coating step, an interval between the plurality of first nozzles is changed in accordance with the state of the partition wall prior to the relative movement of the plurality of first nozzles with respect to the substrate. The method according to any one of claims 2 to 4, In the first coating step, the hole transporting material is supplied to a space formed between the partition walls, and then the drying process is applied to the hole transporting material in the space to form the hole transporting layer. A partition wall forming step of forming partition walls on a substrate corresponding to a predetermined pattern; A first coating step of selectively supplying a hole transporting material between the partitions to form a hole transporting layer; A liquid-repellent process for performing a liquid-repellent treatment on the top of the partition, A second coating step of forming an organic EL layer by supplying an organic EL material between the partition walls after the first coating step and the liquid repelling step; The second coating step is a step of relatively moving the second nozzle with respect to the substrate along the space between the partitions while discharging the organic EL material from the second nozzle. The method of claim 6, The second coating step is a step of relatively moving the plurality of second nozzles with respect to the substrate along the partition walls while simultaneously discharging the organic EL material from each of the plurality of second nozzles. . The method of claim 7, wherein The second coating step is a method for manufacturing an organic EL element, in which the intervals of the plurality of second nozzles are changed in accordance with the state of the partition wall prior to the relative movement of the plurality of second nozzles with respect to the substrate. The method according to any one of claims 6 to 8, In the second coating step, the organic EL material is supplied between the partition walls until it is filled between the partition walls and a woman is formed in the government of the partition walls, and then the organic EL material in the female state. A method for producing an organic EL device, which is a step of forming a drying process on the hole transport layer by applying a drying treatment to the hole transport layer. An organic EL display device comprising an organic EL element manufactured by the manufacturing method of any one of claims 2, 3, 4, 6, 7, and 8.

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