TW200304850A - Method and device for treating organic exhaust - Google Patents

Abstract

The present invention provides a technology for treating the organic components in an organic exhaust while recycling and performing a waste disposal treatment at the same time. The method comprises the first cooling and condensing process of cooling and condensing an organic exhaust; the second cooling and condensing process of cooling and condensing the exhaust processed by the first cooling and condensing process; a process for recycling and regenerating the condensate in the first cooling and condensing process; and a process of using an active sludge to treat the condensate in the second cooling and condensing process.

Description

200304850

V. Description of the invention (i) [Technical field to which the invention belongs] The present invention relates to a method for treating organic waste gas which is discharged in a liquid crystal, semiconductor manufacturing process, and the like. [Prior art] In the liquid crystal and semiconductor manufacturing processes, the organic waste gas to be discharged is a gas net from a stripping solution evaporated by a photoresist stripping process or the like. Most of the stripping solution contains an organic solvent composed of monoethanolamine (MEA) and dimethylsulfoxide (DMSO). This stripping liquid is heated at 60 t to 80 ° C during the stripping process, so about 7% of it will be evaporated and introduced into the exhaust gas path. The composition of the exhaust gas is not only the materials used in the manufacturing process, but also the processing environment in the manufacturing process. For example, 'in a general clean room (c 1 e a n r ο 〇 m), it is controlled to about 25 ° C and 60% RH. Also, the exhaust gas is controlled, and the processing environment is about 2 5 and RH5 is about 0 to 60%, so the exhaust gas generated will become relatively high temperature (35 degrees). From the above, it is known that, for example, the exhaust gas from the stripping process is the same as water vapor, and as the organic exhaust gas, most of them contain monomethylethanolamine (ME A) or dimethyzene (DMS0). [Summary of the Invention] (Problems to be Solved by the Invention)

200304850 V. Description of the invention (2) The organic waste gas discharged in the liquid crystal and semiconductor manufacturing process is a large amount. In particular, since the size of the substrate used in the liquid crystal manufacturing process is also large, there are also many stripping liquids, and thus a large amount of exhaust gas is generated. Moreover, from a cost standpoint, recycling is better. Cooling and condensation are mostly used in the separation of organic components from this organic waste gas. However, since a large amount of exhaust gas is processed, a large amount of cold water is required. That is, there is a problem that the cost burden required for water and cooling becomes large. Therefore, until now, effective recovery rates have not been obtained. On the other hand, from an environmental point of view, the treatment method is to directly pass the organic waste gas through the scrubber. However, a large amount of water and traditional Chinese medicine liquid are required. Due to the operation and management status of the scrubber, odor is easily generated. Ask for existence. In addition, the treated water in the scrubber is introduced into the activated sludge treatment device as a drainage treatment. However, due to the high concentration of the flowing BOD and the water treatment, the device becomes too large, and this management method also exists. , question. From the above viewpoints, it is preferable to separate and recover the organic components, and then discard and discharge them by treatment with scrubbing sludge and the like. / However, up to now, regardless of the use of organic waste gas as an asset, it has been effectively treated as a waste water and treated as a waste treatment. It is important to provide treatment technology for the purpose of reusing the organic components of organic waste gas. And disposal. # Supplying energy at the same time to achieve the above right # 八 μ = to improve the reuse of organic components of Α γ 7 and waste gas treatment, 3 i plus the odor of waste gas to the three points q and re τ 朿 treatment technology For other purposes

200304850 V. Description of the invention (3) (Means to solve the problem) In order to solve the above problems, the inventors of the organic waste gas process in the process of separation and recovery of gas in order to solve the above problems, It was found that the two processes of cooling and condensing waste disposal in one stroke, coupled with exhaust gas, reuse, and strategy, have completed the present invention. The environment of Yomi (odor). That is, according to the present invention, the following method is provided. (1) A method for treating organic waste gas, including: a first cooling and condensing process for cooling; a process for making J liquid stored in the first cooling and condensing process; and cooling and condensing the exhaust gas that has passed through the first cooling and condensing process. A cooling condensation process; and a process of condensate stored in the second cooling condensation process. (2) The method according to (1), further comprising a mist separation process of the exhaust gas that has passed through the first cooling and condensation process before the second cooling and condensation process. (3) The method according to (1) or (2), wherein in the first cooling and condensing process, the water vapor contained in the organic exhaust gas is cooled to a temperature near a saturated vapor pressure. (4) The method according to any one of (1) to (3), wherein in the first cooling and condensation process, 70% by weight or more and 90% by weight or less of the organic components contained in the organic waste gas are recovered, and the 2 In the process of cooling and condensing, 10 wt% to 20 wt% of the organic components contained in the organic waste gas are recovered. (5) The method according to any one of (1) to (4), further comprising:

2042-5565-PF (Nl); Ahddub.ptd Page 8 200304850 V. Description of the invention (4) The process of recovering and regenerating the condensate from the first cooling and condensing process; and recovering the condensate from the second cooling and condensing process, Process of drainage treatment. (6) The method according to any one of (1) to (5), further comprising a process for treating exhaust gas that has passed through the second cooling and condensation process. (7) Organic waste rolling treatment methods include: a process for cooling and condensing organic waste gas; a regeneration process for regenerating a condensate containing a high concentration of organic components; and a process for draining a condensate containing a low concentration of organic components.

(8) The method according to (7), further comprising a process for treating the exhaust gas that fails to condense in the above-mentioned condensation process. (9) The organic waste gas treatment device includes: a first condenser for condensing organic waste gas; a second condenser for condensing exhaust gas passing through the first condenser; and a first reservoir for condensate generated from the first condenser A retention section; and a second retention section that stores condensate generated from the second condenser. (10) The device according to (9), wherein the condensing device communicates the first storage section and the second storage section so that the exhaust gas can pass through. (11) The device according to (9) or (10), wherein the first storage section and the second storage section are connected by a mist separation device.

(12) The device according to any one of (9) to (11), wherein the first condenser and the second condenser, and the first storage unit and the second storage unit are all unitized. (1 3) The apparatus according to any one of (9) to (1 2), wherein each of the i-th condensing unit and the second condensing unit is provided with a temperature detecting device in a condenser.

2042-5565-PF (Nl); Ahddub.ptd Page 9 200304850 V. Description of the invention (5) Liquid 0 (22: (9) (13) Any of the devices described in the item, including the recovery of condensate The device and the device for draining the condensate. The device of the device u, which comes from the above-mentioned first condensing party; I for two σ The condensate of the above-mentioned second condenser is convertible = to the above Recovery and regeneration device and the above-mentioned drainage treatment device. For use by the Health and Welfare Department: or the device described in (15), in which the recovery and re-tightness is exerted. The device described in any one of (1) and (2) further includes an exhaust gas treatment device that treats exhaust gas that has passed through the second condensate. -(18) The device according to (17), wherein the recovery and regeneration installation officer is provided with a device for maintaining a condensed state in the piping. ^ (19) The device according to any one of (9) to (18), wherein the 1 pipe for supplying organic exhaust gas from the condenser and / or the pipe for exhausting the second exhaust gas from the upper side is provided with a mist capture device and / or Cold

According to these methods, it is possible to separate and recover the condensate of each process of the Jm sludge treatment (there is 2) with respect to the organic waste gas by using a real and second condensing device. And effectively realize recycling and disposal. Further, according to these devices, it is possible to perform a condensation process with a degree of recovery with respect to the organic waste gas. Therefore, the recycling apparatus can supply appropriate condensate for each recycling. Drainage treatment daggers for reclamation equipment, activated sludge treatment equipment, etc. ::

2042-5565-PF (Nl); Ahddub.ptd Page 10 200304850 V. Description of the invention (6) Easy and simultaneous realization of each function [Embodiment] The embodiment of the present invention will be described in detail below. # 的 人人 明 organic waste gas treatment method includes: cooling and condensing organic waste and condensing process; condensation stored in the first cooling and condensing process =: cooling and condensing the exhaust gas that has passed through this first cooling and condensing process, and the second condensing process ; And the condensate stored in the second cooling and condensing process may include: cooling and condensing, such as _ ^,. ΛΑ ^,, the process of machine waste lice; condensing containing high concentration of organic components The regeneration process of liquid regeneration; and the condensate of the organic component passes through the activated sludge. ^ 1 Θ / Ninett waste treatment of waste treatment system B as a better device for implementing these methods, ^ Ma ll called the first condenser of organic waste gas; condensate after the above 丨 condenser is left; The device of the condensate storage section includes, in particular: the second storage section of the second household; and the i-th condensate storage section connected to the second first condensate at the same time to implement the isolation, as described above. The 24th condensate storage section method of the second condenser is redundant. The organic waste gas treatment method of the present invention is related to the device of the present invention, and it is a preferred device group. . FIG. 1 shows a schematic configuration of a method or an apparatus of the present invention.

200304850

The outline of the processing cooling condensation process and the second cooling condensation process shown in the first figure. (Organic waste gas) The method is for the purpose of implementing the first principle. The device 2 is used as the center to deal with the various principles issued by the semiconductor manufacturing process. Therefore, the temperature is controlled in a clean room at around ° C, even if it is discharged through a micro-chamber. Exhaust gas from the process, because other organic components outside the machine exhaust is 189 ° C) and other components. The condensing process at a temperature of about 25 ° C is preferably applied at a temperature of about 30 ° C to 40 machine components in a self-cleaning room suitable for electronic parts such as electronic components. Yes, it can be applied to the stripping process with photoresist. From this aspect, stripping is a high concentration of waste, which is more difficult to mix. Solvents such as organic solvents and solvents produced by DMAS0 (b · ρ · approximately below) are ‘applicable to various organic waste gas, organic waste gas emitted from components, liquid crystal displays, and printed circuit boards. More preferably, the exhaust gas from the manufacturing process is used. This exhaust gas is easier to implement than the driver to implement this hair. In particular, it can be preferably applied to controlled exhaust gas. At this time, the temperature of the exhaust gas can be efficiently recovered by cooling and condensing. In the electronic component manufacturing process, the peeling after the special process (? 1101: 〇1 丨 1: 11〇) The organic off-gas of the deliquoring component is preferably the same as the off-gas discharged from the clean room, and a large amount of off-gas is generated. In addition, because the exhaust gas has organic components, it is more convenient to regenerate the waste gas. Generally, the exhaust gas contains water vapor in addition to those vaporized during the manufacturing process. After photoresist stripping, for example, it contains MEA (bp · approximately 171 °. Boiling point is relatively high (150 ° C or higher to 200 ° C or higher). Organic waste gas is mostly used in the implementation of the stripping process. Per minute

2042-5565-PF (Nl); Ahddub.ptd Page 12 200304850 V. Description of the invention (8) The degree of 15 m3 is discharged. (Preparative or additional cooling and condensing process) Before implementing the first cooling and condensing process in the present invention, it is preferable to implement a preliminary cooling and condensing process in order to efficiently recover organic components in the organic waste gas. By implementing this cooling and condensing process, it is possible to actively recover the condensate that may be generated in the pipes that reach the original cooling and condensing process. At the stage before the condensing process, the condensate (mist) in the organic waste gas can be reduced. . In addition, this process can also be referred to as the mist capture process. The removal of the mist and condensate generated by the implementation of this process through self-piping can prevent the backflow of condensate or exhaust gas to the occurrence of organic exhaust gas. Source of semiconductor manufacturing equipment and cause pollution. In addition, with this process, it is possible to achieve heat for adjusting the organic drainage of various concentrations or components discharged during the manufacturing process to a certain composition or concentration. In addition, the prepared cooling-condensation process is' in addition to the semiconductor manufacturing process from the source of organic waste gas to the condensation process, after the condensation process, for example, even Λ ^ ^ ^ ^ ^ ^ Waiting place

1 red match e in the same month b Λ Shi. Therefore, the burden on the exhaust gas can be reduced (after the condensation process, it can be called an additional cooling condensation process). 追加 This additional e condensation process can also make condensation, by using heat dissipation. OK: Cooling. The structure of the device causes condensation to occur. In addition, natural cooling, such as special cooling

200304850 --------- V. Description of the invention (9) --- A barrier is set in the moving direction of the air to balance it. The generated condensate is condensed water (naturally discharged from the tube or forced out by a pump, etc.). From the configuration shown in FIG. 1, the self-plurality of manufacturing equipment 4 is continuously & Or # Intermittently discharged organic waste gas once it is collected in the collection piping, and the cooling and condensing process is prepared. In this form, t is a cold sublimation device and is used in the collection. When the organic waste gas in the piping 6 is natural, the piping 6 * is preferably made of a metal (such as stainless steel, preferably with corrosion resistance), which has high heat dissipation properties. The organic waste gas from the manufacturing apparatuses 4 can be uniformly mixed with each other at the same time, and can be homogenized, and removed by cooling and condensing the common central impurity components. In addition, the waste gas is supplied to the cooling section in a stable composition. T condensation process. Also, the amount of exhaust gas supply can be adjusted. The structure shown in Fig. 2 can be adopted. That is, a self-manufactured ^ is provided to the exhaust gas supply pipe 5 above the collecting pipe 6 ^ In the ': above the organic waste gas in the chamber' to discharge organic waste gas In this case, the composition can be adjusted. In this object, the two-degree position of the highest liquid level of the expected condensate can be adjusted. The fine structure is thus formed, even if the temporary position of the condensate is produced by the condensate. Pollution of device 2. χ, when the condensate is condensed, the exhaust gas of 5 units can be prevented, because the inner wall of the collection pipe 6 becomes 2 to capture the mist from the side supply;! The inner wall can be said to be useful; organic < The function of 罝), in addition to making the mist

2042-5565-PF (Nl); Ahddub.ptd _ drops) attached to the inside 200304850 V. Description of the invention (10) The wall car is easy to catch outside of it, and at the same time by contacting the wall of the pipe with better heat dissipation, Becomes easier to condense. In the figure, the side of the organic waste gas pipe 5 is connected to the collection pipe 6 as an example. However, when the upper side of the collection pipe 6 is connected, the condensate can be prevented from flowing back to the side of the production pipe 4. The configuration shown in FIG. 3 may be adopted. In this configuration, the directional f is supplied above the organic waste gas from the side, and a ^^ chamber provided with a discharge chamber for discharging the organic waste gas is formed in the collecting pipe 6. In addition, the opening of the organic waste gas supply port 5 is positioned at a predetermined height position in the hollow chamber, and the supply pipe 5 is provided in the hollow chamber β in a protruding shape. The opening is set at a predetermined interval with respect to the opening. The collision member 6a of the organic exhaust gas serves as a mist capturing device, and is set. By adopting this structure, in particular, it is easy to capture the organic waste, and the condensed components (mist gas) contained in the organic waste are collected in the collecting pipe 6. As a result, the organic waste gas with reduced mist is supplied to the cooling and condensing device at month t *. The taxi '& adopts various shapes and settings of the cymbal member 6 a as such a mist capturing device. A conflicting member is provided at the supply position of the organic waste gas in an opposed manner. Various forms can be adopted within the range of the condensate at the supply and discharge locations of the organic waste gas. The mist and the condensate generated by the new catcher in this way are preferably stored temporarily in the recovery waste liquid tank 8 for the purpose of recycling. In addition, the structures not shown in Figs. 2 and 3 of the mist trapping or condensing device are both related to the state in which the exhaust gas is supplied from the manufacturing device 2 to the collecting pipe 6, but it is not limited to this. ^ ^ It is also used for piping to the cooling and condensing process. That is, not Sb is adopted

2042-5565-PF (Nl); Ahddub.ptd 200304850 V. Description of the invention (11) The form of the collective piping 6 assembled by the organic waste gas piping 5 of the self-manufacturing device, if a hollow chamber structure with a portion of the piping is used The structure can also be applied to a structure for capturing or condensing mist in the middle of piping. The structures shown in FIG. 2 and FIG. 3 are implementation examples in the preliminary cooling and condensing process. When an additional cooling and condensing process is performed in the first stage of the exhaust gas treatment process, it can also be applied as additional cooling. Implementation of the condensation process. In other words, since the organic exhaust gas pipe 5 from the manufacturing apparatus 2 can be replaced with one or more exhaust gas supply pipes from the second cooling and condensing process described later, an additional cooling and condensing process can also be applied. (First cooling and condensing process) < The first cooling and condensing process is performed by introducing organic waste gas into the first condenser 10. The first condenser 10 is used as the second condenser 40 described later. The condenser is not limited to a variety of conventional condensers, and various condensers for cooling exhaust gas can be used in the condensers. Various types of cooling devices, such as a multi-tube type, a coil (coi) type, and a spiral UpriaU type, may be used, and a plate ... f 1 η) type cooling device is preferably used. ρ Therefore, a large amount of high-concentration exhaust gas is introduced in the condensation process. Set a better temperature and = From this point of view, I hope to set the cooling, S α, especially in the first cooling condensation process, the return conditions are better. # Gives the recycling process, but sets an effective temperature to separate the cold: i is more than Γ: Γΐ ", which effectively only makes the organic water vapor to saturation. I stomach: 疋 is contained in the exhaust gas and predicted" Fort The degree of temperature conditions. At this temperature condition 2042-5565.PF (Nl); Ahddub.ptd page 16

200304850 V. Description of the invention (12) The organic components can be condensed in a state where water condensation is prevented to the greatest extent. For example, the exhaust gas from the stripping process of photoresist is about 35 ~ 40. (: The temperature is supplied to the first cooling and condensing process. At this time, also based on the composition of the exhaust gas, for example, cold water of about 7 ° c to 10 ° c is supplied, based on the above-mentioned plant X, the most appropriate temperature conditions. It is better to set the temperature in the condenser. Special Z, this temperature condition is controlled at 25 ° C, 60% RH and discharged from the clean room, and it is a better condition in the exhaust gas containing DMS0 and MEA. &Quot; In order to achieve an effective and efficient condensing process in the condensers 10 and 40, it is preferable that each of the condensers 10 and 40 is provided with a temperature detection device 2 and ^. The temperature of the supplied organic exhaust gas is monitored. Next, by adjusting the supply of cold water, etc., a certain or appropriate temperature condition can be provided: In the i-th cooling condenser 10, the concentration of the supplied exhaust gas has a high fluctuation range, and the borrowing temperature can be adjusted If i 2 is set, an effective cooling and condensing process can be implemented. It is better to have X 'to detect and supply it to the condensers 10 and 40. Lingdu Ling is based on the temperature detected by the temperature detection devices i 2, 42. When applying cooling water supply control, have = Self-condensers 1., 4. are better. Can also detect, two: "Clothing-Cooling water flow ratio (H) ^ Detection of cold water chiller ® 'Temperature at 1 Α, man-made 軚Jiawei is effective as a PID control. Let the condensate produced by the condensation process be stored in the first condensate that is connected to the coin holder 10 and adjacent to the small farm and condensate #, 1 ^ ^ ar, ^ Λ Λ * V ^ 1 ^ f ^ So the 2nd cooling condensate in the later stage is obtained with the concentration of the exhaust gas.

2042-5565-PF (Nl); Ahddub.ptd $ 17 200304850 V. Description of the invention (13) ----- Organic ingredients. The condensate generated in the first cooling and condensing process is stored in the first storage section 16 and can be supplied to the recovery waste liquid tank 8 through the pipe 18 thereafter. After that, it can be supplied to a regenerative life system including a regenerative device (not shown). According to the i-th cold section condensation method, in order to obtain a condensate containing a high concentration of organic components within the effective range, by regenerating the condensate, effective reuse can be achieved. "Although not shown", the piping 8 needs to correspond to the condensate from the first storage unit 16 and be configured to be switchably supplied to the activated sludge treatment equipment 58 as a drainage treatment device. A blower is provided at the end of the device 2 to discharge a large amount of exhaust gas to the atmosphere. Therefore, there is a tendency that the inside of the storage portions 16, 46 is under a negative pressure. At this time, in order to control changes in temperature conditions such as the temperature of the environment from the recovery waste liquid tank 8 and the processing device 5 8 side to the above-mentioned storage sections 16 and 46, water-tightness function display devices 19 and 49 are provided. It is preferable that the storage portions 16, 46, the recovered waste liquid tank 8, and the activated sludge treatment equipment 58 play a gas blocking function. In the watertight display devices 9 and 4 9 shown in Fig. 1, the pipes 18 and 48 are designed to have a U-shaped portion capable of storing condensate, so that the watertight function is generated. In addition, according to this piping structure, it is possible to effectively prevent the liquid from the recovered waste liquid tank 8 and the activated sludge treatment equipment 58 from flowing backward to the negative-pressure storage portions 16, 46. In addition, when the storage portions 16 and 46 become negative pressure, the path from the storage portions 16 and 46 to the recovered waste liquid tank 8 and the activated sludge treatment equipment 58 is also discharged by naturally falling down. It may become difficult. For the nature of waste liquid

2042-5565-PF (Nl); Ahddub.ptd Page 18 200304850 V. Description of the invention (14) Drop 'Gear transmission when the necessary slope is not adopted is effective. ^ With the above-mentioned blocking function, it is In the piping 18, it is preferable that the detection device is set to be used for detecting the composition of the first condensate. According to the detection device, the knife detection device is more suitable for regenerating the condensate as an organic component and the moisture concentration. 'Energy supply is used to determine whether it is supplied to the waste gas tank 2 = waste liquid tank 8,' or the device is, can Activated sludge equipment 58 from i 锸 羽 ax ceremony. The detection device for detecting the moon dagger is suitable to use the conductivity roll measurement device P "select and use '. However, the first cooling and condensation process is 70% to 90% by weight of the dagger component. The second method is to recover the organic waste gas within the bounds, which is used as a recycling method: Formula II. The recovery rate in this range is the organic component concentration of the condensate: the negative of the sludge produced in the condensation process; reason = It is about 80%. V dead son-in-law treatment. Better (second cooling and condensing process) The exhaust gas that passes through the first cooling and condensing switch is the organic component that is removed by the broken part and is supplied. The second cooling and condensing process. The second cooling and condensing process is because it is supplied with exhaust gas that contains relatively low: agricultural products, the first cooling and condensing process, degree or composition. And: low: J component, and is The condensate produced by the stable thickening process contains a low concentration; compared with the first cooling and cooling, the cold produced in the second cooling and condensing process is suspected to be liquid / mainly supplied.

2042-5565-PF (Nl); Ahddub.ptd page 19 200304850 V. Description of the invention (15) The condensate of the plutonium treated with activated sludge is low in concentration and stable = process = process is preferred. This cooling load, or the second cooling condensation and w which can reduce the burden on the activated sludge, is better designed. For example, it is preferable to set the temperature from this point of view. For example, it is better to set the temperature of the exhaust gas group in the condensation cooling condensation process to about 7 to 10 t. When the exhaust gas from the LI condensation process reaches the second condensing cry 40, the mist separation device 24 such as a mist eliminator is more suitable. Nightmare © Yu Erbu, the condensate (second condensate) produced during the condensation process is the second colder, which is the lower part of 4 ° and communicates with the condenser 4, and the second cooler is condensed in the second cooler. The condensate obtained in the production process is such that the condensate produced in the second and second condensation processes is a low-concentration organic component. The condensate produced in the second cold section condensation process is stored in the second condensation section 46 'It can be supplied to the activated sludge treatment equipment 58 through the piping 48. In the activated sludge treatment equipment 58, the organic sludge is decomposed by the action of activated sludge', and the wastewater can be purified. According to this treatment method, since > However, the burden of mud can be reduced or adjusted, so it can smoothly perform live steep f / ni, and the scale can also be reduced in size (c 0 m P act). In addition, 笞 4 8 疋 is a response The method of supplying the condensate to the waste tank liquid 8 as needed is formed as a switchable supply source. The detection device for detecting the composition of the second condensate is set to 48. By the way, the detection is related The organic component and / or water concentration of the second condensate can be determined as being supplied to In the second recycling tank 8 the waste liquid condensate or

200304850

It is an activated sludge device 5 8 for the purpose of exhaust gas treatment. In particular, the second condensate can be judged so that it can effectively use organic components. When the first cooling and condensing process and the second cooling and condensing process are continuously performed, the device configuration is not particularly limited. For example, it is possible to use The structure of the device shown in FIG. ’,

In the device 2 shown in FIG. 1, the first condensate storage section 6 and the second condensate storage section 46 block the contact of each condensate by the partitioning device 20, and the first condensation The storage portion 16 and the second condensate storage portion 46 are integrated into a single storage tank shape. The condensers 10 and 40 are provided above the respective storage portions 16 and 46 so as to communicate with the respective storage portions 16 and 46. On the other hand, the exhaust gas that has passed through the first cooling-condensation process can be ventilated through the condensate storage section 16 to the second condensate storage section 46. In particular, in the configuration shown in FIG. 1, the vented portion is configured by the mist separation device 24. The exhaust gas that has passed through the cooling and condensing process can be separated by the mist as it moves to the second condenser 40 side.装置 24。 Device 24. In addition, as the mist separation device 24, various porous bodies such as a filter, a mesh, and a porous body can be used. (Exhaust gas treatment process)

As a result, the exhaust gas in the second cooling and condensing process is reduced even more. This exhaust gas is preferably supplied to an exhaust gas treatment process. At the exhaust — various purifiers. For example, if you add a neutralizing solution to the waste, wash the pan with water, Kushiro \ ^, ^, w without dissolving the remaining organic ingredients in

Water can effectively reduce or remove Hao Kong from Fengfeng Huang and 齑 ^ L-乂. Preferably by brushing

200304850 V. Exhaust gas treatment process of invention description (17). By cooling and condensing the organic components of the present invention, the organic components can be removed afterwards: self-waste is well removed, so even if the organic components are released, the odor is of course reduced. % I Brother and ecological impacts are reduced = The exhaust gas from the second cooling and condensation process is passed through the device 60 and then supplied to the exhaust gas treatment process. It is a viscous process that can remove the waste gas treatment process. In addition, when the second cooling and condensing process is carried out, the particles are used. There is no particular limitation on the shape of the device at the time of the processing process. ~, 彳 如 ’can be shown in FIG. 1 In the device 2 shown in FIG. 1, #. The device 60 is installed on the second condenser 40, and an exhaust gas treatment unit 70 such as mist separation of a display unit or the like. Jingqi’its ”= has a scrubber and releases it to the atmosphere. In addition, the waste liquid of the mosquito lice treatment device 70 is a coating liquid) which is formed into an exhaust gas treatment liquid (cleaned to achieve an active soiling / preparation with an organic component 58) that can be supplied to the active T device 70. With this, The supply of organic components that can be = is natural, =!; = 1 = Qiao 7〇 in the pipe 62 'as in the above-mentioned condensing device, additional cooling can be implemented. Page 22 2042.5565-PF (Nl); Ahddub. ptd 200304850

Condensation. This can reduce the burden on the exhaust gas treatment device. The exhaust gas that has passed through the condenser 40 also becomes 10 °; the temperature of the two degrees of condensation is better. When the temperature drops excessively, the moisture in the tube will be better. Also, during the summer, outside the tube, Will cause the existence of condensation problems. As this condensation state maintaining device 64 is! For example, a lid (heating) device mounted on a west tube or a temperature-controlled air conditioner. Brother Lu Yige ^ When supplying cooling water to the second cooling condensation process and the second cooling and cooling process, first supply cooling water to the second cooling and condensation process and let it pass, and then supply cooling water to the first cooling The condensing process can effectively return organic components, and make the operation of the cooling water efficiently use the amount of water. In the above-mentioned form, the activated sludge treatment process that has been exemplified may use other chemical microbiological sludge. The treatment process or device is related to the drainage treatment process or the decoration device. However, the purpose is not limited to this. The process or device replacement of the material is not specifically described in detail, and can be applied. Known technology. According to the present invention, in addition to the reuse and disposal of organic components from organic waste gas, necessary equipment for these can be reduced, and the size can be reduced. In addition, if the waste treatment process or the exhaust gas treatment device is provided, this treatment technology can effectively reduce the organic components in the exhaust gas after the exhaust gas treatment process. Therefore, it can reduce the environmental and

200304850 V. Description of invention (19) Bad influence of state (odor). In addition, according to this technology, together with the reuse and disposal of organic components, the purification of exhaust gas can be achieved simultaneously and easily. (Effects of the Invention) According to the present invention, there is provided a processing technology capable of achieving reuse and disposal of organic components from organic waste gas.

2042-5565-PF (N1); Ahddub.ptd Page 24 200304850 Brief Description of Drawings Figure 1 is a schematic diagram showing a process and an apparatus related to the processing technology of the present invention. Figures 2 (a) to 2 (b) are diagrams showing one form of a mist capture device or a condensation device. Fig. 3 shows another form of the mist capture device or the condensing device. 0 Symbol description: 4 ~ semiconductor manufacturing device, 6 ~ collection piping, 8 ~ recovered waste liquid tank, 1 ~ 42 ~ temperature detection device 18, 48, 62, 72 ~ Piping 20 ~ Separation device, 5 8 ~ Activated sludge treatment device 6 4 ~ Condensation state maintenance device

2 ~ Exhaust gas treatment device '5 ~ Organic waste gas piping, 7 ~ Organic waste gas piping, 1 0, 4 0 ~ Condenser' 16, 46 ~ Condensate reservoir, 19, 4 9 ~ Water tightness display device 24 ~ Mist Separation device, 60 to mist separation device, 70 to exhaust gas treatment device.

Claims (1)

200304850 ΐ · A method for treating organic waste gas, comprising: · a first cooling and condensation process for cooling and condensing organic waste gas; a process of cold = stored in the first cooling and condensation process; cooling and condensation in the first cooling and condensation process Μ Α ^ Μ & 0 people condensation process; and the process of cooling the condensate stored in the second cooling and condensing process. 2. According to the method described in item 1 of the scope of patent application, Lizhong further includes a gas separation system m to separate the waste rolled mist processed in the above-mentioned cooling and condensation process. This mist separation process is implemented before the previous process. A 3. The method according to item i or item 2 of the scope of patent application, wherein in the first cooling and condensation process, the vapor pressure and saturation of the water-based gas contained in the organic waste gas are almost equal Up to the vicinity of the temperature, 'Cold 4 · The method described in item i or 2 of the patent scope' in which the first cooling and condensing process described above is performed in which the organic waste gas contained in the organic waste gas is 70% by weight or more and 90% by weight or less. In the second cooling and condensing process described below, 10% by weight or more and 20% by weight or less of the organic components contained in the organic waste gas are recovered. 5 · The method according to item 1 or 2 of the scope of patent application, further comprising: a process of recovering the condensate from the first cooling and condensation process and regenerating the recovered condensate; and recovering the second Cooling the condensate of the condensing process, the cold 200304850 Six Patent Application Process of condensate drainage. 6. The method according to item 1 or 2 of the scope of patent application, further comprising a process for treating the exhaust gas treated in the second cooling and condensation process. 7-A method for treating organic waste gas, including: a process for cooling and condensing organic waste gas; a process for regenerating a condensate containing a high concentration of organic components; and a system for draining condensate having a low concentration of organic components. 8. The method according to item 7 of the patent application scope, further comprising a process for treating the exhaust gas that has not been condensed in the above-mentioned condensation process. 9. · An organic waste gas treatment device, comprising: a second condenser, a first condenser, a first condenser, which condenses organic waste gas; an exhaust gas which is condensed in the first condenser, and stored in the first condenser The condensate produced by this second condenser is true: 1 ΐ. And the second storage department has a mutual exchange; the device described in item 9 above, wherein the first and the second storage units are connected to each other, and the radon gas can be 11 · Such as the patent application scope of the 9th or 丨 factory. The first and second storage sections are wrapped by mist; the device described above, where the above ^ ... please specifically surround the first and second condensers of the mist center and the device described in the above section, which makes the above 13. If the patent application scope is 9th, the 2 remaining parts are unitized. The first and second condensation units are each provided with a condenser and the device described above, which makes the above 14 · such as the patent application scope 9th or / 〇 = temperature detection Device. The device described by _ __ includes t 2042-5565-PF (Nl); Ahddub.ptd page 27 200304850 6. The scope of the patent application includes the device for recovering and regenerating the cold Wei and the device for draining the condensate 15. The device as described in item η of the scope of the application for printing, wherein the condensate from the first condenser and the cold from the second condenser are relative to the above-mentioned recovery and regeneration and the above-mentioned drainage treatment. Supply I also choose 1 6 · The equipment as described in the scope of patent application No. 丨 4 or 丨 5 includes the official blocking device (Watertightness display device), the piping age is further provided so that the first storage section is connected to the recovery and regeneration device, and the clothing is a tube, and the second storage section is connected to the drainage device Match 2 ^ Match 1 of at least one of & 1 7 · The device as described in item 9 or 10 of the patent application scope, 1 includes a device for processing the exhaust gas processed in the second condenser. Thousands of packages 18. The device according to item 17 of the scope of patent application, wherein another device for condensing the exhaust gas processed by the second condenser is provided in the second condenser and The above-mentioned waste gas service = in the connected piping. Chuan Yizhi 19. The device according to item 9 or 10 of the patent application scope, wherein At least one of the mist trap device and the condensing device is at least one of a pipe to which the first condenser supplies organic exhaust gas and a pipe to which the second cold exhaust gas is discharged. ^ "