TW200301220A - Improved emission silicate waveguide compositions for enhanced L-band and S-band emission and method for its manufacture - Google Patents

Improved emission silicate waveguide compositions for enhanced L-band and S-band emission and method for its manufacture Download PDF

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TW200301220A
TW200301220A TW91137847A TW91137847A TW200301220A TW 200301220 A TW200301220 A TW 200301220A TW 91137847 A TW91137847 A TW 91137847A TW 91137847 A TW91137847 A TW 91137847A TW 200301220 A TW200301220 A TW 200301220A
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TW91137847A
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Mark Theodore Anderson
Craig Russell Schardt
James Robert Onstott
Kenton Derek Budd
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3M Innovative Properties Co
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Priority claimed from US10/299,229 external-priority patent/US20030145629A1/en
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Abstract

A method for manufacturing an optical fiber, the method including the steps of providing a substrate tube; depositing a boron-free cladding layer; depositing a core comprising a glass including silica, and oxides of Al, Ge, Er, and Tm; collapsing the substrate tube to form a preform: and drawing the preform-to yield optical fiber. A co-doped silicate optical waveguide having a core including silica, aluminum, germanium, erbium and thulium. The composition concentrations are: Er from 15 ppm to 3000 ppm; Al from 0.5 mol% to 12 mol%; Tm from 15 ppm to 10000 ppm; and Ge from 1 mol% to 20 mol%. In a specific embodiment, the concentration of Er is from 150 ppm to 1500 ppm; Al is from 2 mol% to 8 mol%; and Tm is from 15 ppm to 3000 ppm.

Description

20030122( ⑴ 玫、發明說明 (發明說明應敘明:發明所屬之技術領域、先前技術、内容、實施方式及圖式簡單說明) 先前技術 本發明係關於可&供延長之使用哥命’且提昇延伸之 L-光帶(1570-1630 nm)及S-光帶(1450-1530 nm)發射之具有化 學組合物之波導。20030122 (⑴ Mei, description of the invention (the description of the invention should state: the technical field to which the invention belongs, the prior art, the content, the embodiments, and the simple description of the drawings). Lift the extended L-light band (1570-1630 nm) and S-light band (1450-1530 nm) of the waveguide with chemical composition.

經光纖網路之高速光通訊可經由光訊號傳送極大量之 資料。當此等光訊號經過長距離,且以光學裝置耦合、操 作或引導,則會使強度下降。訊號之衰減可能因許多因素 造成,如傳送纖維之本身吸收及散射、耦合損失及彎曲損 耗。當訊號變得較弱時,解讀及傳輸訊號會更困難。最後 ,訊號會變得太弱以致於流失資料。 光放大為將光訊號放大或增強之技術。光放大為現存高 速光通訊之重要部分。 光放大一般係使用含泵浦雷射、波長分工多工器、隔離 器、增益成形柵、主動稀土摻雜之光纖之裝置(放大器)進 行。現存光纖網路-及光放大器-操作之一般波長範圍為 φ 1530-1570 nm,即所謂C-光帶。光帶可定義成波長之範圍 ,亦即其中可處理光訊號之操作範圍。較大量之可用光帶 一般會轉化成更有用之通訊頻道。頻道愈多則可傳送更多 > 資料。High-speed optical communication via optical fiber networks can transmit extremely large amounts of data via optical signals. When these optical signals travel over long distances and are coupled, operated, or guided by optical devices, the intensity decreases. Signal attenuation can be caused by many factors, such as absorption and scattering by the transmission fiber itself, coupling loss, and bending loss. When the signal becomes weaker, it is more difficult to interpret and transmit the signal. Finally, the signal becomes too weak to lose data. Optical amplification is a technology that amplifies or enhances optical signals. Optical amplification is an important part of existing high-speed optical communications. Optical amplification is generally performed using a device (amplifier) containing a pump laser, a wavelength division multiplexer, an isolator, a gain-shaping grid, and an active rare-earth-doped fiber. Existing fiber optic networks-and optical amplifiers-operate at a general wavelength range of φ 1530-1570 nm, the so-called C-band. An optical band can be defined as a range of wavelengths, that is, an operating range in which an optical signal can be processed. A larger number of available light bands will generally translate into more useful communication channels. More channels can send more > data.

Hf 各光帶係與文字上之名稱相同。本申請案中所用之光帶 名稱為: -6 - (2) _ 光帶 波長範圍 C- 〜1530 至〜1570 nm L- 1570 至〜1605 nm 延伸之L-光帶 1570 至〜1630 + nm S-光帶 1450 至 1530 nm 目前’高速網路主幹光纖網路係在約每一 40-100公里依 賴光放大器,以提昇訊號。最先進之商務系統係依賴密集 波長分工多工器(DWDM),在狹窄之波長光帶(例如光帶)Φ 中傳輸〜80個10 Gbit/秒之頻道。—頻道以〜〇 4 nm分隔。此等 頻道可以向前或向後〇·4 nm傳輸插入(向前及向後引導之 頻這間0.4 nm),以在單一光纖上提供多兆位元/秒之雙向 傳輸速率。 最近’由於L-光帶放大器之出現,因此可使用c —及l-光帶放大器,使光傳輸操作範圍由153〇_1565 nm延伸至 1530-1605 nm,其可提供至多16〇頻道/光纖。對於甚至更廣 之光帶操作亦有明顯期望,以增加資料之產出。正常之操 作受限於麵摻雜之光纖中激發態之吸收最大為16〇5 nm。 在以碎酸鹽為主之光纖中之操作理論上限制在〜165〇 nm ’因為高衰減,且因為波長超過1650 nm下之多聲子吸收 。目前,因為巨彎曲之損耗使光纖系統中之操作實際上受 限在約16 3 0 n m。 未來之系統將可能使用自1450至1630 nm之波長,其包含 所謂的S-光帶。使用S-光帶經證明其資料攜帶之容量幾乎 (3) 為現有二段C-+L-光帶系统夕 w卞、尤义兩倍。實驗證明已經顯示使 用C-+L- + S-光帶之結構可左i &早一光纖中傳輸至多約10.5 Tb/s。 在1450-163 0 nm區中之光故 大、以稀土摻雜之纖維放大 摻雜之組件放大。 大一般有三種方法·· Raman放 器放大,及合,併Raman與稀土Hf each light band is the same as the name on the text. The names of the optical bands used in this application are: -6-(2) _ Optical band wavelength range C- ~ 1530 to ~ 1570 nm L- 1570 to ~ 1605 nm Extended L-band 1570 to ~ 1630 + nm S -Optical band 1450 to 1530 nm At present, 'high-speed network backbone optical fiber networks rely on optical amplifiers every about 40-100 kilometers to enhance the signal. The most advanced business systems rely on the Dense Wavelength Division Multiplexer (DWDM) to transmit ~ 80 channels of 10 Gbit / s in narrow wavelength optical bands (such as optical bands) Φ. — The channels are separated by ~ 〇 4 nm. These channels can be inserted forward or backward by 0.4 nm (0.4 nm between forward and backward frequencies) to provide a multi-megabit / second bidirectional transmission rate on a single fiber. Recently, due to the advent of L-band amplifiers, c- and l-band amplifiers can be used to extend the optical transmission operating range from 1530-1565 nm to 1530-1605 nm, which can provide up to 160 channels / fiber . There are also clear expectations for even wider light band operations to increase data output. Normal operation is limited by the maximum absorption of excited states in surface-doped fibers to 1605 nm. The operation in the optical fiber dominated by broken salt is theoretically limited to ~ 1650 nm 'because of high attenuation and because of the phonon absorption at wavelengths exceeding 1650 nm. At present, due to the huge bending losses, operations in fiber optic systems are practically limited to about 16 3 0 nm. Future systems will likely use wavelengths from 1450 to 1630 nm, which contain so-called S-light bands. The use of S-optical tapes has proven that their data carrying capacity is almost (3) twice as much as the existing two-stage C- + L-optical tape system. Experiments have shown that structures using C- + L- + S-bands can transmit up to about 10.5 Tb / s in the first optical fiber. The light in the 1450-163 0 nm region is large, and the rare-earth-doped fiber is amplified. The doped component is amplified. There are generally three methods: Raman amplifier amplification, and close, Raman and rare earth

Raman光纖放女SRaman Fiber Optic Girl S

Raman係依賴輸入光子盥w • 尤卞與晶格震動(光子)之結合,將泵浦 入之光轉換成較長之波長r 反長(Stokes轉換)。放大之光譜會變 寬’但有時會有不期望之阵 ^ S又陡峭圖案。該方法並無效,且需 要咼功率之栗浦源。該高功盘 门力丰系浦包含光纖雷射或一系列 雷射二極體,其成本相當。、 问 咸万法會因為伴隨而來之強 度而k成非線性。因為其需古 *要同的輸入強度,因此該方法 可能導致其他不必要之非 一 非凉性製程,如4-波混合及本身之 相凋即。&是’ Raman放大器係與稀土摻雜之放大器併用 :以增加跨距長度’尤其是10Gbit/s及更快之系統。 H j# 光纖放大器 稀土接雜之放大器係依 队孭九泵浦段稀土離子.中電子之 激發,接著在激發之龜j m 口覆到較低能階態時發射。激發 之電子可以以二種輻射程庠髟· 序I弛·自動發射及刺激發射。 前者會造成不必要之雜訊’後者可提供放大。放大器之重 要參數為其光譜寬度'雜訊及功率轉化效率⑽卜後二 參數與稀土離子之激發熊*各 、 〜可命有關·使用壽命較常造成較 低之雜訊及較高之pcbc -光 尤T中先纖足光譜寬度(決定有 多少頻道可在C-光帶中同時放大 茂大)與稀土摻雜心破璃之自 20030122(The Raman system relies on the combination of input photons, w •, and lattice vibration (photons) to convert the pumped light into a longer wavelength r inverse length (Stokes conversion). The zoomed-in spectrum will become wider ’but sometimes there are undesired arrays and steep patterns. This method is not effective, and it requires the power of Kuriura source. The high power disk Menlifeng series pumps contain fiber lasers or a series of laser diodes, and their cost is comparable. Question: The Xianwan method will be non-linear due to the accompanying strength. Because it requires the same input strength, this method may lead to other unnecessary non-cooling processes, such as 4-wave mixing and its phase decay. & Is a ‘Raman amplifier system combined with a rare-earth doped amplifier: to increase the span length’, especially 10Gbit / s and faster systems. H j # Fiber Amplifier The rare earth doped amplifier is excited by the rare earth ion in the pumping section of the Nine Nine Pumps, and then emitted when the excited turtle's j m port covers a lower energy state. Excited electrons can relax in two radiation paths, sequence I, automatic emission, and stimulate emission. The former can cause unnecessary noise, and the latter can provide amplification. The important parameters of the amplifier are its spectral width, noise, and power conversion efficiency. The latter two parameters are related to the excitation of rare earth ions. Each is ~ relevant. The service life is often caused by lower noise and higher pcbc- In Guangyou T, the width of the spectrum (determining how many channels can be enlarged in the C-light band at the same time) and the rare-earth-doped heart-breaking glass have been developed since 20030122 (

(4) 動發射光譜之全-寬度-半-最大(FWHM)有關 大多數商用放大器係以其中之蕊玻璃包括本 范Q鋁及鑭 (SALE-(碎、鋁、鋼、餌))或鋁及鍺(SAGE)之餌摻雜矽 之光纖,該二傳統光纖種類中,SAGE可提供稍女 '止。 寬度,供額外之頻道使用。SALE光纖通常提供稀土離子 稍高之溶解度,可用於稍短之光纖。此對於例如極化模能 分散之最小化有利。SALE及SAGE光纖一般提供C-或L_光帶 之放大,但此會留下未使用之氧化矽傳輸光纖之大部分低 二耗區’亦即延伸之L-光帶區(>i6i〇 nm)之長波長部分。 s、光帶中,稀土摻雜之光纖放-大器一般係依賴非矽酸鹽 %雜链(Tm)之玻璃。链提供中心〜i47〇nm之相對較廣之 發射。铥之能量水準為使得多聲子製程可輕易的終止該傳 J尤其是咼聲子能主體,如氧化矽。基於該理由,較低 耳予能玻璃如重金屬氧化物(例如鍺酸鹽、缔酸鹽及綈酸 藥破璃),尤其是氟化物玻璃如”ZBLAN”為铥之較佳主體。 此等非矽酸鹽玻璃不容易纖維化及熔接成現有之傳輸光 我’且商業上之應用迄今為止仍受限。 ^伸之L -光帶中’稀土摻雜之光纖一般為重金屬氧化物 ^ ^氟化物為主。重金屬氧化物玻璃之實例為以氧化錡及 虱化銻為主之玻璃。此二類玻璃均不易熔接,因為其溶點 %且折射係數高。 S•及延伸之L-光帶中,研究者曾使用同時含有铒及铥之 、之光纖進行光放大器之研究。未審定之韓國專利申請案 第 1〇·1998-00460125號提及具有包括 Si〇2、p2〇5、幻2〇3、Ge〇 -9- 20030122( (5) 、Er203、Tm203 (SPAGET)之蕊之光纖。Er及Tm離子之範圍 為100-3000 ppm,且蕊除Er及Tm外可視情況含Yb、Ho、Pr 及Tb。該參考文獻尚提及含Si02、F、P205、BAs之包覆層。 公開之文獻(R· L Shubochkin等人,”Er3'Tm3 +共摻雜之氧 化矽光纖雷射n,OSA TOPS第26冊,先進之固態雷射;Μ. M. Fejer,Hagop Injeyan,^Ursula Keller, Eds; 1999 Optical Society of America,pp 167-171)討論Er-Tm共摻雜之氧化碎光纖雷射。 該雷射含有具有 Si02-Al203-Ge02-Er203-Tm203 蕊(SAGET)之 光纖,且在945-995 nm下泵浦,獲得Er (〜1.55 μπι)、Tm (〜1.85-1·96μρηι)或二者之發射,依雷射腔中鏡之參數、光 纖長度、泵浦速率、及泵浦波長而定。二光纖被提出過。 第一種光纖中之Er/Tm濃度為6000/600 ppm。第二種光纖中 之濃度為1200/6000 ppm。數孔隙(NAs)分另>J為〜0.27及〜0.12 。第二種模態之切斷對二者均為約1.4微米。第一種光纖 呈現出雷射(增益),但第二種則否。 另一文獻(H· Jeong M’Er3+/Tm3 +公摻雜之氧化矽光纖之放 大自動發光源之特徵n CLEO 2000, CThV3·第544-545頁)提出 含Er及Tm,且相較於僅含铒之光源,在S-光帶區呈現明 顯發射提昇之放大之自發發射(ASE)光源。提出之纖維含 Si〇2-Al203-Ge02-Er203-Tm203蕊(SAGET),且含二 Er/Tm量。第 一種光纖之Er/Tm濃度為1200/6000 ppm。第二種之濃度為 300/600 ppm。光纖之NAs分別為0.2及0.22。二情況中發現 〜90 nm之FWHM向前ASE峰約為1460至1550 nm。該第二纖維 之ASE比第一種高約5 dB。 -10- 20030122( ⑹ 然而,上述參考文獻並未揭示需要之元素含量及比例, 且未指出不同之元素在玻璃中之角色,甚至未提出使用壽 命數據之測量。再者,揭示之包覆材料含爛,其會加速在 含鍺玻璃中形成光缺陷。含铥之矽酸鹽玻璃會使光變暗。 含鍺之矽酸鹽光纖中添加鍺會進一步使光變暗提昇。包覆 層中存在之硼會在抽出光纖所需之熱加工過程中擴散入 蕊中,且與铥結合,因此使含Tm/Ge之蕊中之光變暗提高。 據此,過去針對多光帶服務之持續需求,極需要單一放 大器,可以與矽酸鹽傳輸光纖相容,且在波長1570及〜1630 nm間(亦即延伸之L-光帶)具有明顯的增益。操作至〜1630 nm之延伸L-光帶放大器相較於一般L-光帶放大器將會超 過50%以上之頻道。因此,需要可在延伸之L-光帶中提供 實質發射之以矽酸鹽為主之光纖。亦需要具有可與現行光 纖網路相容之經濟、S-光帶放大器。期望之光纖放大器在 期望之光帶上與現有之放大器相比將提供更長之使用壽 命,及/或增加之發射強度。 發明内容 本發明係針對製造改善之SAGET光波導及波導材料之 方法。尤其,本發明提供一種超越現有光纖SAGET組合物 之改善發射性能。 製造本發明光纖之方法包括之步驟為:提供基材管;沉 積無硼之包覆層;沉積包括含氧化矽及Al、Ge、Er及Tm 氧化物之玻璃之蕊;使基材管崩塌形成預成形物;且抽出 預成形物獲得光纖。 -11 -(4) Full-width-half-maximum (FWHM) of the dynamic emission spectrum. Most commercial amplifiers are based on the core glass including this standard Q aluminum and lanthanum (SALE- (broken, aluminum, steel, bait)) or aluminum And germanium (SAGE) bait-doped silicon optical fiber, in these two traditional fiber types, SAGE can provide slightly more women. Width for additional channels. SALE fiber usually provides slightly higher solubility of rare earth ions and can be used for shorter fibers. This is advantageous, for example, in minimizing the dispersion of polarization modes. SALE and SAGE fibers generally provide amplification of C- or L-bands, but this will leave most of the unused silicon oxide transmission fibers in the low-second-consumption region, that is, the extended L-band region (> i6i. nm). s. In the optical band, rare-earth-doped fiber amplifiers-amplifiers generally rely on non-silicate glass (Tm) glass. The chain provides a relatively broad emission from the center to i47nm. The energy level of plutonium is such that the multiphonon process can easily terminate the transmission J, especially the plutonium energy subject, such as silica. For this reason, lower ear-energizing glasses such as heavy metal oxides (such as germanate, associate, and gallate), especially fluoride glasses such as "ZBLAN" are the preferred hosts for rhenium. These non-silicate glasses are not easily fibrillated and welded into existing transmission light beams, and commercial applications have so far been limited. ^ The rare earth-doped optical fiber in the stretched L-optical band is generally a heavy metal oxide. ^ Fluoride is the main component. Examples of heavy metal oxide glasses are glasses mainly made of thorium oxide and antimony lice. Neither type of glass is easily welded because of its% melting point and high refractive index. In S • and extended L-light bands, researchers have used optical fibers containing both 铒 and 铥 to conduct optical amplifier research. Unexamined Korean Patent Application No. 10 · 1998-00460125 mentions that there are patents that include Si02, p205, Magic203, Ge0-9-20030122 ((5), Er203, Tm203 (SPAGET) Core fiber. The range of Er and Tm ions is 100-3000 ppm, and the core may contain Yb, Ho, Pr, and Tb as appropriate except Er and Tm. This reference also mentions packages containing SiO2, F, P205, and BAs. Cladding. Published literature (R · L Shubochkin et al., "Er3'Tm3 + co-doped silica fiber laser n, OSA TOPS Book 26, Advanced Solid State Lasers; M. Fejer, Hagop Injeyan , ^ Ursula Keller, Eds; 1999 Optical Society of America, pp 167-171) discusses Er-Tm co-doped oxidized shredded fiber lasers. The laser contains a core with Si02-Al203-Ge02-Er203-Tm203 (SAGET) Fiber, and pumped at 945-995 nm to get the emission of Er (~ 1.55 μπι), Tm (~ 1.85-1 · 96 μρηι), or both, depending on the parameters of the laser cavity mirror, fiber length, pump The speed and pump wavelength depend on it. Two fibers have been proposed. The Er / Tm concentration in the first fiber is 6000/600 ppm. The concentration in the second fiber is 1200/6000 ppm. Pore (NAs) points > J are ~ 0.27 and ~ 0.12. The cutoff of the second mode is both about 1.4 microns. The first fiber exhibits laser (gain), but the second one No. Another document (H. Jeong M'Er3 + / Tm3 + male doped silicon oxide optical fiber amplified automatic light source characteristics n CLEO 2000, CThV3 · pages 544-545) proposed to contain Er and Tm, and compared In the light source containing only plutonium, a magnified spontaneous emission (ASE) light source showing significant emission enhancement in the S-light zone. The proposed fiber contains Si〇2-Al203-Ge02-Er203-Tm203 core (SAGET), and contains two Er / Tm. The Er / Tm concentration of the first fiber is 1200/6000 ppm. The concentration of the second fiber is 300/600 ppm. The NAs of the fiber are 0.2 and 0.22. In the second case, the FWHM direction of ~ 90 nm was found. The front ASE peak is about 1460 to 1550 nm. The ASE of this second fiber is about 5 dB higher than the first. -10- 20030122 (⑹ However, the above references do not disclose the required element content and ratio, and do not indicate the difference The role of the element in glass has not even proposed the measurement of service life data. Furthermore, the disclosed clad material contains rot, which will accelerate the formation of light defects in the germanium-containing glass. Tritium-containing silicate glass will dim the light. Adding germanium to germanium-containing silicate fibers will further dim the light. The boron present in the cladding layer diffuses into the core during the thermal processing required to extract the optical fiber, and combines with the plutonium, thereby darkening and improving the light in the core containing Tm / Ge. According to this, in the past, the continuous demand for multi-band services required a single amplifier, which was compatible with silicate transmission fibers, and had obvious wavelengths between 1570 and ~ 1630 nm (that is, the extended L-band). Gain. The extended L-band amplifier operating to ~ 1630 nm will exceed 50% of the channels compared to a normal L-band amplifier. Therefore, there is a need for silicate-based fibers that can provide substantial emission in the extended L-band. There is also a need for economical, S-band amplifiers that are compatible with existing fiber optic networks. The desired fiber amplifier will provide a longer useful life and / or increased emission intensity in the desired optical band compared to existing amplifiers. SUMMARY OF THE INVENTION The present invention is directed to a method for manufacturing an improved SAGET optical waveguide and waveguide material. In particular, the present invention provides an improved emission performance over existing fiber optic SAGET compositions. The method for manufacturing the optical fiber of the present invention includes the steps of: providing a substrate tube; depositing a boron-free cladding layer; depositing a core including glass containing silicon oxide and Al, Ge, Er, and Tm oxide; collapsing the substrate tube to form A preform; and extracting the preform to obtain an optical fiber. -11-

20030122( ⑺ 其一列舉之具體例中,以之濃度為15 ppm至3000 ppm, A1之濃度為0.5莫耳%至12莫耳% ; Tm之濃度為15 ppm至 10,000 ppm ;且Ge之濃度低於或等於20莫耳%。依另一具體 例,Er之濃度為150 ppm至1500 ppm ; A1之濃度為2莫耳%至 8莫耳% ; Ge之濃度為1莫耳%至20莫耳% ;且Tm之濃度為 1 5 ppm至 3000 ppm 〇 蕊尚可包含F。列舉之濃度低於或等於6陰離子莫耳%。 蕊可至少包含第一及第二區,其中之第一區含與第二區 實質不同之Er與Tm比。該區可為環狀排列。 使蕊沉積之步驟蕊可以多MCVD通道、多溶膠通道及/ 或多煙灰沉積、溶液摻雜及強化通道達成。 L-光帶放大器可在本發明下,使用藉由結合光纖與泵浦 雷射製造之光纖製造。 本發明之共摻雜矽酸鹽光波導包含蕊材料,該蕊材料包 括氧化珍及銘、鑭、鈽及铥之氧化物。Er之濃度為15 ppm 至 3000 ppm ; A1 為 0.5莫耳 %至 12莫耳 % ·, Tm為 15 ppm至 10000 ppm ’且Ge為1莫耳%至2〇莫耳%。更特定之具體.例中,εγ 之濃度為150 ρρπ^ 1500 ppm; Ai之濃度為2莫耳。/。至8莫耳0/〇 ,且Tm之濃度為15 ppm至3000 ppm。需了解“莫耳%,,係指 以陽離子為準之莫耳%,除非另有說明。“ppm”係指以陽 離子為準之每百萬份之份,除非另有說明。 蕊尚可包含F。列舉之具體例中,f之濃度低於或等於6 陰離子莫耳°/〇。 波導可為光纖、成形之光纖、雷射棒或其他波導結構。 -12-20030122 (⑺ In one specific example, the concentration is 15 ppm to 3000 ppm, the concentration of A1 is 0.5 mol% to 12 mol%; the concentration of Tm is 15 ppm to 10,000 ppm; and the concentration of Ge is low 20 mol% or more. According to another specific example, the concentration of Er is 150 ppm to 1500 ppm; the concentration of A1 is 2 mol% to 8 mol%; the concentration of Ge is 1 mol% to 20 mol. %; And the concentration of Tm is 15 ppm to 3000 ppm. The core may still contain F. The listed concentration is lower than or equal to 6 anion mole%. The core may include at least the first and second regions, wherein the first region contains The ratio of Er to Tm which is substantially different from the second zone. This zone may be arranged in a ring. The step of core deposition can be achieved by multiple MCVD channels, multiple sol channels and / or multiple soot deposition, solution doping and strengthening channels. L -The optical band amplifier can be manufactured under the present invention by using an optical fiber manufactured by combining an optical fiber and a pump laser. The co-doped silicate optical waveguide of the present invention includes a core material, which includes oxidized crystals, crystals, and lanthanum. , Osmium, and osmium oxide. The concentration of Er is 15 ppm to 3000 ppm; A1 is 0.5 mol% to 12 mol. %, Tm is 15 ppm to 10000 ppm ', and Ge is 1 mole% to 20 mole%. More specifically, in the example, the concentration of εγ is 150 ρρπ ^ 1500 ppm; the concentration of Ai is 2 mol … To 8 moles 0 / 〇, and the Tm concentration is 15 ppm to 3000 ppm. It is necessary to understand "mole%," which refers to mole% based on cations, unless otherwise stated. "Ppm" is Refers to parts per million based on cations, unless otherwise specified. Cores can also contain F. In the specific examples listed, the concentration of f is less than or equal to 6 anions Mohr ° / 〇. The waveguide can be an optical fiber, Shaped optical fiber, laser rod or other waveguide structure. -12-

放大器可使用該波導組裝成。 另一列舉之具體例中,蕊至少包括第一及第二區,其中 第—區含與第二區實質不同之&對Tm比。該區可為環狀 排列。蕊可由MCVD、溶膠或煙灰沉積、溶液摻雜及固化 製程製成。 實施方式 圖1為四種不同SAGET玻璃在1610 nm下之不同公稱自動 發射對Er3+4In/2平均使用壽命之圖。針對其一特定具體例 ,在1600 rim之自動發射強度相對於在〜丨53 μιη下之最大發 射強度不低於-8.8 dB,且其中在1650 nm之自動發射強度相 對於在〜1·53 μηι下之最大發射強度不低於4 dB。 圖2為四種SAGET玻璃在1630 nm下之不同公稱自動發 射對Er3 —、3/2平均使用壽命之圖。圖3為六種SAGET玻璃在 1650 nm下之不同公稱自動發射對Er3 + 4Ii3/2平均使用壽命 之圖。編號相當於實例1中之樣品編號。盒為SALE玻璃, 如購自St· Paul,MN之3M公司。 圖1-3顯示相較於標準之摻雜_之SALE玻璃·,可能自 SAGET玻璃獲得提昇之公稱化發射。提昇之大小依主體之 確切組成、铥之量及Er/Tm比而定。 圖1 -3尚顯示公稱化發射與使用壽命間之關聯。相較於 1600-1620 nm區中SALET及SALGET玻璃之現象,具有相對低 Tm濃度之SAGET組合物會比具有相對高Tm濃度之SALET 組合物具有較佳之延伸L-光帶性能(較高之公稱化發射及 較長之平均使用壽命)。1620-1650 nm區中,SAGET組合物 -13- 20030122(An amplifier can be assembled using this waveguide. In another specific example, the core includes at least a first and a second region, wherein the first-region contains an & Tm ratio that is substantially different from the second region. The area may be arranged in a ring. Cores can be made by MCVD, sol or soot deposition, solution doping and curing processes. Embodiment Figure 1 is a graph of the average service life of Er3 + 4In / 2 for four different SAGET glasses at different nominal automatic emission at 1610 nm. For a specific example, the automatic emission intensity at 1600 rim is not less than -8.8 dB at the maximum emission intensity at ~ 丨 53 μιη, and the automatic emission intensity at 1650 nm is relative to ~ 1.53 μηι The maximum emission intensity is not less than 4 dB. Figure 2 is a graph of the average lifespan of Er3 —, 3/2 for four different types of SAGET glasses at 1630 nm. Figure 3 is a graph of the average service life of Er3 + 4Ii3 / 2 for different nominal automatic emission of six types of SAGET glasses at 1650 nm. The number corresponds to the sample number in Example 1. The box is SALE glass, such as 3M from St. Paul, MN. Figure 1-3 shows that compared to the standard doped SALE glass, it is possible to obtain an increased nominal emission from SAGET glass. The magnitude of the lift depends on the exact composition of the subject, the amount of tritium, and the Er / Tm ratio. Figure 1-3 also shows the correlation between nominal emission and service life. Compared with the phenomenon of SALET and SALGET glass in the 1600-1620 nm region, a SAGET composition with a relatively low Tm concentration will have better extended L-light band performance than a SALET composition with a relatively high Tm concentration (higher nominal Emission and longer average service life). In the 1620-1650 nm region, the SAGET composition -13- 20030122 (

與SALET及SALGET組合物類似,其中:對於相對低濃度之 Tm,其會比具有高濃度Tm者具有較低之公稱化發射及較 長之平均使用壽命。因此,SAGET玻璃對於1600-1620 nm光 譜區中之相對低Tm濃度為最受矚目者。另外,其一列舉 之具體例中,相對低Tm濃度(<1500 ppm)對於光放大器光纖 為較佳。 本發明之列舉具體例包含含氟之光纖,其可協助溶解稀 土離子如餌及铥,且因此可降低對引發之Er-Er終止作用。 圖4簡要的說明本發明之光纖10。光纖10包含蕊12、内包 覆層14及外包覆層16,各個均同心的環繞其他《蕊1 2包含 氧化矽及Al、Ge、Er及Tm之氧化物。列舉之具體例中, Er之濃度為15 ppm至3000 ppm,A1之濃度為0.5莫耳%至12 莫耳% ; Tm之濃度為15 ppm至10000 ppm ;且Ge之濃度為1 莫耳%至20莫耳%。光纖10尚包含内包覆層14,緊環繞著 為12’其不含硼且含Si、0、P及F。棚會使Ge之敏光性向 著短波常引發形成之光缺陷增加。内包覆層中含B之預形 成物會因為高溫擴散,造成抽出後在蕊中具有部·分硼之光 纖。已知摻雜Tm之矽酸鹽光纖會因為上轉化製程而發射 短波長之光。因此,硼會使含Ge-Tm之光纖對因上轉化之 短波長光纖造成之光缺陷及光變暗更敏感。本發明藉由提 供無硼光纖使該作用減輕。 另一列舉之具體例中,Er之濃度為150 ppm至1500 ppm ; A1之濃度為2莫耳至8莫耳%,且Tm之濃度為15ppm至3000 ppm。該蕊亦可包含尤其列舉之具體例中,ρ之濃度低 -14- 2GQ30122(Similar to SALET and SALGET compositions, where: for relatively low concentrations of Tm, it will have a lower nominal emission and longer average life than those with high concentrations of Tm. Therefore, SAGET glass is the most noticeable for the relatively low Tm concentration in the 1600-1620 nm spectral region. In one specific example, a relatively low Tm concentration (< 1500 ppm) is preferable for the optical amplifier fiber. The specific examples of the present invention include a fluorine-containing optical fiber, which can help dissolve rare earth ions such as bait and plutonium, and thus can reduce the Er-Er termination effect on initiation. FIG. 4 briefly illustrates the optical fiber 10 of the present invention. The optical fiber 10 includes a core 12, an inner cladding layer 14, and an outer cladding layer 16, each of which surrounds the other concentric cores. The core 12 includes silicon oxide and oxides of Al, Ge, Er, and Tm. In the specific examples listed, the concentration of Er is 15 ppm to 3000 ppm, the concentration of A1 is 0.5 mol% to 12 mol%, the concentration of Tm is 15 ppm to 10000 ppm, and the concentration of Ge is 1 mol% to 20 mol%. The optical fiber 10 further includes an inner cladding layer 14 surrounded by 12 'which is boron-free and contains Si, 0, P, and F. Sheds will increase the photosensitivity of Ge toward short-wave-induced light defects. The preforms containing B in the inner cladding layer will diffuse due to high temperature, which will cause some fibers with boron in the core after extraction. It is known that Tm-doped silicate fibers emit short-wavelength light due to the up-conversion process. Therefore, boron will make the Ge-Tm-containing fiber more sensitive to light defects and darkening caused by the converted short-wavelength fiber. The present invention reduces this effect by providing a boron-free fiber. In another specific example, the concentration of Er is 150 ppm to 1500 ppm; the concentration of A1 is 2 mol to 8 mol%, and the concentration of Tm is 15 ppm to 3000 ppm. The core may also include a specific example, in which the concentration of ρ is low -14-2 GQ30122 (

(ίο) 於或等於6陰離子莫耳%。 依又另一具體例,以及Tm濃度係獨立在光纖或波導之 蕊中改變。此會在蕊之不同點或區中造成不同之濃度或 Er/Tm比。其對於以及Tm量具有不同Er及Tm量之多重不連 續區可連續改變。‘‘區,,一詞意指材料之體積足夠大至使之 可定義或決定玻璃組成之點。通常,該區會大於約10,000 nm3 ’但可能更大,例如為光纖蕊明顯部分之環狀殼。該 設計可提供較長之激發態使用壽命。例如,可降低會造成 離子間之能量交換及短的使用壽命之Er及Tm之緊密接觸。φ 依其另一特殊具體例,本發明之波導或光纖具有放射狀 梯度之Er及Tm濃度,其中個別濃度之最大值不會發生在 相同之放射距離。此可藉由使用多蕊沉積層達成’各層均 具有不同之Er/TnUl:。(ίο) At or equal to 6 anionic mole%. According to yet another specific example, and the Tm concentration is independently changed in the core of the optical fiber or waveguide. This results in different concentrations or Er / Tm ratios in different points or regions of the core. Its multiple discontinuous regions with different Er and Tm amounts as well as Tm amounts can be continuously changed. ‘‘ Zone, ’means the point at which the volume of the material is large enough to define or determine the composition of the glass. Typically, this region will be larger than about 10,000 nm3 'but may be larger, such as a ring-shaped shell with a significant portion of the fiber core. This design provides a longer excited state lifetime. For example, it can reduce the close contact of Er and Tm, which can cause energy exchange between ions and short lifetime. φ According to another specific example, the waveguide or optical fiber of the present invention has radial gradients of Er and Tm concentrations, where the maximum of individual concentrations does not occur at the same radiation distance. This can be achieved by using a multi-core deposition layer. Each layer has a different Er / TnUl :.

依又另一具體例,波導或光纖蕊係分隔成富含ΕΓ及冨含 Tm之區,如使用放射狀或縱向分段。此可藉由分別沉積 相對富含Er及相對富含Tm之父互3衣狀區達成 %JL· 波導玻璃一般敛述如下: 實例組成物1 : 本列舉具體例之 SAGREb丨REB2 ’ 其中 尊%之基質玻璃。A ,氧化鋁相 S (氧化矽)為含量约〉75吳 ,,^ 也 > 雜子之溶解劍;通常’增加氧化 信形同係數提昇物及稀土離 、森射強度,尤其是〜1600-1620 nm, 鋁之濃度會增加公稱之發射 且降低4Ι 之平均使用壽命^ -15- (ii) 20030122( G(氧化^錯)相信形同係數提昇劑 莫耳%)。According to yet another specific example, the waveguide or fiber core is divided into regions rich in Γ and Tm, such as radial or longitudinal segmentation. This can be achieved by depositing three coat-like regions of relatively rich Er and relatively rich Tm, respectively. JL · Wave glass is generally summarized as follows: Example composition 1: SAGREb 丨 REB2 ' Matrix glass. A, alumina phase S (silicon oxide) content is about> 75 Wu, ^ also > dissolving sword of heterozygous; usually 'increasing the oxidation letter shape with the same coefficient lifter and rare earth ion, radiation intensity, especially ~ 1600 -1620 nm, the concentration of aluminum will increase the nominal emission and reduce the average service life of 4 ^ -15- (ii) 20030122 (G (oxidation error) I believe the same coefficient enhancer Moore%).

如 Ge(0-15 及網路形成劍 REBi為含活化RE離子如&之活化稀土 ^ V 虱化物。該 氧化物為係數提昇物。活化之RE陽離子 ,, $ _泵浦或共 聚浦(Er可在800、980、1480 nm下泵浦)。 REB2為含活化稀土離子REb> Tm之活化 ^ 工(Re)氧化物 。該氧化物為係數提昇物。活化之REb2陽離 J共录浦或 共鳴的激發(Tm可在8〇〇或1000-1200 nm下泵浦)。 F(氟)形同係數壓制劑;使稀土離子溶解。 整體樣品之光數罈 發射數據係使用光纖泵浦/收集方案獲得。適告玻璃組 合物之珠狀物經靜電力置於水平排列之光纖終端。使用 χ-y轉換機使珠狀物在帶有泵浦波長之光纖切斷終點(或 聚浦光纖)之周圍操作。珠狀物之位置對於最大勞光發射 為最佳,其係以光譜分析儀(0SA)監控。裝置及起始之排 列操作係在光學顯微鏡下觀看。泵浦雷射(一般為98〇 nm) 係經由波長分工多工器(WDM)與泵浦光纖結合。以篆浦光 纖收集在1450-1700 nm中發射之光且經OSA監控。 公稱化發射係如下列般測定:自實驗用玻璃之公稱化值 (dB)減掉標準SALE光纖在特定波長下之公稱化值(犯)。 SALE光纖為標準之摻雜斜之放大器光纖,如講自^ paui MN之3M公司。 使光源在〜10 Hz下脈衝化收集發射衰減曲線,且監控發 射強度之衰減。發射衰減曲線係經公稱化且以使用標準軟 -16- 20030122( (12)For example, Ge (0-15 and network formation sword REBi is an activated rare earth ^ V lice compound containing activated RE ions such as & The oxide is a coefficient booster. Activated RE cations ,, $ _ pump or co-pu ( Er can be pumped at 800, 980, 1480 nm). REB2 is an activated ^ (Re) oxide containing activated rare earth ion REb > Tm. This oxide is a coefficient increaser. Activated REb2 Yangli J Gonglupu Or resonance excitation (Tm can be pumped at 800 or 1000-1200 nm). F (fluorine) has the same coefficient compression agent; dissolves rare earth ions. The optical altar emission data of the whole sample is using fiber pump / Obtained from the collection scheme. The beads of the glass composition are placed on the horizontally arranged optical fiber terminals by electrostatic force. Use a χ-y converter to make the beads cut off at the end of the optical fiber with the pump wavelength (or Jupu fiber). ) Around the operation. The position of the bead is the best for maximum light emission, which is monitored by a spectrum analyzer (0SA). The device and the initial alignment operation are viewed under an optical microscope. Pump laser (general (98nm) through the wavelength division multiplexer (WDM) and pump light Combined. The light emitted in 1450-1700 nm is collected by Xupu fiber and monitored by OSA. The nominal emission is measured as follows: The nominal value (dB) of the glass used in the experiment is subtracted from the standard SALE fiber at a specific wavelength SALE fiber is a standard doped slant amplifier fiber, such as the 3M company from Paui MN. The light source is pulsed to collect the emission attenuation curve at ~ 10 Hz, and the attenuation of the emission intensity is monitored. The emission attenuation curve is nominalized and uses standard soft-16-20030122 ((12)

體,套上雙指數公式。由衰減曲線分析,可決定激發態電 子之上一態使用壽命(慢或快)及各個之相對百分比。雙指 數分析中使用三個獨立之套入參數:缓慢Er輻射衰減之常 數r漫,快速Er放射衰減常數r快,及二使用壽命之相對 百分比α 。 1/r 平均=(2 Xl/r 快+ )Χ1/ζ* 馒 使用McCumber理論,由發射光譜預測吸收光譜。接著使Body, put on the double exponential formula. From the analysis of the attenuation curve, the lifetime (slow or fast) of the excited state electrons can be determined (slow or fast) and the relative percentage of each. In the two-finger analysis, three independent nesting parameters are used: the constant constant r diffuse for slow Er radiation attenuation, the fast constant Er radiation attenuation constant r, and the relative percentage α of the service life. 1 / r average = (2 Xl / r fast +) × 1 / ζ * 馒 Use McCumber theory to predict the absorption spectrum from the emission spectrum. Then make

用吸收光譜計算Giles參數,其係用於光放大器之慣用模型 中。Giles參數可精確的計算光纖製造之組成物。 氣化矽儲存之汝洁 將四乙氧基石夕燒(223 ¾升’講自Milwaukee WI之Aldrich 化學公司);無水乙醇(223毫升,購自Shelbyville. KY之AaperGiles parameters are calculated using absorption spectra, which are used in conventional models of optical amplifiers. The Giles parameter accurately calculates the composition of optical fiber manufacturing. Ru Jie for the storage of siliconized gas. Burning of tetraethoxylite (223 ¾ liters from Aldrich Chemical Company of Milwaukee WI); absolute ethanol (223 ml, purchased from Aaper of Shelbyville. KY)

Alcohol);去離子水(17.28毫升);及0·07 N鹽酸(〇·71毫升)合 併於2升反應瓶中。將所得透明溶液加熱至t ,且授拌 90分鐘。使溶液冷卻且移到塑膠瓶中,且存放於〇艺冷凍 庫中。所得溶液之濃度為2·16 Μ(亦即莫耳/升)si〇2。 實例丄·爲ϋ毛光帶用有四種Er/Tn^ 士幸赠 以三類主體及四種Er/Tm量製備铒-铥共摻雜之矽酸鹽 玻璃珠。為製備該破璃珠,因此將2· 16M之部分水解氧化 矽儲存溶液、含1·0 M氯化鋁水合物之甲醇、四乙氧基鍺(純) 、含0.1 Μ氯化铒水合物之甲醇、及含〇1 M硝酸铥水合物 之甲醇合併於一容器中。試劑經混合,獲得溶液,其會產 生下表1中所示組成(莫耳%)之凝膠。 -17- 20030122( (13) 表1Alcohol); deionized water (17.28 ml); and 0.07 N hydrochloric acid (0.71 ml) were combined in a 2 liter reaction flask. The resulting clear solution was heated to t and allowed to stir for 90 minutes. Allow the solution to cool and transfer to a plastic bottle, and store in a freezer. The concentration of the resulting solution was 2.16 M (i.e., mole / liter) si02. Example 丄 · There are four types of Er / Tn ^ for the phoenix hair band. Fortunately, 铒-主体 co-doped silicate glass beads were prepared from three types of bodies and four types of Er / Tm. In order to prepare the broken glass beads, a 2.16M partially hydrolyzed silica storage solution, methanol containing 1.0 M aluminum chloride hydrate, tetraethoxygermanium (pure), and 0.1 M thorium chloride hydrate Methanol and methanol containing 0.1 M osmium nitrate hydrate were combined in a container. The reagents were mixed to obtain a solution which produced a gel of the composition (mol%) shown in Table 1 below. -17- 20030122 ((13) Table 1

Sampe Er/Tm Si02 A1015 Ge02 Er〇i.5 Tm015 1 10/20 91.46 3.52 4.56 0.152 0.30 2 10/2 90.48 3.52 5.83 .0.152 0.03 3 3/20 91.08 3.52 5.05 0.0457 0.3 4 3/2 90.07 3.52 633 0.0457 0.03Sampe Er / Tm Si02 A1015 Ge02 Er〇i.5 Tm015 1 10/20 91.46 3.52 4.56 0.152 0.30 2 10/2 90.48 3.52 5.83 .0.152 0.03 3 3/20 91.08 3.52 5.05 0.0457 0.3 4 3/2 90.07 3.52 633 0.0457 0.03

所有組成均經分批,使折射係數〜1.4800,因為光纖中之 矽酸鹽包覆,因此獲得數空隙〜0.25。組成物1-4添加於曱 醇(250毫升)及29 wt%氫氧化銨水溶液(50克)之混合物中。 攪摔所得溶液直到膠凝(約10秒鐘)。以吸氣過濾分離凝膠 。將凝膠於80°C下加熱隔夜至樣品乾燥。乾燥之樣品以陶 瓷研缽研磨且搗碎,使凝聚物之大小下降至低於150微米 。將研磨過之樣品移到氧化鋁船(Coors)中,且在950°C之靜 態空氣中鍛燒約1小時,使之密實且移除所有有機物。All compositions were batched so that the refractive index was ~ 1.4800. Because of the silicate coating in the optical fiber, a few voids ~ 0.25 were obtained. Compositions 1-4 were added to a mixture of methanol (250 ml) and a 29 wt% aqueous ammonium hydroxide solution (50 g). The resulting solution was shaken until gelled (about 10 seconds). The gel was separated by suction filtration. The gel was heated at 80 ° C overnight until the sample dried. The dried samples were ground and mashed in a ceramic mortar to reduce the size of the aggregates to less than 150 microns. The ground sample was transferred to an alumina boat (Coors) and calcined in static air at 950 ° C for about 1 hour to make it dense and remove all organic matter.

以陶瓷搗碎棒於陶瓷研砵中研磨後,將所得經燒結顆粒 以重力飼入氫/氧火焰中。火焰中之H2/〇2比為5 : 2。顆粒 以火焰噴在底部隨收集槽傾斜之水冷卻氧化鋁上。槽中收 集各部分之玻璃珠及未熔化之顆粒。 藉由使用上述一般程序獲得螢光光譜及使用壽命數據 ,且示於圖1 -3中。 列舉之具體例中,在1600 nm下之自動發射強度相對於 在〜1.53 μπι下之最大發射強度不低於-8.8dB,且其中在1650 nm下之自動發射強度相對於在〜1.53 μιη下之最大發射強 度不低於-14.4 dB。 -18- 22( (14) \mmmAfter grinding with a ceramic mashing rod in a ceramic mortar, the obtained sintered particles were gravity fed into a hydrogen / oxygen flame. The H2 / 〇2 ratio in the flame is 5: 2. The particles are sprayed with flames on the water-cooled alumina whose bottom is inclined with the collection tank. The glass beads and unmelted particles are collected in the tank. The fluorescence spectrum and lifetime data were obtained by using the general procedure described above, and are shown in Figures 1-3. In the specific examples listed, the automatic emission intensity at 1600 nm is not less than -8.8dB relative to the maximum emission intensity at ~ 1.53 μm, and the automatic emission intensity at 1650 nm is relative to that at ~ 1.53 μm The maximum emission intensity is not less than -14.4 dB. -18- 22 ((14) \ mmm

為製備本發明之SAGET光纖,以如酸洗清潔中空合成之 融合氧化矽管,移除任何外來之物質。將該管架設在供内 層〉儿積用之床上。藉由化學蒸氣沉積(所謂MCVD),使氫/ 氧火塔通過管,同時使SiCU、P〇Cl3及SiF4於管内流動,沉 積許多以高純度氧化矽為主之層。最内層含高濃度之氟(例 如〜4莫耳%)。 預成形物之蕊係由溶液摻雜法形成。藉由MCVD沉積多 孔氧化矽層,接著以含有Al、Er及Tm離子之溶液滲入。 蕊沉積後,使管乾燥、固化且崩塌成原始預成形物。 進行後續之熱加工,以調整蕊與包覆之比,以達成最終 光纖所需之蕊直徑。該後續加工可包含多重拉伸及過崩塌 步驟。再將完成之預成形物抽出形成光纖。預成形物吊在 抽取塔中。抽取塔包含溶解預成形物之爐,及許多如塗佈 、硬化及退火用之加工站。 本發明之共摻雜矽酸鹽光波導包含包括氧化矽,及鋁、 鍺、鈽及铥之氧化物之蕊材料,及環繞蕊材料之較低折射 係數包覆材。蕊材料之濃度如下: • Er之濃度為 15 ppm至 3000 ppm,較好為 150 pprn至 1500 ppm ; • A 1之濃度為〇 · 5莫耳%至12莫耳%,較好為2莫耳%至8莫 耳% ; • Tm 之濃度為 15 ppm 至 10000 ppm ;較好為 15 ppm 至 3000 ppm ;且 • Ge之濃度為1莫耳%至20莫耳%。 -19- 20030122( __ ⑼ 本發明提供明顯之優點。本文中敘述之SAGET組合物相 較於先前揭示之Er/Tm光纖’呈現出提昇之延仲L-光帶發 射。SAGET組合物在1600+ nm區中呈現良好公稱化發射之 結合,且具有合理之Er使用壽命,尤其是含相對低濃度 E r及T m之組合物。本文揭示之光纖為無硼。該光纖之蕊 中可含明顯量之氟,其可協助使稀土離子溶解。光纖之蕊 可含不相等Er/Tm比之區,其可使Er_Trn作用最佳,且提供 所需之光發射及使用壽命反應。 热習本技藝者應了解本發明可用於各種光波導及光學 組件之應用。雖然本發明已經參照列舉之較佳具體例敘述 ,但本發明亦適合其他特定之形式,且均不離本發明之範 圍。據此’應了解本文中敘述及說明之具體例僅為列舉用 ’且應不視同限制本發明之範圍。其他改變及改良均矸依 據本發明之範圍進行。 簡單圖示說明 圖1為四種不同SAGET玻璃在1610 nm下之不同公稱自動 發射對Er3+4In/2平均使用壽命之圖。 ^為四種不同SAGET玻璃在1630 nm下之不同公稱自動 發射對Er3—4。3/2平均使用壽命之圖。 圖3為四種不同SAGET玻璃在165〇 _下之不同公稱自 力發射對平均使用壽命之圖。 圖4為本發明列舉光纖之簡要剖面圖。 夺號說明 10 光纖 -20· 20030122( (16) 12 蕊 14 内包覆層 16 外包覆層 -21 -In order to prepare the SAGET optical fiber of the present invention, the hollow synthetic fused silica tube is cleaned by pickling, and any foreign matter is removed. The tube was erected on the bed for the inner layer> child product. By chemical vapor deposition (so-called MCVD), a hydrogen / oxygen fire tower is passed through the tube, while SiCU, POCl3, and SiF4 are caused to flow in the tube, and many layers mainly composed of high-purity silicon oxide are deposited. The innermost layer contains a high concentration of fluorine (e.g. ~ 4 mole%). The core of the preform is formed by a solution doping method. A porous silicon oxide layer was deposited by MCVD and then infiltrated with a solution containing Al, Er and Tm ions. After the cores are deposited, the tube is dried, cured and collapsed into the original preform. Subsequent thermal processing is performed to adjust the core to cladding ratio to achieve the core diameter required for the final fiber. This subsequent processing may include multiple stretching and overcollapse steps. The completed preform is then drawn out to form an optical fiber. The preform is suspended in the extraction tower. The extraction tower contains a furnace for dissolving preforms, and many processing stations for coating, hardening and annealing. The co-doped silicate optical waveguide of the present invention includes a core material including silicon oxide, and oxides of aluminum, germanium, thallium, and thallium, and a lower refractive index cladding material surrounding the core material. The concentration of core material is as follows: • The concentration of Er is 15 ppm to 3000 ppm, preferably 150 pprn to 1500 ppm; • The concentration of A 1 is 0.5 mol% to 12 mol%, preferably 2 mol. % To 8 mole%; • Tm concentration is 15 ppm to 10000 ppm; preferably 15 ppm to 3000 ppm; and • Ge concentration is 1 mole% to 20 mole%. -19- 20030122 (__ ⑼ The present invention provides significant advantages. The SAGET composition described herein presents an enhanced L-band emission over the previously disclosed Er / Tm fiber '. The SAGET composition at 1600+ The nm region exhibits a good combination of nominal emission, and has a reasonable Er lifetime, especially the composition containing relatively low concentrations of Er and T m. The optical fiber disclosed herein is boron-free. The core of the optical fiber may contain significant Amount of fluorine, which can help dissolve rare earth ions. The core of the optical fiber may contain regions of unequal Er / Tm ratio, which can optimize the effect of Er_Trn, and provide the required light emission and service life response. It should be understood that the present invention can be applied to various applications of optical waveguides and optical components. Although the present invention has been described with reference to the preferred specific examples, the present invention is also suitable for other specific forms without departing from the scope of the present invention. It should be understood that the specific examples described and illustrated herein are only examples and should not be construed as limiting the scope of the present invention. Other changes and improvements are made in accordance with the scope of the present invention. A graph of the average service life of different SAGET glasses at 1610 nm versus Er3 + 4In / 2. ^ The average automatic emission of four different SAGET glasses at 1630 nm versus Er3-4. 3/2 average Figure of service life. Figure 3 is a graph of the average service life of four different SAGET glasses at different nominal self-emission at 165 °. Figure 4 is a schematic cross-sectional view of the optical fiber enumerated in the present invention. 20030122 ((16) 12 Core 14 Inner coating layer 16 Outer coating layer -21-

Claims (1)

^30122( 拾、申請專利範圍 κ 一種矽酸鹽光波導(10),其包括: a) 包括氧化矽及Al、Ge、Er及Tm之氧化、物之蕊(12); 0其中Er之濃度為15 ppm至3000 ppm ; # η) A1之濃度為〇·5莫耳%至12莫耳0/〇 ; iii) Tm之濃度為 15 ppm至 loooo ppm ;且 iv) Ge之濃度為1莫耳%至20莫耳% ;及 b) 緊環繞著蕊之無硼包覆層(14)。 ^ 2 ·如申請專利範圍第1項之波導,其中 a) Er之濃度為 150 ppm至 1500 ppm ; b) A1之濃度為2莫耳%至8莫耳% ; c) Tm之濃度為 15 ppm至 3000 ppm。 3.如申請專利範圍第1項之波導,其中Er之濃度為150 ppm 至 1 500 ppm。^ 30122 (Scope of application and patent application κ A silicate optical waveguide (10), which includes: a) Including silicon oxide and oxides of Al, Ge, Er, and Tm (12); 0 where the concentration of Er 15 ppm to 3000 ppm; # η) A1 concentration is 0.5 mol% to 12 mol 0 / 〇; iii) Tm concentration is 15 ppm to loooo ppm; and iv) Ge concentration is 1 mol % To 20 mole%; and b) a boron-free coating (14) tightly surrounding the core. ^ 2 The waveguide according to item 1 of the patent application range, wherein a) the concentration of Er is 150 ppm to 1500 ppm; b) the concentration of A1 is 2 mol% to 8 mol%; c) the concentration of Tm is 15 ppm To 3000 ppm. 3. The waveguide according to item 1 of the patent application range, wherein the Er concentration is 150 ppm to 1 500 ppm. 4·如申請專利範圍第1項之波導,其中Αι之濃度為2莫耳% 至8莫耳%。 5·如申請專利範圍第1項之波導,其中Tm之濃度為15 ppm 至 3000 ppm 〇 6 ·如申請專利範圍第1項之波導,其蕊尚包括F。 7 ·如申請專利範圍第6項之波導,其中F之濃度低於或等 於6陰離子莫耳%。 8 ·如申請專利範圍第1項之波導,其中之波導為光纖。 9 · 一種放大器,其包括如申請專利範園第1項之波導。 20030122(4. The waveguide according to item 1 of the scope of patent application, wherein the concentration of Al is 2 mol% to 8 mol%. 5. The waveguide of item 1 of the patent application, wherein the concentration of Tm is 15 ppm to 3000 ppm. 〇6. The waveguide of item 1 of the patent application, whose core still includes F. 7 • The waveguide of item 6 of the patent application, wherein the concentration of F is lower than or equal to 6 anionic mole%. 8. The waveguide of item 1 of the patent application scope, wherein the waveguide is an optical fiber. 9 · An amplifier including a waveguide as described in the patent application No. 1 item. 20030122 ( 10. 如申請專利範圍第1項之波導,該蕊至少包括第一及第 二區,其中第一區含與第二區實質不同之Er對Tm比。 11. 如申請專利範圍第10項之波導,其中該區為環狀排列。 12. 如申請專利範圍第10項之波導,其中,·之蕊係由多重 MCVD通道製成。 13. 如申請專利範圍第1〇項之波導,其中之蕊係由多重溶膠 通道製成。 14. 如申請專利範圍第10項之波導,其中之蕊係由多重煙灰 沉積、溶液摻雜及固化通道製成。 15 /種矽酸鹽光纖(10),包括: a) 包括氧化矽及Al、Ge、Er及Tm之氧化物之蕊(12); i) 其中Er之濃度為15 ppm至3000 ppm ; ii) A1之濃度為〇·5莫耳%至12莫耳0/〇 ; iii) Tm之濃度為 15 ppm至 10000 ppm ;且 iv) Ge之濃度為1莫耳%至20莫耳% ;及 b) 其中在1600 nm下之自動發射強度相對於在〜153 μιη下之 最大發射強度不低於-8.8 dB,且其中在1650 nm下之 自動發射強度相對於在〜丨.53 μιη下之最大發射強度 不低於-14.4 dB。 16. 如申請專利範圍第15項之光纖,其中 a) Er之濃度為 150 ppm至 1500 ppm ; b) A丨之濃度為2莫耳%至8莫耳% ;且 c) Tm之濃度為 15 ρριη至 3000 ppm。 17. 如申請專利範圍第15項之光纖,該蕊尚包括F,且其中F 22(10. If the waveguide of the scope of the patent application is No. 1, the core includes at least the first and second regions, where the first region contains an Er to Tm ratio that is substantially different from the second region. 11. The waveguide of the scope of application for item 10, wherein the area is arranged in a ring shape. 12. The waveguide according to item 10 of the patent application, wherein the core is made of multiple MCVD channels. 13. For example, the waveguide of the scope of patent application No. 10, wherein the core is made of multiple sol channels. 14. The waveguide of claim 10, wherein the core is made of multiple soot deposition, solution doping and curing channels. 15 / kinds of silicate optical fibers (10), including: a) including silicon oxide and oxides of Al, Ge, Er, and Tm (12); i) where the concentration of Er is 15 ppm to 3000 ppm; ii) The concentration of A1 is 0.5 mol% to 12 mol 0 / 〇; iii) the concentration of Tm is 15 ppm to 10000 ppm; and iv) the concentration of Ge is 1 mol% to 20 mol%; and b) Among them, the automatic emission intensity at 1600 nm is not less than -8.8 dB relative to the maximum emission intensity at ~ 153 μιη, and the automatic emission intensity at 1650 nm is relative to the maximum emission intensity at ~ 丨 53 μιη Not less than -14.4 dB. 16. For example, the optical fiber of item 15 of the patent scope, wherein a) the concentration of Er is 150 ppm to 1500 ppm; b) the concentration of A 丨 is 2 mol% to 8 mol%; and c) the concentration of Tm is 15 ρριη to 3000 ppm. 17. If the optical fiber under the scope of patent application No.15, the core still includes F, and F 22 ( 之濃度低於或等於6陰離子莫耳%。 18· —種放大器,該放大器包含如申請專利範圍第15項之光 纖。 19·如申請專利範圍第15項之光纖,該蕊至少包括第一及第 二區,且其中第一區含與第二區實質不同之Er對Tm比。 20·如申請專利範圍第19項之光纖,其中該區為環狀排列。 21· —種製造光纖(10)之方法,該方法包括之步驟為: a) 提供基材管(16), b) 沉積無硼包覆層(14); c) 沉積包括含氧化矽及Al、Ge、Er及Tm之氧化物之 蕊(12); d) 使基材管崩塌形成預成形物;及 e) 抽出預成形物,獲得光纖。 22·如申請專利範圍第21項之方法,其中 a) Er之濃度為 15 ppm至 3000 ppm ; b) A1之濃度為〇·5莫耳%至12莫耳% ; c) Tm之濃度為 15 ppm至 10,000 ppm ;且 d) Ge之濃度低於或等於20莫耳%。 23·如申請專利範圍第21項之方法,其中 a) Er之濃度為 150 ppm至 1500 ppm ; b) A1之濃度為2莫耳%至8莫耳% ; c) Ge之濃度為1莫耳%至20莫耳% ;且 d) Tm之濃度為 15 ppm至 3000 ppm。 24·如申請專利範圍第21項之方法,其蕊尚包括F。The concentration is lower than or equal to 6 anionic mole%. 18. An amplifier including an optical fiber such as the item 15 in the patent application. 19. If the fiber of the scope of the patent application is No. 15, the core includes at least the first and second regions, and the first region contains an Er to Tm ratio that is substantially different from the second region. 20. The optical fiber according to item 19 of the application, wherein the area is arranged in a ring shape. 21 · —A method for manufacturing optical fiber (10), the method includes the steps of: a) providing a substrate tube (16), b) depositing a boron-free cladding layer (14); c) depositing including silicon oxide and Al (12) of the oxides of Ge, Er, and Tm; d) collapse the base tube to form a preform; and e) extract the preform to obtain an optical fiber. 22. The method according to item 21 of the patent application range, wherein a) the concentration of Er is 15 ppm to 3000 ppm; b) the concentration of A1 is 0.5 mol% to 12 mol%; c) the concentration of Tm is 15 ppm to 10,000 ppm; and d) the concentration of Ge is less than or equal to 20 mole%. 23. The method according to item 21 of the patent application range, wherein a) the concentration of Er is 150 ppm to 1500 ppm; b) the concentration of A1 is 2 mol% to 8 mol%; c) the concentration of Ge is 1 mol % To 20 mole%; and d) the concentration of Tm is 15 ppm to 3000 ppm. 24. If the method of applying for item 21 of the patent scope, its core still includes F. 20030122( 25. 如申請專利範圍第24項之方法,其中F之濃度低於或等 於6陰離子莫耳%。 26. 如申請專利範圍第21項之方法,該蕊至少包括第一及第 二區,其中第一區含與第二區實質不同、之Ει·對Tm比。 27. 如申請專利範圍第26項之方法,其中該區為環狀排列。 28. 如申請專利範圍第26項之方法,其中之蕊係由多重 MCVD通道製成。 29. 如申請專利範圍第26項之方法,其中之蕊係由多重溶膠 通道製成。 30. 如申請專利範圍第26項之方法,其中之蕊係由多重煙灰 沉積、溶液摻雜及固化通道製成。 31. 如申請專利範圍第21項之方法,其中使蕊玻璃沉積之步 驟包含形成多重MCVD通道。 32. 如申請專利範圍第21項之方法,其中使蕊玻璃沉積之步 驟包含形成多重溶膠通道。 33. 如申請專利範圍第21項之方法,其中使蕊玻璃沉積之步 驟包含形成多重煙灰沉積、溶膠摻雜及固化通道。 34. —種製造延伸之L-光帶放大器之方法,包括之步驟為: a) 提供具有包括氧化碎及Al、Ge、Er及Tm氧化物之 蕊之光纖;及 b) 使光纖與泵浦雷射耦合。20030122 (25. If the method of the scope of patent application is applied for, the concentration of F is lower than or equal to 6 anionic mole%. 26. If the method of the scope of patent application is applied for, the core includes at least the first and second regions , Where the first zone contains a substantial difference from the second zone, and the E ·· Tm ratio. 27. For the method of applying for the scope of the patent No. 26, the zone is arranged in a ring. 28. For the scope of the patenting scope No. 26 Method, wherein the core is made of multiple MCVD channels. 29. The method according to item 26 of the patent application, wherein the core is made of multiple sol channels. 30. The method according to item 26 of the patent application, of which The core system is made of multiple soot deposition, solution doping and curing channels. 31. The method of claim 21 in the scope of patent application, wherein the step of depositing the core glass includes forming multiple MCVD channels. The method, wherein the step of depositing the glass includes the step of forming multiple sol channels. 33. The method of claim 21 in the scope of the patent application, wherein the step of depositing the glass includes forming multiple soot deposits and sols. 34. —A method for manufacturing an extended L-band amplifier, comprising the steps of: a) providing an optical fiber having oxide cores and oxides of Al, Ge, Er, and Tm oxides; and b) The fiber is coupled to the pump laser.
TW91137847A 2001-12-31 2002-12-30 Improved emission silicate waveguide compositions for enhanced L-band and S-band emission and method for its manufacture TW200301220A (en)

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