TH8973B - A low-temperature purification system for the recovery of fluorine compounds. - Google Patents

Abstract

A low temperature separation system for the recovery of fluorine compounds from Carrier gas flow lines, such as flow lines from semiconductor assemblies, which consist of contact devices for mass transfer, such as low-temperature washing towers, integrated with Low temperature purification tower system

Claims (2)

1. Method of retrieval of fluorine compounds Consisting of (A) the passage of a gas feeder Which contains carrier gas, fluorine compounds With high evaporation values And the low volatility fluorine compound into the contact device for mass transfer and through the flushing liquid into the contact for mass transfer (B), through the high evaporation fluorine compound. And fluorine compounds that Low evaporation values into the flushing liquid within the contact equipment for mass transfer to generate vapor consisting of carrier gas and flushing fluid. Which contains fluorine compounds with high volatility And low volatility fluorine compounds (C) passing through a washing liquid containing fluorine compounds with low evaporation value (C). High volatility and low evaporation fluorine compounds enter the first purification tower as Which is the first cable to enter the tower And the separation of the feeders into the first separation tower inside the separation tower The first such innocence By separating at low temperatures into upper vapor containing compounds High evaporation fluorine and washing liquid It contains fluorine compounds with low evaporation value (D). Upper vapor extraction containing high volatility fluorine compounds. From the first purification tower And collected back at least part of the product of fluorine (E) compound. Which contains fluorine compounds with Evaporate into the second purification tower In the manner of the feeder into the second separation tower and the separation of the feeder to the second separation tower Inside such a second purification chamber, by separating at low temperatures into upper vapor containing low volatility fluorine compounds and flushing residue, and (F) extraction of the upper vapor being assembled. Cut off fluorine compounds with low volatility. From the second purification tower And retained at least part of the product of fluorine compounds 2. Method according to claim 1, where the gas feed line is cooled by exchange Indirectly heated by vapor containing carrier gas before it is passed into the contact device for mass transfer. 3. Method of claim 1, where the upper vapor portion containing the compound The high evaporation value fluorine extracted from the first purification tower was passed through the contact device for mass transfer 4. Method according to claim 1 where the flushing residue was drawn from the separation tower. The second purification agent is passed into the contact device for mass transfer 5. Method according to claim 1, where the washing liquid has a lower freezing point temperature. Of gas feeder lines While the flushing liquid enters the contact device for mass transfer and the vapor pressure at this temperature is less than 1.0 mm Hg. 6. A set of equipment for the recovery of fluorine compounds. Consisting of (A) contact devices for mass transfer And devices for entering The fluorine compound enters the mass transfer contact device (B), the flush liquid pass through, the mass transfer contact device (C), the first purification tower, and the device for liquid passage from the device. Contact for mass transfer into the first separation tower (D). Equipment for retrieval of separated fluorine compounds. Top of the first separation tower (E) second purification tower And equipment for passing fluids from the section The bottom of the first separation tower enters the second purification tower and (F) the device for the retrieval of the separated fluorine compounds. Top of the second purification tower 7. Equipment set according to claim 6, which is additionally equipped with a heat exchanger. And trajectory for fluid passage from the top of the contact device for mass transfer through Heat exchanger The trajectory of the feed line containing the fluorine compound into the mass transfer contact device also flows through the heat exchanger. 8. Equipment set according to claim 6, which It consists of additional equipment for the passage of Flow is separated from the upper part of the first purification tower into the contact device for mass transfer 9. Set of equipment according to claim 6, whereby the device path for the passage of liquid from the device Exposed for mass transfer into the first purification tower, consisting of a batch storage tank 1 0. Set of equipment according to claim 6, where the device path for the passage of fluids from the side The bottom of the first separation tower enters the second purification tower, consisting of Batch-type storage tank 1 1. Equipment set according to claim 6, which is supplemented by a means of passage device. Liquid from the lower part of the second purification tower enters the mass transfer contact device 1 2. The unit according to claim 6, where the mass transfer contact device consists of a washing tower 1 3. Equipment according to claim 6, where the devices in contact for mass transfer consist of Freezing water separation equipment 1 4. Set of equipment according to claim 6, where the mass transfer contact device consists of a spray tower 1. 5. Methods for fluorine compound recovery. Consisting of (A) a gas-fed line pass Which consists of Carrier gas and its compounds Fluorine enters the contact device for mass transfer. And through the liquid used to wash into the equipment Contact for mass transfer (B) the passage of fluorine compounds into the flushing liquid within the contact equipment. For mass transfer to produce vapor consisting of carrier gas and flushing fluid containing fluorine (C), through the washing liquid containing fluorine compounds into the tower. Separation of the substance is purified in the form of a cable feed into a separation tower And perform a separate feed line into a separate tower inside the separation tower Such purification By separating at low temperatures into upper vapor containing fluorine compounds. And lower washing liquid and (D) the upper vapor extraction Which contains fluorine compounds from the separation tower Purification and collection at least part of the product of fluorine compounds 1 6. Method according to claim 15, where the lower washing liquid is removed from the separation tower. Purify and pass into the contact device for mass transfer 1 7. Method of claim 15 where the flushing liquid has a freezing point below the cable temperature. Enter that is gas While the flushing liquid enters the contact device for mass transfer And has a vapor pressure that The aforementioned temperature is less than 1.0 mm Hg. 1 8. A set of equipment for the recovery of fluorine compounds. Consisting of (A) contact devices for mass transfer And equipment for the passage of the feed line incorporating fluorine compounds into the contact equipment for mass transfer (B), equipment for passing the flushing liquid into the contact for mass transfer (C), separation tower and equipment. For passing liquids from contact equipment For mass transfer into the separation tower and (D) equipment for the recovery of the separated fluorine compounds. Top of the purification tower 1 9. Kit according to claim 18, where the device is exposed for mass transfer, including the purification tower 2 0. Kit according to claim 18, where the device is in contact for Mass transfer consists of Water separator by making it freezes 2 1. Equipment set according to claim 18, where the mass transfer contact device consists of a spray tower 2. 2. Equipment set according to claim 18, which consists of additional equipment for Pass the liquid from the bottom part of the separation tower into the contact device for mass transfer.