TH1801002880A - Plasma devices driven by alternating current or multiphase pulses. And methods of Plasma production - Google Patents

Abstract

1 page of the number 1 page summary of the invention Plasma sources and plasma production methods are available. Plasma sources include at least three hollow cathodes: the first hollow cathode, the second hollow cathode, and Third hollow cathode, each hollow cathode has plasma output area. Plasma sources include energy sources that can produce signal waves. There can be a flat wave, the first, the second, and the third, the first wave. And the second output wave is out of the second output phase. The third wave and output wave is out of phase and wave The first output and the third output wave are out of phase. Each cathode is electrically connected to the power supply, such that the first hollow cathode is electrically connected to the first output wave. Second hollow cathode Electrically connected to the second output waveform and The third hollow cathode is electrically connected as the third output wave electric current flows between at least three hollow cathodes outside the electrical phase. The plasma source has the ability to form a plasma between hollow cathodes.

Claims (1)

: Page 1 of number 1 page summary of invention Plasma sources and plasma production methods are available. Plasma sources include at least three hollow cathodes: the first hollow cathode, the second hollow cathode, and Third hollow cathode, each hollow cathode has plasma output area. Plasma sources include energy sources that can produce signal waves. There can be a flat wave, the first, the second, and the third, the first wave. And the second output wave is out of the second output phase. The third wave and output wave is out of phase and wave The first output and the third output wave are out of phase. Each cathode is electrically connected to the power supply, such that the first hollow cathode is electrically connected to the first output wave. Second hollow cathode Electrically connected to the second output waveform and The third hollow cathode is electrically connected as the third output wave electric current flows between at least three hollow cathodes outside the electrical phase. The plasma source has the ability to generate plasma between the hollow cathodes. Clause (Section One) which appears on the announcement page: Revised 09/25/2019. No disclaimer ---------- Revised 09 / 11/2561 Clause no. -------------------------------------------------- -------------------------------------------------- Edit 14/08/2561 tags: