TH13258Y - Plasma kinetic energy sensor - Google Patents

Abstract

A plasma kinetic energy detector (or detector) has been fabricated for the analysis of the kinetic energy distribution and mean kinetic energy functions of ions in a plasma. The detector consists of an outer grid, an inner grid, and an ion acceptor, stacked sequentially within a framework. The three electrodes are electrically separated by spaced rings, supported axially by a supporting ring, and compressed together by a back cover. This invented detector utilizes a TEM grid, a sample receiving grid used for transmission electron microscopy, as a high-resolution grid to accommodate the accumulation problem of the outer thin film. The detector is also designed to have adjustable measurement position and angle (reference position and angle) when used with a suitable vacuum fitting. Furthermore, the detector is adaptable for use with high-density plasmas, such as plasmas with a density of approximately 10^18 m^-3.

Claims (8)

Revised May 26, 2017 1. The plasma kinetic energy detector is characterized by the following components: an outer grid electrode (2100) attached to a spacer ring (2500), an inner grid electrode (2200), another spacer ring (2500), and an ion acceptor electrode (2300), respectively, stacked within a structure (2400) and supported in a axial manner by a support ring (2600) and held together by the bonding pathways of the outer grid electrode (2100) and the inner grid electrode (2200). A TEM grid (2120) is used to address the problem of outer thin film accumulation. 2. Plasma ion kinetic energy probe, according to claim 1, where the outer grid electrode (2100) is further equipped with a grid receiver ring (2110), with the grid receiver ring (2110) sandwiched into the TEM grid (2120) in a common axis and secured by a bonding pathway. 3. Plasma ion kinetic energy probe, according to claim 1 or 2, where the inner grid electrode (2200) is further equipped with a grid receiver ring (2210), with the grid receiver ring (2210) sandwiched into the TEM grid (2220) in a common axis manner and secured by a bonding pathway. 4. Plasma ion kinetic energy detector, according to one of claims 1 through 3, in which the frame (2400) is metal-framed and designed to be cylindrical in shape with a front shoulder (2410), a side hole (2420) and a rear opening (2430). 5. Plasma ion kinetic energy detector, according to any one of claims 1 through 4, in which the frame (2400) is further fitted with a tube (2800) fitted to the frame (2400), in which the tube (2800) serves to insert three wires (2900) for biasing the outer grid (2100), the inner grid (2200), and the ion acceptor (2300), respectively. 6. Plasma ion kinetic energy detector pursuant to any one of claims 1 through 5, where the support ring (2600) is formed from a rigid insulator and designed with side openings (2610). The plasma ion kinetic energy detector is characterized by the outer grid electrode (2100) attached to the spacer ring (2500), inner grid electrode (2200), spacer ring (2500), and ion acceptor electrode (2300), respectively, stacked within a frame (2400) and supported in a central manner by the support ring (2600) and held together by an attachment method. The outer grid electrode (2100) and inner grid electrode (2200) use an EM grid (2120) to accommodate the problem of thin film accumulation on the outer plasma ion kinetic energy detector. Under Requisition 1, where the outer grid electrode (2100) is further incorporated with a grid receiving ring (2110), with the grid receiving ring (2110) being sandwiched to the TEM grid (2120) in a common axis manner and secured by attachment pathways, the plasma ion kinetic energy probe. Under Requisition 1 or 2, where the inner grip electrode (2200) is further incorporated with a grid receiving ring (2210), with the grid receiving ring (2210) being sandwiched to the TEM grid (2220) in a common axis manner and secured by attachment pathways, the plasma ion kinetic energy probe. Under any one of Requisitions 1 through 3, where the frame (2400) is formed from metal and designed as a cylinder with a front well (2410), a side hole (2420), and a rear opening (2430), the plasma ion kinetic energy probe. Under any one of Requisitions 1 through 4, where the frame (2400) is further fitted with a tube (2800) fitted to the frame (2400), with the tube (2800) serving to hold three wires (2900) for biasing the outer grid (2100), inner grid (2200), and ion acceptor (2300), respectively, the plasma kinetic energy detector. Under Requisition 5, where the tube (2800) is repositioned by sliding (4200) along the axis of the tube (2800). 7. Plasma ion kinetic energy detector according to one of claims 5 to 6, where the angle measured by rotation (4100) around the core of the tube (2800) 8. Plasma ion kinetic energy detector, according to any one of claims 1 through 7, in which the support ring (2600) is formed from a rigid insulator and designed with a side opening (2610).