SU961898A1

SU961898A1 - Method of controlling microwelding process and welded seam quality monitoring

Info

Publication number: SU961898A1
Application number: SU813267773A
Authority: SU
Inventors: Василий Андреевич Арсентьев; Евгений Петрович Второв; Иван Федорович Пархоменко; Юрий Николаевич Кузуб
Original assignee: Предприятие П/Я Р-6668
Priority date: 1981-04-03
Filing date: 1981-04-03
Publication date: 1982-09-30

Description

Изобретение относится к автоматизации технологических процессов сбор-¹ки микроэлектронной аппаратуры и может быть использовано при сброке по- г лупроводниковых приборов и интегральных схем.The invention relates to a process automation sbor- ¹ ki microelectronic devices and can be used in the po- g sbroke semiconductor devices and integrated circuits.

Известен способ управления процессом микросварки, при котором осуществляют измерение одного из параметров режима с последующим регулированием мощности, выделяемой в зоне соединения [1).A known method of controlling the process of microwelding, in which they measure one of the parameters of the mode with subsequent regulation of the power allocated in the connection zone [1).

Недостатком известного способа является низкая точность управления при микросварке, за счет чего снижается 15 воспроизводимость качества микросварных соединений. Данный способ не позволяет автоматически выбирать экспериментально обоснованные и необходимые режимы сварки для каждой контактной пары. Необходимость выбора режима сварки, особенно при сброке больших .интегральных и гибридных схем, состоит в том, что каждая контактная площадка обычно характеризуется различ- 25 ным состоянием поверхности и структуры.A disadvantage of the known method is the low accuracy of control during microwelding, thereby reducing the reproducibility of the quality of microwelded joints. This method does not automatically select experimentally justified and necessary welding modes for each contact pair. The need to choose a welding mode, especially when resetting large integrated and hybrid circuits, is that each contact area is usually characterized by a different state of the surface and structure.

Из известных наиболее близким к предлагаемому является способ управле·: ления процессом микросварки и контро- 30 ля качества сварного соединения, основанный на форсировании зондирующего импульса тока и подаче его через подготовленное к сварке соединение с 'Последующим измерением одного из параметров режима и регулировании сварочного тока [2].Of the known closest to the proposed one, there is a method of controlling ·: controlling the microwelding process and controlling the quality of the welded joint, based on forcing a probe current pulse and feeding it through a joint prepared for welding, followed by measurement of one of the parameters of the mode and regulation of the welding current [ 2].

Недостатком известного способа является также низкое качество сварки, что определяется отсутствием связи между параметре»! измерения и параметром режима сварки.The disadvantage of this method is also the low quality of welding, which is determined by the lack of communication between the parameter "! measurement and welding mode parameter.

Цель изобретения - повышение качества сварного соединения и автоматизация его контроля.The purpose of the invention is improving the quality of the welded joint and the automation of its control.

Поставленная цель достигается тем, что согласно способу управления процессе»! микросварки и контроля качества сварного соединения, основанному . на формировании зондирующего импульса тока и подаче его.через подготовленное к сварке соединение с последующим измерением одного из параметров режима и регулировании сварочного тока, после п,одачи зондирующего импульса тока измеряют на соединяемых элементах импульс термо-ЭДС, по величине которого формируют мощность импульса сварочного тока, а после подачи импульса сварочного тока вто рично измеряют импульс термо-ЭДС на соединенных элементах и по его параметрам определяют качество сварного соединения.This goal is achieved by the fact that according to the process control method! ” Microwelding and weld based quality control. on the formation of the probe current pulse and its supply. through the connection prepared for welding with the subsequent measurement of one of the parameters of the mode and regulation of the welding current, after p, supplying the probe current pulse, the thermo-EMF pulse is measured on the connected elements, the magnitude of which forms the power of the welding current pulse and, after a welding current pulse is supplied, the thermo-EMF pulse is secondly measured on the connected elements and the quality of the welded joint is determined by its parameters.

На фиг. 1 предоставлена бло.К:-схема устройства для осуществления спо- 5 соба управления процессом микросварки; на фиг. 2 представлены примеры записи зондирующего импульса ( кри- ¹вая а), измеряемого импульса термоЭДС (кривая б), используемого для 10 ;выбора экспериментально обоснованных режимов сварки, сварочного импульса (крийая' в ), импульса термо-ЭДС (кривая г ), по которому оценивается качество полученного соединения. 15 • Способ осуществляют с помощью устройства, которое содержит генератор 1 зондирующих импульсов, генератор 2 сварочных импульсов, вычислительное устройство 3 и коммутатор 4, синхро- 20 низирующий работу всего устройства. Сигнал термо-ЭДС усиливают усилителем 5, подключенным к соединяемым элементам 6 и проводникам 7, расположенным на подложке 8. Данные о парат- 25 метрах импульса термо-ЭДС поступают на вычислительное устройство 3 через преобразователь 9 аналог-код. Сварку выполняют с помощью расщепленного электрода 10. - ™In FIG. 1 provided. K: -schematic diagram of a device for implementing a method 5 for controlling a microwelding process; in FIG. Figure 2 shows examples of recording a probe pulse (curve ¹ ), the measured thermoEMF pulse (curve b) used for 10; the choice of experimentally justified welding modes, welding pulse (curve 'c), thermo-EMF pulse (curve d), according to which evaluates the quality of the obtained compound. 15 • The method is carried out using a device that contains a probe pulse generator 1, a welding pulse generator 2, a computing device 3 and a switch 4, synchronizing 20 the operation of the entire device. The thermo-EMF signal is amplified by an amplifier 5 connected to the connected elements 6 and conductors 7 located on the substrate 8. Data on the paratrooper 25 meters of the thermo-EMF pulse are transmitted to the computing device 3 through an analog-code converter 9. Welding is performed using a split electrode 10. - ™

Способ осуществляется следующим образом.The method is as follows.

Спомощью сварочного расщепленного электрода 10 и генератора Ъ зондирующих импульсов пропускают через проводник 6 зондирующий импульс мощно- стью меньше, чем сварочный импульс тока (кривая а ). После прохождения зондирующего импульса тока измеряют импульс термо-ЭДС (кривая’б·) усилителем 5 и аналого-цифровым преобра- 40 зователем 9.Using a split welding electrode 10 and probe pulse generator b, a probe pulse with a power less than the current welding pulse (curve a) is passed through conductor 6. After the passage of the probe current pulse, the thermo-EMF pulse (curve b) is measured with an amplifier 5 and an analog-to-digital converter 40.

Результаты измерений подаются на вычислительное устройство 3. С помощью вычислительного устройства 3 выбирают оптимальную мощность сварочного импульса тока для каждой контактной пары 6 и 7 (фиг. 1). Затем пропускают через проводник 6 оптимальный сварочный импульс тока с помощью генератора 2 сварочных импульсов тока.The measurement results are supplied to the computing device 3. Using the computing device 3 select the optimal power of the welding current pulse for each contact pair 6 and 7 (Fig. 1). Then the optimum welding current pulse is passed through conductor 6 using the generator 2 welding current pulses.

По окончании воздействия сварочного 'импульса (кривая а) на соединяемые; элементы & и 7, расположенные на подлЬжке 8, снова измеряют импульс термо-ЭДС (фиг. 2г) между СОедййяемыми элементами, и по его параметрам с помощью вычислительного устройства 3 оценивают качество полученного сварного соединения. .At the end of the impact of the welding 'pulse (curve a) on the connected ones; the elements & and 7, located on the base 8, again measure the thermo-EMF impulse (Fig. 2d) between the elements being connected, and the quality of the welded joint is evaluated using its computing device 3. .

Пример. Способ опробован при формировании соединений на контактных площадках со структурой Cr - Си - Ni. рбщая толщина контактных площадок сос тавляла 6000-8000 А^ В качестве проводников применялась золотая проволока марки Зл 999,9 диаметром 0,04.мм. Сварка выполнялась электродом ЭК1 Я2М4.088.172-(0,4-0,9)ОСТ11ПО.409.00572 при давлении, 95Гс. Данным методом было сформовано 200 сварных соединений ний. По результатам разрушающих испытаний было определено, что качество сварки по сравнению с обычными методами сварки повысилось на 20-25%. Было выявлено 5% потенциально надежных сварных соединений с малой площадью контакта между соединяемыми элементами.Example. The method was tested during the formation of compounds on contact pads with a Cr - Cu - Ni structure. The total thickness of the contact pads was 6000–8000 A ^. Zl 999.9 grade gold wire with a diameter of 0.04 mm was used as conductors. Welding was performed with an electrode EK1 Ya2M4.088.172- (0.4-0.9) OST11PO.409.00572 at a pressure of 95 G. Using this method, 200 welded joints were formed. According to the results of destructive tests, it was determined that the quality of welding compared to conventional welding methods increased by 20-25%. 5% of potentially reliable welded joints with a small contact area between the connected elements were revealed.

Таким образом, использование предлагаемого способа управления процессом микросварки с применением зондирующего импульса, пропускаемого через соединение и последующим измерением·, возникающего импульса термо-ЭДС, обеспечивает по сравнению с существующими способами, повышение качества микросварных соединений на 20-25%, снижение брака из-за выявления потенциально надежных соединений в процессе их формирования, контроль качества соединений выполняется в автоматическом режиме и не требует дополнительных затрат времени оператора сварочной установки.Thus, the use of the proposed method for controlling the microwelding process using a probe pulse transmitted through the joint and subsequent measurement of the · emerging thermo-EMF pulse provides, compared with existing methods, an increase in the quality of microwelded joints by 20–25%, and a decrease in rejection due to identifying potentially reliable joints in the process of their formation, quality control of joints is carried out automatically and does not require additional time for the welding operator th installation.

Процент выхода годных интегральных схем за счет повышения качества соединений увеличивается в среднем на 1517%.The percentage of usable integrated circuits by increasing the quality of the connections increases on average by 1517%.

Claims

The invention relates to the automation of technological processes for assembling microelectronic equipment and can be used for cutting semiconductor devices and integrated circuits. There is a known method for controlling the process of micro-welding, in which the measurement of one of the parameters of the regime is applied, followed by control of the power released in the connection zone 1J. A disadvantage of the known method is the low control accuracy in micro-welding, due to which the reproducibility of the quality of the micro-welded joints is reduced. This method does not allow automatic selection of experimentally justified and necessary welding conditions for each contact pair. The need to choose a welding mode, especially when cutting off large integrated and hybrid circuits, is that each contact surface is usually characterized by a different state of surface and structure. Of the known ones, the closest to the proposed method is the control of Lenin by the micro-welding process and the quality control of the welded joint, based on forcing the probe current pulse and passing it through the connection prepared for welding with Subsequent measurement of one of the mode parameters and control of the welding current 2. A disadvantage of the known method is also the low quality of welding, which is determined by the lack of connection between the measurement parameter and the welding mode parameter. The purpose of the invention is to improve the quality of the welded joint and automate its control. This goal is achieved by the fact that according to the method of controlling the welding process and the quality control of the welded joint, based. on the formation of a probe current pulse and its supply. through a connection prepared for welding, followed by measuring one of the mode parameters and adjusting the welding current, after the probe current pulse is transmitted, a thermal EMF pulse is measured on the connected elements, the pulse current power being generated. , and after the supply of a welding current pulse, a thermo-EMF pulse is measured again on the connected elements and the quality of the welded joint is determined by its parameters. FIG. 1 is provided with a block. To a schematic diagram of an apparatus for implementing a method for controlling a micro-welding process; in fig. Figure 2 presents examples of recording a probe pulse (curve a), a measured thermoEMF pulse (curve b) used for: selecting experimentally valid welding modes, welding pulse (C-B), and TEEM-EMF pulse (cr va d), according to which the quality of the compound obtained is evaluated. . The method is implemented using a device that contains a probe pulse generator 1, a welding pulse generator 2, a computing device 3 and a switch 4, which synchronizes the operation of the entire device. The thermo-EMF signal is amplified by an amplifier 5 connected to the connected elements 6 and conductors 7 located on the substrate 8. The data on the pair: meters of the pulse of the thermal-emf is fed to the computing device 3 through the converter 9 analog-code. Welding is performed with a split electrode 10, - ,. The method is carried out as follows. With the help of welding split electrode 10 and generator J.:. probe pulses are passed through the conductor 6 probe pulse power less than the welding current pulse (curve a). After passing a probe current pulse, a thermo-EMF pulse (curve-b-) is measured by an amplifier 5 and an analog-digital converter 9. Measurement results are fed to a computing device 3. By using a computing device 3, the optimum power of the welding current pulse is selected for each contact pairs b and 7 (fig. 1). Then, an optimal welding current pulse is passed through the conductor b by means of the Generator 2 welding current pulses. After the end of the impact of the welding pulse (curve a) on the joint; The elements in and 7, located on support 8, again measure the impulse of the terio-GVD (Fig. 2d) between the SADDED elements, and use the computing device 3 to estimate the quality of the welded joint obtained. Example. The method was tested during the formation of compounds on contact pads with the Cr – Cu – N1 structure. The thickness of the contact pads was from 6000–8000 Å. The conductors used were gold wire of grade 3L 999.9 with a diameter of 0 mm. Welding was performed with an EK1 Ya2M4.088.172- (0.4-0.9) OST11P0.409.00572 electrode at a pressure of 95G. This method was formed 200 welded joints of the Research Institute. According to the results of destructive tests, it was determined that the quality of welding compared to conventional welding methods increased by 20-25%. 5% of potentially reliable welded joints with a small contact area between the elements being connected were identified. Thus, the use of the proposed method of controlling the micro-welding process using a triggering pulse transmitted through the joint and subsequent measurement of the resulting thermal EMF pulse provides compared with existing methods, improving the quality of micro-welded joints by 20-25%, reducing rejects due to the detection of potentially reliable joints during their formation, control The quality of the joints is performed in automatic mode and does not require additional time for the operator of the welding installation. The percentage of usable integrated circuits due to an increase in the quality of connections increases on average by 1517%. The invention The method of controlling the process of micro-welding and quality control of the welded joint based on the formation. probe current pulse and feed it through a connection prepared for welding, followed by measuring one of the mode parameters and adjusting the welding current, which means that, in order to improve the quality of the welded joint, after the current pulse is applied, The elements of a thermo-EMF pulse, the largest of which forms the power of the welding current pulse, and after the pulse of the welding current is applied, the pulse of the thermo-emf is measured again on i, the connected elements, and its parameters determine dissolved quality weld. Sources of information taken into account during the examination 1. USSR author's certificate 263320, cl. B 23; CI / 24, 1969.

2. Authors certificate of the USSR. 461816, B 23 K 11/24, 1973 (prototype).

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