SU951017A1 - Chamber for carrying out manufacturing operations in high-pure atmosphere conditions - Google Patents
Chamber for carrying out manufacturing operations in high-pure atmosphere conditions Download PDFInfo
- Publication number
- SU951017A1 SU951017A1 SU803007188A SU3007188A SU951017A1 SU 951017 A1 SU951017 A1 SU 951017A1 SU 803007188 A SU803007188 A SU 803007188A SU 3007188 A SU3007188 A SU 3007188A SU 951017 A1 SU951017 A1 SU 951017A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- chamber
- air duct
- air
- duct
- area
- Prior art date
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- Ventilation (AREA)
Description
1one
Изобретение относитс к вентил ции и представл ет собой камеру дл проведени технологических операций в услови х высокой чистоты атмосферы.The invention relates to ventilation and is a chamber for carrying out technological operations in conditions of high purity of the atmosphere.
Известна камера дл проведени технологических операвдй в услови х высокой чистоты атмосферы, содержаща корпус, к верхней части которого подсоединен воздуховод, а к нижней - выт жной, и установленный в корпусе рабочий стол со столешницей и боковыми стенками, ограничивающих его внутренний объем 1.A known chamber for carrying out technological equipment in conditions of high purity of the atmosphere, comprising a housing, to the upper part of which an air duct is connected, and to the lower part an exhaust air duct, and a working table mounted in the housing with a tabletop and side walls limiting its internal volume 1.
Недостатком данной камеры вл етс повышенна концентраци вредностей в зоне стола за счет образовани застойных зон и повышенной турбулентности воздуха над столешницей за счет отражени нисход щего воздушного потока.The disadvantage of this chamber is an increased concentration of hazards in the table zone due to the formation of stagnant zones and increased air turbulence over the table top due to the reflection of the downward air flow.
Цель изобретени - снижение концентрации вредностей в зоне стола,The purpose of the invention is to reduce the concentration of hazard in the table area,
Поставленна цель достигаетс тем, что столешница и боковые стенки вьпголнены перфорированными , и камера снабжена дополнительным выт жным воздуховодом, подсоединенным к внутрегшему объему стола.The goal is achieved by the fact that the table top and side walls are perforated with perforation, and the chamber is equipped with an additional exhaust duct connected to the internal volume of the table.
На чертеже показана камера дл проведе1П5Я технологических операций в услови х высокой чистоты атмосферы, общий ввд.The drawing shows a chamber for conducting technological operations under conditions of high purity of the atmosphere.
Камера содержит корпус 1, к верхней части которого подсоединен приточный воздуховод 2, а к нижней - выт жной воздуховод 3, и установленный в корпусе 1 рабочий стол 4 со столешницей 5 и боковыми стенкалт 6, офаничивагощих внутренний объем 7 стола 4, причем столешница 5 и боковые стенки 6 вь полнены перфорированными с отверсти ми 8.The chamber contains a housing 1, to the upper part of which a supply air duct 2 is connected, and to the lower part - an exhaust air duct 3, and a working table 4 installed in the housing 1 with a table top 5 and side walls 6 of which the internal volume 7 of the table 4 is 4, and a table top 5 and the side walls 6 are perforated with holes 8.
Кроме того, камера снабжена дополнительным выт жным воздуховодом 9, подсоединенным к внутреннему объему 7 стола 4.In addition, the chamber is equipped with an additional exhaust duct 9 connected to the internal volume 7 of the table 4.
В приточном воздуховоде 2 установлены вентил тор 10 и фильтр 11 грубой очистки, а в выт жном воздуховоде 3 - выт жной вентил тор 12.In the intake duct 2, a fan 10 and a coarse filter 11 are installed, and in the exhaust duct 3 - an exhaust fan 12.
2020
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU803007188A SU951017A1 (en) | 1980-11-19 | 1980-11-19 | Chamber for carrying out manufacturing operations in high-pure atmosphere conditions |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU803007188A SU951017A1 (en) | 1980-11-19 | 1980-11-19 | Chamber for carrying out manufacturing operations in high-pure atmosphere conditions |
Publications (1)
Publication Number | Publication Date |
---|---|
SU951017A1 true SU951017A1 (en) | 1982-08-15 |
Family
ID=20927157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU803007188A SU951017A1 (en) | 1980-11-19 | 1980-11-19 | Chamber for carrying out manufacturing operations in high-pure atmosphere conditions |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU951017A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4694527A (en) * | 1983-07-06 | 1987-09-22 | Fujitsu Limited | Mask washing apparatus for production of integrated circuit |
-
1980
- 1980-11-19 SU SU803007188A patent/SU951017A1/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4694527A (en) * | 1983-07-06 | 1987-09-22 | Fujitsu Limited | Mask washing apparatus for production of integrated circuit |
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