SU855785A1 - Method of manufacturing electric discharge devices - Google Patents

Method of manufacturing electric discharge devices Download PDF

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Publication number
SU855785A1
SU855785A1 SU792852041A SU2852041A SU855785A1 SU 855785 A1 SU855785 A1 SU 855785A1 SU 792852041 A SU792852041 A SU 792852041A SU 2852041 A SU2852041 A SU 2852041A SU 855785 A1 SU855785 A1 SU 855785A1
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SU
USSR - Soviet Union
Prior art keywords
electric discharge
discharge devices
manufacturing electric
electrodes
electron
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SU792852041A
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Russian (ru)
Inventor
Роберт Азатович Амирян
Геннадий Дмитриевич Лосев
Георгий Васильевич Ровенский
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Предприятие П/Я А-1067
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Priority to SU792852041A priority Critical patent/SU855785A1/en
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Publication of SU855785A1 publication Critical patent/SU855785A1/en

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Description

1one

Изобретение относитс  к производ- ству электровакуумных приборов (ЭВП), в частности к способам обезгажйвани  электродов при откачке или трюнировке слюнтированных ЭВП с прот женным электронным потоком и многоэлектродной электронно-оптической системой, и может быть использовано в электронной промышленности при производстве надежных и долговечных ЭВП.The invention relates to the production of electrovacuum devices (EEC), in particular, to methods of degassing electrodes when pumping out or trying out salivated EIS with an extended electron flux and a multielectrode electron-optical system, and can be used in the electronic industry for the production of reliable and durable EIS.

Известен способ обезгажйвани  электродов ЭВП путем электронной бомбардировки- Наиболее эффективным  вл етс  сканирование электронного луча по обрабатываемой поверхности электродов смонтированного прибора, например, путем подачи переменного напр жени  на фокусирующий электрод ЭЛТ дл  достижени  минимгшьного давлени  в приборе TI Однако дл  приборов с многоэлектродной электронно-оптической системой и прот женным электронным потоком этот способ непригоден из-за невозможности обработать поверхности, нгисод щиес  в электронной тени, так как изменение напр жений на фокусирующем электроде не может обеспечить достаточно эффективное воздействие на траектории электронов в областиThe known method of degassing electrodes of EVP by electron bombardment. The most effective is to scan the electron beam across the surface of the electrodes of the mounted device, for example, by applying alternating voltage to the focusing electrode of the CRT to achieve a minimum pressure in the TI device However, for devices with a multi-electrode electro-optical system and by the extended electron flux this method is unsuitable because of the impossibility to process the surfaces that are in electronic form. because the change in voltage at the focusing electrode cannot provide a sufficiently effective effect on the trajectories of electrons in the region

удгшенных от катода электродов, а это необходимо дл  создани  встречного потока электронов на поверхности , наход щиес  с противоположной от катода стороны.electrodes from the cathode, and this is necessary to create a counter-current of electrons on the surface opposite to the cathode.

Известна также обработка электродов сканирующим электронным лучом путем подачи на электроды одновременно с посто нными разных по величине переменных напр жений при повышенной температуре катода f2j.Also known is the processing of electrodes with a scanning electron beam by applying to the electrodes simultaneously with the constants of different variable voltages at an elevated cathode temperature f2j.

Claims (2)

1.Патент США 3966287, кл. 316-1, опублик. 1976.1. US Patent 3,966,287, cl. 316-1, pub. 1976. 2.Авторское свидетельство СССР 66349, кл. Н 01 J 9/44, 1941 (прототип).2. Authors certificate of the USSR 66349, cl. H 01 J 9/44, 1941 (prototype). Tpffftfmefft/u Mf/tfttfffftff/ Фиг.1Tpffftfmefft / u Mf / tfttfffftff / Figure 1
SU792852041A 1979-12-14 1979-12-14 Method of manufacturing electric discharge devices SU855785A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU792852041A SU855785A1 (en) 1979-12-14 1979-12-14 Method of manufacturing electric discharge devices

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Application Number Priority Date Filing Date Title
SU792852041A SU855785A1 (en) 1979-12-14 1979-12-14 Method of manufacturing electric discharge devices

Publications (1)

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SU855785A1 true SU855785A1 (en) 1981-08-15

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SU792852041A SU855785A1 (en) 1979-12-14 1979-12-14 Method of manufacturing electric discharge devices

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SU (1) SU855785A1 (en)

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