SU807043A1 - Method of measuring layer thickness - Google Patents
Method of measuring layer thickness Download PDFInfo
- Publication number
- SU807043A1 SU807043A1 SU792761282A SU2761282A SU807043A1 SU 807043 A1 SU807043 A1 SU 807043A1 SU 792761282 A SU792761282 A SU 792761282A SU 2761282 A SU2761282 A SU 2761282A SU 807043 A1 SU807043 A1 SU 807043A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- thickness
- product
- layers
- signal
- value
- Prior art date
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
1one
Изобретение относитс к неразру шющему контролю изделий и. может быть использовано при измерении толщины слоев многослойных объектов.This invention relates to non-destructive inspection of products and. can be used when measuring the thickness of layers of multilayer objects.
Известен способ измерени толщины непровод щего сло , расположенног на провод щей основе. При контроле толщины слоев двухслойного непровод щего объекта в процессе производства между сло ми располагают электропровод щую прослойку, накладывают на поверхность издели источник переменного магнитного пол и по величине вносимого сопротивлени от вли ни вихревых токов в прослойке суд т о толщине сло издели 1.A known method for measuring the thickness of a non-conducting layer located on a conductive base. When controlling the thickness of the layers of a two-layer non-conductive object, an electrically conductive layer is placed between the layers, a source of an alternating magnetic field is placed on the surface of the product and the thickness of the layer 1 is judged by the amount of applied resistance from the influence of eddy currents in the layer.
Однако при реализации этого способа возникает погрешность измерени из-за изменени электропроводности прослойки по площади, от изменени температуры, от неоднородности ее электропроводности по поверхности.However, when implementing this method, measurement error arises due to the change in the electrical conductivity of the interlayer over the area, from the temperature change, from the non-uniformity of its conductivity over the surface.
Наиболее близким по технической сущности к предлагаемому вл етс способ измерени толщины слоев многослойных изделий, заключающийс в том, что при изготовлении издели между его сло ми размещают межслойные элементы, располагают на одной из поверхностей издели накладнойThe closest in technical essence to the present invention is a method for measuring the thickness of layers of multilayer products, which consists in the fact that, in the manufacture of a product, interlayer elements are placed between its layers, placed on one of the surfaces of the product
индуктивный преобразователь и по величине сигнала этого преобразовател суд т об измер емых толщинах слоев, причем в качестве межслойныхthe inductive transducer and the magnitude of the signal of this transducer are judged on the measured thicknesses of the layers, and as interlayer
элементов используют систему линейных проводников, через которые поочередно пропускают переменный ток, в качестве измер емого параметра используют индукцию магнитного пол линейногоelements use a system of linear conductors, through which alternating current is alternately passed, as the measured parameter using linear magnetic field induction
проводника с током 2 . conductor with current 2.
Однако способ обладает недостатком заключающимс в том, что направленность магнитного пол в точке наблюдени при неизменном ее удалении отHowever, the method has the disadvantage that the orientation of the magnetic field at the point of observation with its constant distance from
5 проводника с током определ етс не только полем участка проводника непосредственно под точкой наблюдени , а вл етс интегральной суммой полей от соседних участков и всего контура.5, a conductor with a current is determined not only by the field of the conductor portion directly below the observation point, but is the integral sum of the fields from the adjacent portions and the entire contour.
0 Чем ближе эти участки от точки наблюдени , тем существеннее их вклад в значение пол в этой точке. Напр женность пол в рассматриваемой точке над проводником вл етс не только0 The closer these sites are from the observation point, the more significant their contribution to the gender value at this point. The intensity of the field at the point in question above the conductor is not only
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU792761282A SU807043A1 (en) | 1979-05-03 | 1979-05-03 | Method of measuring layer thickness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU792761282A SU807043A1 (en) | 1979-05-03 | 1979-05-03 | Method of measuring layer thickness |
Publications (1)
Publication Number | Publication Date |
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SU807043A1 true SU807043A1 (en) | 1981-02-23 |
Family
ID=20825631
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU792761282A SU807043A1 (en) | 1979-05-03 | 1979-05-03 | Method of measuring layer thickness |
Country Status (1)
Country | Link |
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SU (1) | SU807043A1 (en) |
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1979
- 1979-05-03 SU SU792761282A patent/SU807043A1/en active
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