SU746967A1 - Monitoring device - Google Patents

Description

The invention relates to a computing technology technique and it can be used in automated control systems for the production of integrated circuits, in particular, it can be used in automated control systems for multi-layer switching micropaths of large hybrid integrated circuits. Micro switch boards of large hybrid integrated circuits are a plate made of a dielectric, for example, a sitall, on which multi-layer, for example two-layer, current-conducting wiring is made by any known method corresponding to the topology of the given switching board. At the specified points of the conductive wiring, contact pads are used, which are used to connect crystals (chips) that form a large hybrid integrated circuit. The number of contact. Microplatform switching sites reaches a large value, in the general case 24О-4СО. When monitoring multilayer mufoptvt BGIS commutation, the presence of an electrical connection of each two CONTEXT sites, which are of interest, is determined by the "resistivity" of the conductor connecting these two pads, and the absence of short circuits between the conductors of the switching board mic as in this wiring, and in every two adjacent layers. Microcontroller switching control devices are known in which the communication of measuring and recording devices with a test plate or microplate is carried out using a set of sprung pins on the probe head, each of which has electrical contact with a corresponding switching microcircuit site. The device contains an object stack that can move in a horizontal plane along the axes X and Y, and in the vertical direction along the axis t. On the stage the checked plate or microplate of the R & D institute is placed, which moves together with the object with this point 1. The disadvantage of this device is the complexity of the design. Devices for controlling hybrid integrated circuits are known, which include a coordinate stop with a mechanism for moving it. Connected to a table motion control unit, a memory unit, probes mounted on holders, connected via a switch to a resistance measurement unit and a C2 motion control unit. The drawback of the devices lies in the complexity of the equipment for contacting, since for the mixing of each of the two holders of the contacting needles on the X and Y axes, special manipulators manufactured according to a high accuracy class are needed. In addition, the separate movement of these holders requires time-consuming, which reduces the performance of the devices. The purpose of the invention is to simplify the device and to increase the productivity of its work. This is achieved by the fact that in the device for controlling multilayer micro switch boards of large hybrid integrated circuits with a regular arrangement of contact pads, containing a coordinate table with its movement mechanism, connected to the table motion control unit, the holder is connected to the holder. a switch with a resistance measurement unit and a probe movement control unit; the probes are placed on the holder in two mutually perpendicular rows, one of which is The number of probes is equal to the number of contact pads in the corresponding row of controlled switching microcircuits, and in the other pitch - on the switch: less than twice the number of –KOHTaKTHbtx sites of another row.

The drawing shows a functional diagram of the described device.

Device for controversy benefits. The multi-layered microboard 1 switchboard contains a coordinate table 2, used to place the switching microboard 1, with contact pads 3, the probes 4, which are spread on the holder by two mutually perpendicular rows, for example, T-shaped. The mechanism for moving stla 2 is connected via control unit 5.

This ratio of the number of probes is due to the fact that one of these probes, namely the probe located at the intersection of the horizontal and vertical rows of the T-shaped set, equally belongs to the rows and therefore is taken into account, for example, as a probe of the vertical row when determining the number of probes horizontal p yes.

During operation of the device, the output signals of the computer unit 6 are received at the inputs of the table motion control unit 5, the resistance measurement unit 10, the switch 7 and the motion control unit 8 of the probes 4. In accordance with the control signals of the computer block 6, the coordinate stop 2 on which the checked micro switchboard 1, moves according to a given program in the horizontal plane along the axes X and Y and in the vertical plane along the axis Z.

Moving the switching micropaths relative to the T-shaped set of probes 4 is carried out in such a way that the probe located at the intersection of the horizontal and vertical rows of the T-shaped set. Generally, all contact pads 3 successively move the table with the computer unit 6, which is connected to the probes 4 through the switch 7, and to the electromagnets 9 through the probe movement control unit 8 and the resistance measuring unit 10 connected to the computer unit 6 and the switch 7. Connecting conductors 11 are placed on the microboard 1 of switching. The device operates as follows. Micro switchboard 1 is mounted on table 2, which can move in a horizontal plane along two orthogonal axes and vertically. Moving the table 2 aligns the T-shaped set of probes 4 with the extreme number of contact pads 3 of the microboard 1 arranged in a regular manner, for example, mutually perpendicular rows, the T-shaped set of probes 4 is mounted on a fixed holder (not shown). At the same time, the number of probes 4, for example, in a horizontal row, is equal to twice the number of contact pads in one of their rows on the tested microboard of the commutation, minus one probe, and the number of probes 4 in the vertical row of the T-shaped set is equal to the number of contact areas friends of their mutually perpendicular p. Uka57465676

switching micropaths. For each of the electromagnets 9 are connected by a rigid t of such movements on commands from the blockade with the probes 4, windings of electromagnets

The computer 6, coming through the unit in control - connected to the unit 8 controlling the transfer of the movement of the probes 4, carried out by moving the probes 4, from the output of which

The contacting of the probes 4 is only with the supply to the windings of the corresponding contact areas 3, between which in this position the T-shaped set of probes is measured

electrical resistance. The remaining probes are at this time in a raised position, which excludes mechanical damages of the corresponding contact pads 3. According to the program stored in the memory of the computer unit 6, the corresponding probes 4 are connected in series with the switch 7 to the measurement unit 10. After switching, unit Yu measures the resistance value between the selected contact pads and the measurement result is entered into computer unit B, which compares this value with the setpoint stored in erativnoy computer memory 6. If the mismatch of the measured value and the set point is within a predetermined range, the command table 2 electronic computer unit 6 moves to the next predetermined position relative to the T-probe set 4 and the measurement cycle is repeated. If the value of the measured resistance value and the setpoint are different by the amount beyond the established limits, Scrap information is output to the printing device from the computer unit 6 by any known method 3. During each of the connection control cycles in the multi-layered microboard, the probes 4 are combined selectively only with the TILE contact pads 3, which end with the connecting conductors being tested. The remaining probes are currently in an elevated state. When moving the T-shaped set of probes 4 to another 4 (next) position, the connections that already exist between other contact pads are checked. This means that according to a given program, a part of the probes that were previously in the raised position is lowered and they are combined with the corresponding contact pads. Along and at the same time, the previously lowered probes 4 are lifted. The probes 4 are raised and lowered using electromagnets 9, used one for each probe.

The electromagnets are fed through control signals fed to block 8 from computer unit 6.

Claims (2)

Periodically, according to a given program, selective and short-term combination of probes 4 only with predetermined pads significantly reduces the likelihood of mechanical damage to the pads (scratches, punctures, etc.). In addition to the T-shaped arrangement, the probes 4, when they are located in two mutually perpendicular rows, can be located on a holder, either U-shaped or T-shaped. In the described device, the use of separate manipulators for moving two probe holders is eliminated, which simplifies the device, improves its performance by reducing setup time, the invention The device for controlling mainly multilayer switchboard large hybrid integrated circuits with regular arrangement of contact pads, containing coordinate table with its movement mechanism, connected to the table motion control unit, computer unit, placed on d rzhatele probes are connected through a switch to the block, the measurements of resistances and a movement control unit probes. It is due to the fact that, with the simplification of the device and the improvement of its operation, the probes are mounted on the holder in two mutually perpendicular rows, in one of which the number of probes is equal to the number of contact pads, in the corresponding row of the controlled switching microboard, in the other row - one less than twice the number of contact pads of another row. Sources of information taken into account in the examination 1. US patent No. 3446065, cl. 73-105, 1969. 2. Patent of the USSR No. 473383, cl. H 01 C 17 / OO, 1971 (prototype).