SU701672A1 - Method of the purification of gas from chlorosilane and methylchlorosilane - Google Patents

Description

The invention relates to a method for the purification of hydrogen chloride and other gases and impurities of organo (hydride) chlorosilanes and can be used in the chemical industry in the production of organosilicon materials.

Methods are known for purification of gases produced in organosilicon production from organo (hydride) chlorosilanes impurities with various liquid absorbents, for example, the products of the hydrolysis of ethyl ethoxysilanes 1.

The disadvantage of using liquid scavengers is the need to use high temperatures or vacuum for desorption of organos (hydride) chlorosilanes from the scavenger and low temperatures during their condensation, as well as unavoidable losses of the scavenger and contamination of the gas to be purified.

The closest to the invention in its technical essence and the achieved result is the method of gas purification from impurities of organochlorosilanes by absorption by water 2

polyorgano (hydride) silsesquioxane. Filtration is required to separate the solid phase.

The aim of the invention is to simplify the process.

This goal is achieved by the fact that the absorption of trichlorosilane and methyltrichlorosilane are powdered polyorgano (hydride) silsesquioxane containing 1

0 burn 20-50% water.

The upper limit of the water content is determined by the need to preserve the flowability of the powdered polyorganic (hydride) silsesquioxane.

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As the water content decreases, the cleaning rate drops and when the water content is below 20%, the process is impractical. In this case, polyorgano (hydride) silsesqui0xan must be moistened.

In order to more uniformly use the moisture of polyorgano (hydride) silsesquioxane, it is advisable to mix.

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 The process is carried out as follows.

Claims (1)

In a column equipped with a low-speed agitator (1-2 rpm), a wet Poliorgano (hydride) silsesquioxane is loaded and the hydrogen chloride (nitrogen, hydrogen methane or other gases) containing chloro-silanes is not permeated with hydrogen chloride (periodic) moving. In the case of organ leakage (the trichlorosilane hydra, the gas supply to be purified is stopped and water vapor is injected into the column. When the required moisture is reached:; gas purification is resumed, the water vapor condensate formed during the moistening and containing hydrogen chloride are used for the subsequent moistening. With this Polyorganos (hydride) silsesquioxane mode of operation can be used continuously, its absorption capacity is almost unlimited. Gas purification rate is 99.5%, Polyoxylate powder resulting from purification of contaminated gases According to its accumulation, silganesquioxane (hydride) is taken away and after further processing it is used as a marketable product of i-hydroxyphobic powder, a vertical glass column, (d 35 mm), supplied quietly; 1 dBy 95 V bi5omKoo6pc 3Horo polymer feedstock ((n-hydride silsquioxane) containing 37 ,, 5% water. 200 m high. Hydrochloric chloride is passed through the polymer layer containing 0.624 g / l (10.3 vol,%) trichloro silane, uoj: .HMep periodically mix and moisten. The absorption capacity of the polymer before the start of the breakthrough of trichlorosilane is about 0.3 g / Gu. The breakthrough of trichlorosilane is gradually increased when the content of water is. The polymer B is about 20% of 1/3 of the initial concentration. At this point, the gas supply is stopped, the polymer is moistened, nitrogen is passed through it for 4-5 hours, saturated with water vapor. The resulting acidic condensate is collected in a receiver and used for the next time the owner has the pulley. The absorption capacity of the polymer (after wetting) before the breakthrough of trichlorosilane is about 0.3 g / g. In a similar manner, hydrogen chloride is purified from methyl trichlorosilane using polymethylsilsesquirxane and nitrogen is purified from trichlorosilane using poly (hydride) silsesquioxane. Thus, the proposed method. Well-known, since there is no waste and eliminated the stage of filtration. Claims The method for purifying gas from three: -sorosilane and methyltrichlorosilane by absorption in water, which is different in that, in order to simplify the process, the absorption is carried out by a pore-shaped polyorganic (hydride) silsesquioxane containing 20-50% water. Sources of information taken into account in the examination 1. USSR author's certificate №466181, CL, C 01 B 7/08, 1973 2, Technological regulations of the experimental production of silicon tetrachloride and trichlorosilane, M, 1977.