SU662627A1 - Apparatus for measuring electroplating coating thickness during deposition - Google Patents

Description

(54) DEVICE FOR MEASURING THICKNESS. GALVANIC COATINGS IN THE DEPOSITION MODE WITH PREVENTION MODE, which limits the functionality of the device .. ifenbio of the invented invention: improving device reliability and accuracy of coating thickness measurement and expanding functional capabilities. The delivered circuit is comprehended by the fact that the device is additionally equipped with a block of comparing devices, a block for setting extreme values of cathode current density, a signaling circuit for a cathode current density from specified limits and a key, and the output of the cathode current density measuring unit at the witness is connected to the common input of the devices, the remaining inputs of which are connected to the corresponding outputs of the installation unit, the extreme values of the cathode density, the current, the signaling circuit input vk yes yyotnosti cathode current of the set values is coupled to a first output sravshvayuschih devices, and the second output of this unit is connected to the control input of the key into the cathode circuit vklyuchennoth detalisvidetel. FIG. 1 shows a diagram of the proposed device; in fig. 2 - variant - unit comparison unit and unit installation VIII extremal values of cathode current density. The proposed device contains a detail of the witness 1, Shmytsennuyu in gal Vanichizkuyu. bath 2 beside. with covered parts 3, led 4 of the coatings on the details of sweeper, ckeMy 5 installations and the signaling circuit 6 of the specified topshiva coating, node 7 measuring cathodic current density on the parts. detector, indicators S and 9 cathodic current density and TOL The SCHINNY is covered, the power supply unit 10 of the bath, the unit 11 comparing the device, the unit 12 for setting the extreme values of cathode current density, the circuit 13 for signaling the voltage of the cathode current density from the specified limits and the key 14. The unit 12 for setting the extreme values of the cathode current density can The output is fulfilled, for example, in the form of three adjustable sources 15,16,17 of the reference voltage, the output signals of which are proportional to the corresponding technological modes of the lower and upper limits and the maximum value of the cathodic current density, which in this case, compares The device contains three comparison devices 18, 19 and 20, the first inputs of which are combined and connected to the output of the cathode current density measurement node 7, and the second inputs are connected to the outputs of sources 15,16,17 respectively line voltage of block 12; The outputs of the sreening devices 18 and 19 are combined and connected to the input of the circuit 13 for signaling the output of the cathode current density from the specified limits, and the output of the comparing device 20 is connected to the control input of the key 14, which is included in the cathode circuit of the witness part 1. and the maximum allowable technological mode values of cathode current density blocks 11 and 12 can be performed according to a simpler scheme (Fig. 2). Block 11 in this case contains two comparing devices 18 and 19, the first inputs of which are connected to the output of node 7, and the second are connected respectively to the outputs of adjustable sources 15 and 16 of the reference voltage constituting block 12. The first code of the comparison device 19 is connected with the control input K-14, and the second output is combined with the output of the comparison device 18 and connected to the input of the V-code signaling circuit 13 of the cathode current density from the specified limits. The witness part 1, the coating thickness measurement unit 4, the details, the installation diagram 5 and the signaling circuit 6 of a given coating thickness and the coating thickness indicator 9 can be performed in the proposed device similar to known devices. Since the area of the coated part of the witness in this case is known and constant, the node 7 for measuring the cathode current density can be made in the form of a current-voltage converter, the output signal of which is proportional to the current value of the cathode current density on the witness part. The proposed device works as follows. If the cathode current density on the part-witness I is in the given

If there is a techniopogical prepel mode, there is no signal at the exit of the comparison devices 18, 19 and 20 and the key 14 is closed. Both the witness part and the coatings 3 are deposited with a coating, setting a given thickness of the coating, measuring the thickness of the coating, signaling the achievement of a given top of the coatings and measuring the cathodic current density as the witness details occur similarly to the operation of the corresponding prototype nodes.

When the cathode current density reaches the witness beyond the limits set by the technological mode, a signal appears at the output of one of the comparison devices 18, 19, respectively, and the signaling circuit 13 on the output of the cathode current density from the specified limits is triggered.

If the cathode current density on the part-witness for any of the above reasons exceeds the maximum allowable technological mode value, $ 1 also outputs the signal at the output of the comparator device 2O and, therefore, opens the key 14, as a result of which the cathode circuit of the part will be broken. witness 1 and the deposition of the coating will cease.

In order to resume operation of the device after eliminating the reasons that caused the cathode current density to transcend into the details of the witness. The maximum value allowed by the theological regime, it is necessary to briefly lock the key 14.

When changing the set values, it is necessary to change the voltage at the output of the adjustable sources 15, 16,17 of the reference voltage, respectively. The device works with another specific implementation of the nodes 11 and 12, for example, according to the scheme shown in FIG. 2 is similar.

Thus, the proposed device makes it possible to increase the accuracy of measuring the average thickness of the coating on the coated parts by disconnecting the part-witness from the cathode thickness of the bath when the cathode chain of the covered parts is accidentally or deliberately broken.

Claims (1)

1. Palley S.S. Method and instrument for continuous monitoring of the thickness of electroplating directly in the process of deposition L., Sudprom, 1956, p. 183-28. 15 Figure 2 node To Scheme 1e - 1c And kinztsu u