SU615447A1 - Method of producing protective patterns with aid of dry negative photoresists - Google Patents

Method of producing protective patterns with aid of dry negative photoresists

Info

Publication number
SU615447A1
SU615447A1 SU762352768A SU2352768A SU615447A1 SU 615447 A1 SU615447 A1 SU 615447A1 SU 762352768 A SU762352768 A SU 762352768A SU 2352768 A SU2352768 A SU 2352768A SU 615447 A1 SU615447 A1 SU 615447A1
Authority
SU
USSR - Soviet Union
Prior art keywords
aid
negative photoresists
producing protective
protective patterns
dry negative
Prior art date
Application number
SU762352768A
Other languages
Russian (ru)
Inventor
Анатолий Васильевич Олейник
Валерий Михайлович Треушников
Наталия Львовна Гусарская
Сергей Васильевич Зеленцов
Гаянэ Леоновна Меликова
Вера Георгиевна Лебедева
Original Assignee
Горьковский государственный университет им.Н.И.Лобачевского
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Горьковский государственный университет им.Н.И.Лобачевского filed Critical Горьковский государственный университет им.Н.И.Лобачевского
Priority to SU762352768A priority Critical patent/SU615447A1/en
Application granted granted Critical
Publication of SU615447A1 publication Critical patent/SU615447A1/en

Links

SU762352768A 1976-04-16 1976-04-16 Method of producing protective patterns with aid of dry negative photoresists SU615447A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU762352768A SU615447A1 (en) 1976-04-16 1976-04-16 Method of producing protective patterns with aid of dry negative photoresists

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU762352768A SU615447A1 (en) 1976-04-16 1976-04-16 Method of producing protective patterns with aid of dry negative photoresists

Publications (1)

Publication Number Publication Date
SU615447A1 true SU615447A1 (en) 1978-07-15

Family

ID=20658758

Family Applications (1)

Application Number Title Priority Date Filing Date
SU762352768A SU615447A1 (en) 1976-04-16 1976-04-16 Method of producing protective patterns with aid of dry negative photoresists

Country Status (1)

Country Link
SU (1) SU615447A1 (en)

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