SU611146A1 - Method of ultrasonic detection of impurities in monocrystals - Google Patents

Method of ultrasonic detection of impurities in monocrystals

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Publication number
SU611146A1
SU611146A1 SU752177715A SU2177715A SU611146A1 SU 611146 A1 SU611146 A1 SU 611146A1 SU 752177715 A SU752177715 A SU 752177715A SU 2177715 A SU2177715 A SU 2177715A SU 611146 A1 SU611146 A1 SU 611146A1
Authority
SU
USSR - Soviet Union
Prior art keywords
sample
impurities
monocrystals
ultrasonic detection
transducers
Prior art date
Application number
SU752177715A
Other languages
Russian (ru)
Inventor
Михаил Борисович Гитис
Original Assignee
Всесоюзный Научно-Исследовательский Институт По Разработке Неразрушающих Методов И Средств Контроля Качества Материалов
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Всесоюзный Научно-Исследовательский Институт По Разработке Неразрушающих Методов И Средств Контроля Качества Материалов filed Critical Всесоюзный Научно-Исследовательский Институт По Разработке Неразрушающих Методов И Средств Контроля Качества Материалов
Priority to SU752177715A priority Critical patent/SU611146A1/en
Application granted granted Critical
Publication of SU611146A1 publication Critical patent/SU611146A1/en

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Description

i - частота возбуждени  образца. На чертеже представлена схема устройства дл  реализации способа. УСТРОЙСТВО содержит вакуумную ка меоу 1 дл  размещени  образца г и SHOBO OB и 4, на концах которых установлены соответственно преобразо ватели 5   6 и электронный блок 7, Способ заключаетс  в следующем. Из услови  й эграничности среды с учетом геометрии образца рассчитывают частоту возбуждаемых колебаний по фор мyлeu-401гз/d , где S - скорость звука d - характерный размер образца. контролируемый образец 2 помещают в вакуумную камеру 1 между торцами волноводов 3 и 4, поверхности которы и поверхность образца предварительно обрабатывают с большой чистотой дл  обеспечени  акустического контакта при откачке воздуха. Нагревают образец при 0, 1,5, после чего пре образователи 5 и 6 излучают и принимают ультразвуко.вые колебани , отраженные от противоположной излучению поверхност: образца, в электронном блоке 7, который может быть выполнен например, как УС-ЮИ. Сигналы от дву преобразователей сравниваютс  и на выходе имеем отношение этих сигналов по величине которого суд т о затуха нии, а следовательно, и о концентра ции примесей. Внедрение изобретени  позволит создать аппаратуру неразрушаюшего онтрол  концентрации электрически еактивных примесей в аллах, а не на образцах - свидетел х, TO крайне важно дл  современных нергетических установок, полупроводиковой технологии и т.д. формула изобретени  Способ ультразвукового контрол  гг TL:°4To r; ; ::Гбу:д:: f ль разв ковые колебани , измер ют коэффициент поглощени  У ьтразвука и по нему суд т о концентрации с ельГпо ы е иГточн сти зм рений, частоту возбуждаемых в образце колебаний рассчитывают с уче оГего размеров и атем нагревают образец при соблюдении следующего услови : -,0,566)1.5, rnet - врем  релаксации, определ емое коэффициентом диффузии приiO - частота возбуждени  образца, источники информации, прин тые во внимание при экспертизе: 1.Авторское свидетельство СССР № 203337, кл.й 01 К 29/00, 1965 2.Физическа  акустика. Под ред. у.мезона, том Ж А . М., Мир, 1969, с. 11.i is the sample excitation frequency. The drawing shows a diagram of the device for implementing the method. The DEVICE contains a vacuum chamber 1 for placing the sample r and SHOBO OB and 4, at the ends of which the transducers 5 6 and the electronic unit 7 are installed, respectively. The method is as follows. From the condition of the boundary of the medium, taking into account the geometry of the sample, the frequency of the excited oscillations is calculated using the mileu-401gz / d form, where S is the sound velocity d is the characteristic sample size. Controlled sample 2 is placed in a vacuum chamber 1 between the ends of waveguides 3 and 4, the surfaces of which and the surface of the sample are pretreated with high purity to ensure acoustic contact when pumping air. The sample is heated at 0, 1.5, after which the transducers 5 and 6 emit and receive ultrasonic vibrations reflected from the surface opposite to the radiation of the sample in the electronic unit 7, which can be performed, for example, as US-LI. The signals from the two transducers are compared, and at the output we have the ratio of these signals by the magnitude of which the attenuation and, hence, the concentration of impurities are judged. The implementation of the invention will allow the creation of equipment for the non-destructive ontrol concentration of electrically active impurities in Allah, and not on witness samples, TO is extremely important for modern power plants, semiconductor technology, etc. invention The method of ultrasonic monitoring gg TL: ° 4To r; ; :: GBu: d :: f are developmental oscillations, measure the absorption coefficient of ultrasound, and from it judge the concentration of the elimination of radiation, the frequency of the oscillations excited in the sample is calculated based on its size and then heats the sample at compliance with the following conditions: -, 0.566) 1.5, rnet - relaxation time, determined by the diffusion coefficient at iO - sample excitation frequency, sources of information taken into account during the examination: 1. USSR author's certificate No. 203337, class 01 К 29 / 00, 1965 2. Physical acoustics. Ed. y.mezona, volume F A M., Mir, 1969, p. eleven.

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SU752177715A 1975-10-03 1975-10-03 Method of ultrasonic detection of impurities in monocrystals SU611146A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU752177715A SU611146A1 (en) 1975-10-03 1975-10-03 Method of ultrasonic detection of impurities in monocrystals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU752177715A SU611146A1 (en) 1975-10-03 1975-10-03 Method of ultrasonic detection of impurities in monocrystals

Publications (1)

Publication Number Publication Date
SU611146A1 true SU611146A1 (en) 1978-06-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
SU752177715A SU611146A1 (en) 1975-10-03 1975-10-03 Method of ultrasonic detection of impurities in monocrystals

Country Status (1)

Country Link
SU (1) SU611146A1 (en)

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