SU587322A1 - Photoelectric microscope - Google Patents

Description

one

The invention relates to a measurement technique intended to measure the deflection of solids in two mutually perpendicular directions.

Famous photoelectric microscope

for measuring linear dimensions, containing an illuminator, an optical system, a vibrator with a slit, a separator of luminous fluxes, made in the form of a prism, two photodetectors, a reference converter and a computing unit flj.

The disadvantage of such a photoelectric microscope is the impossibility of measuring in two mutually perpendicular directions caused by the use of a prism as a separator of light fluxes.

The closest to the proposed invention in its technical essence is a photoelectric microscope containing an adviser arranged successively along its rays, an optical system, a vibrator with a slit diagram, a light beam splitter and a reading transducer with a compressor and a recording unit 2 1.

A disadvantage of the known photoelectric microscope is the complexity of the design of the light beam separator, which requires precise and time-consuming adjustments in operation.

1The invention of the invention is to simplify the construction and increase the measurement accuracy.

For this purpose, the light flux separator is designed as a lens, in the front focus of which there is an aperture, its slit contour is similar to the line fngurs made to the object, and the illuminator with a mirror stripe placed in the rear focus of the lens.

. FIG. Figure 1 shows the optical layout of the photoelectric microscope; in fig. 2 - diagram of the registration unit G

The microscope holds the illuminator 1, the optical system that includes the capacitor 2, the translucent mirror 3, the lens 4, the compensator 5 in the form of a glass plate, the slit aperture 6, the lens 7, the beam splitter of the light passing through the slits of the diaphragm 6, photo light 9 n 1O, Electr om 1G11ktnyD b1 "BRYTI 11 | On the plate of which there is a fixed 6, a photoelectric reading 1: Formation: 12, aptronic counters 13 and 14, phase-sensitive amplifiers 15 and 16, executive zero-organs 17 and 18, information processing block 19, block 2O of registration. Photoelectric microscope works & duyishm way. The microscope is focused on the measured volume 21, installed at the measuring position. Rays of light reflected from the measured object 21 fall into the lens 4, giving an image of the scratches of the bar figures, .Hanpifmer, squares plotted on the object, in the plane of the images where the diaphragm is located 6. The slotted contours on the diaphragm 6 are similar in shape to the dashed figures applied on the object in size differing from the latter on O, 01 - 0.1 mm. The diaphragm 6 / is fixed at the end of the 5th range of the electromagnetic vibrator 11, therefore, it scans with an amplitude jA of a sinusoidal law. To ensure the sensitivity of the microscope to the movement of all the sides of the dashed square, the axis of the electromagnetic vibrator 11 is inclined by angle B. Moving images of scratches is performed by turning the glass plate to compensate) 5 for the angle of the PC with the aid of a photoelectric reference converter 12, and from which various electronic meters go to different electronic counters 13 and 14 (Fig. 2). . These counters are controlled by pulses and generated by phase-sensitive amplifiers 15 and 16, operating from signals received from the fsp-receiver 9 and 1O. Lens 7 gives an enlarged image of the slit diaphragm 6 in the zone of division of the light fluxes into the corresponding photomultipliers.

The beams of light that go through the channel U pass a beam splitter 8 light beams directly and fall on the photo-photo1.1nnk U.45

The beams of light going through the channel X are reflected from the mirror strips deposited on the hypotenuse plane of the beam splitter 8 and fall on the photodetector 9.

a mirror stripe, spreading out in the back focus of the lens ..

Sources of information taken into account in the examination:

1. Voroshkyu L.I. F from an Oelectrically Contra System of Linear Magnitudes. M., Mechanical Engineering, 1965,.

2. Authors certificate of the USSR N 363859, cl. 6 OGV 7/16, 197О. A counter converter (receiver 12, turning the plate of the compensator 5, converts linear mixes of the image of strokes into the number of electrical impulses transmitted to electronic counters 13 and 14 only while their inputs are opened with effective zero-amplifiers 17 and 18 of phase-sensitive amplifiers 15 and 18, for which the phototransmitters 9 and 1O are included. Zero-organs 17 and 18 work so that when sighting the first risks the counter enters, and when the second risks end, it closes, so the counts are deposited on the counters Evolution of the distance between the risks. The indicated number of pulses is then passed to the processing unit 19, where, by comparison with the initial (zero) MB, the measurement of the deformation is determined. After processing, the information is fed to the registration unit 20 Formula of the invention Photoelectric a microscope for measuring the deformations of solids simultaneously in two mutually perpendicular directions, containing an illuminator, located sequentially along its course and optical system, a vibrator, a separator of light flows a photo transducer and a reading transducer with a compensator and a registration unit, characterized in that, with a simplified design and improved measurement, the separator of light potentials is made in the form of a lens, in the front f (there is a diaphragm with a slit contour similar to the front panel) , performed on the object, and light is 7 in m / fo (y)