SU511594A1 - Digital machine for controlling electron beam microprocessing processes - Google Patents

Description

one

The invention relates to computing and can be used for the automated control of the production processes of components of integrated circuits based on electronic technology.

Digital machines used for controlling electron-beam installations are known, which include a transmitter unit, a storage device, a control unit, a memory storage unit, ycipofity, an impulse control unit, connected to the code bus and to the buses of the coordinate table, a control unit for the coordinate table, a co-ordinate table, a code bus and to the buses of the 1-axis signal, a control unit for the coordinate table, a co-ordinate table, a code bus and to the buses of a 1-pin signal, a control unit for the co-ordination of the coordinate table, a code bus and to the buses of a 1-pin signal, a control unit for the co-ordination of the coordinate table, a code bus and to the buses of a 1-channel signal, a control unit for the co-ordination of the coordinate table, and connected by a two-way communication with the computing unit and with the first control output and information input of the machine, the unit combining the coordinate axes connected to the PCB to the second information input machines and connected. two-sided. they are connected with the computing unit, the control output of which is connected to the second control output of the machine, the deviation shaping unit, the output of the

Topoi o is connected to the third control output of the machine, a block of angular transformations of images, connected to the code bus, to the output of the block combining the axes of coordinates and to the input of the block--rmiroВvini deviations.

With joint combining of combining blocks and angular npeo6paaoBaibn1, fragments of the topology of integrated circuits are obtained by transforming some initial pattern. So, for example, it is possible to dry the rotation of images by an angle multiple of P, ppk l JItyp

transform or linear source and transformed 1 isik (li,

However, in a number of cases with waxing. The maintenance of topological drawings of integrated circuits requires an expansion of the size of the entire pattern or its fragments. The lack of an automatic scaling of the porochno-programmed tsuikpiruet leads to a decrease (PP efficiency, due to the need for a mt.t. rotation Mp iipi1p; 1m) 1) | d 1il and wolicekki time 11roi ;. H.; D11to.n1 n:;.) trula associated with 11:) DGitoik1 software programs, media, wire;) - which iiporpaMMiji and nspr / spennem errors. K) In addition, the introduction of the aononiniTenbm ix of the prpfiMM into us leads to its overload and the stirring of the infarantine Capacity. The purpose of the invention is to increase the effect ((Cake "publicity)" of the target system. This is achieved due to the fact that the image scaling unit is inserted into the map, the inputs of which are connected to the information output of the aanoMHuaiomei device buffer and the control outputs of the control unit and the computer block, the output is connected to the code bus. The drawing shows the machine schematic, the Qi4) machine for controlling electron-beam microprocessing processes, consisting of the transmitter of transmitter 1, designed to input programs from the top nty; a memory device 2 for storing programs; control unit 3, p1-) intended to distribute information between blocks, as well as control the interaction of blocks of the buffer storage device 4 for storing the current information; computational block 5, calculating the increments of the coordinates of the next points of the trajectory, as well as forming the time parameters of the processing of the block of 6 alignment of the coordinate axes intended for linear displacement of images in order to compensate for the error of the origin of the coordinates or from the target of the pattern within the processing area according to the program the number of steps; block 7 angular transformations of images intended for a mirror image. display specified by the program ri-. scoop or rotate it by an angle of a multiple of the deflection generating unit 8, which converts the digital coordinate values into a control action for setting the beam at a given point of the working surface; a drive table 9 for controlling the drives of the coordinate table assigned to shift the treatment area by a predetermined distance; block 10 of the zoom pattern. Block 3 has. two-way communication of the exchange of control information ;; rmash-1 with block 1 of the ranmitter 1 over tires 1 zag (omin 1CIM device 2 - over tires 12 and 1; -.,. Usage of uH (| iOpN rUUii into block M) rasmioots on pshne 1. .i with a signal, a broken block, 3. Dl) br; pts (; nor to bu (|) ern:, 1st) apo;.) 1nomnum three (: two 4 block 3 connected with it shinzy 14 sigms Read and bus 5 signals SEZPIS. The exchange of control information by block 3 and computing block 5 takes place at 16 and 17. The exchange of numerical information between machine blocks occurs through the code line 18.18 2 Zooming is done according to 1 19, connecting lok 5 to 1O block, while the numerical information goes to block 1O from bu (5) of the power storage device 4 via bus 2O. To control the movement of a table's coordinate, block 5 has a two-branch line. in conjunction with 2121 with blesh 9, and to control iiepeMemenneN of the electron beam through bus 22 and 22 with block 6. From the output of block 6, the current value codes for the coordinates of 1 and 23 g go to block 7, from the output of which they are after angular irpe- formations on the bus 24 are transmitted to the block 8 deviations. In addition, the drawing shows tires 25 of regulatory actions, to which an eth- í-inclination system of an elec- tron-beam installation is supposed; bus 26 for connecting block 6 to sensors of signals from core characters; Ishna 27 blanking signals modulating the beam current; acceleration control voltage 28; insha control current beam; 30 coordinate table drives; bus 31 driving the table rotation drive. The bus 32 in block 9 receives signals from the sensors of the table. A work program consisting of individual commands is led from a punched tape into the memory 2, the complex pattern of the integrated circuit is composed of individual elementary geometric figures (for example, a circle, a sloped section, a trapezoidal platform, a rectangular raster, etc.), each of which one is produced per team. At the same time, the command indicates the shape of the figure, the coordinates of the control points (the starting and ending 1st processing points X, Y, X and Y), as well as the parametric values Nkft (X, Y), which characterize, for example ;.); the projections of the inclined line or the radius of the circle on the axis of the coo | :: 1dag, the pitch is MULTIPLICER and Dr, depending on Bli. d ijjfrypbi. P,), and reproduction of the figure.) Point mode of the pistr.ppsch mode, all of which are intermediate: the PEP points are replayed by the remote control unit 5. In addition to the geometric information about the figures, the command also contains information about the energy and time of the first processing modes, as well as the displacement of the coordinate table, linear, angular or scale transformation of the original topology drawing, Computing unit 5, according to a given program, generates control signals that define the time and energy parameters of the beam, as well as act on the deflecting system of an electron-beam installation. At the same time, on the substrate installed in the vacuum chamber on the coordinate table, within the deflection area, the specified figures are processed. After completion of processing within this area, block 5 generates control signals for movement of a cooper table, which, through block 9, affects the table electric drives. The displacement of the coordinate table is monitored with the help of position sensors of the table, the output signals of which are fed to block 9 via bus 32. Repeated processing of the nodae substrate for displacing the coordinate table is carried out with preliminary correction of the position of the origin of processing coordinates with respect to. the origin of the deviating system. The accuracy of the installation of the axes is determined by the result of the search by the beam of the marker markers, marked during the initial processing of the substrate. The calculation of the error is carried out by the joint operation of blocks 5 and 6 when the last signal from the tokens arrives at the bus 26 input. The calculated error value over the bus 22 is transmitted to the batch block and is later implemented when the substrate is reprocessed. in the given values of the coordinates, as well as in the pattern formed by changing the scale of the original. In the latter case, in block 5, the values of the scale factors M and M are brought over by bus 16 from block 3 to block 5. Commands of Xy for working out elementary geometric shapes, the scales of which must be changed, are supplied with appropriate orders. Before working out the next such shape, an operation is performed to multiply the quantities characterizing the geometrical parameters by the corresponding M: ici; i db coefficients. The reference to the buffer zipommunity device 4 via bus 14 is sequentially excited on bus 20 digital values of the coordinates of the reference points X, Y, X, Y and parmet. Xc YV, which enter block 10 when the control signals are generated via bus 13. Under the influence of the signals on bus 19 produced by block 5, block 10 changes the indicated values to MacujTa6nbie. The converted values of the values for the code fields 18, -, and 18 are entered into the 8D buffer memory 4 when the corresponding signals are generated on the bus 15. Subsequently, the values are realized in block 5 when constructing the transformed pattern. The increments of trajectory coordinates calculated by block 5 via bus 22 are accessed (, B are block 6, which corrects the coordinate value by the previously calculated error value and also performs linear coordinate transformation depending on the code on bus 18. ... The codes of the current, coordinate values from the output of block 6, via bus 23, go to block 7, which performs transformations, resulting in the output of its current values of the coordinates rotated relative to the original ones. In accordance with the specified modification of the command of the turn command. The current coordinate values, expressed in digital form, are transmitted via the bus 24 to block 8, which converts them into control actions that arrive on the tires 25 and 25 to the deflection system; an Electron beam unit 1 moves the beam to the next point on the working surface. The block-5 generates the time and energy parameters of the beam's action on the material, generating on the tires 27, 28 and 29 the control signals of the modulator and the power-electronic power supply device. installation. The sequence of the calculations: the coordinate calculation and processing cycles continue until the end and reproduction of the transformed topology of the integrated circuit. The introduction of the image scale changer into the machine allows it to be multiplied with the required and scale transformations initially; Use the large scale factors for

The abscissa and ordinate for individual fragments of the topological pattern can be "randomly" changed its composition, compiled a new pattern from the programs stored in the memory of the machine. As a result, laborious work is eliminated, associated with reprogramming, program carrier preparation and testing of a new program. In addition, the amount of memory required to store a program of a complex topological pattern is reduced, since one command to perform scale transformations is the total for the data set.

Claims (1)

Invention Formula The cpu machine for controlling the npoueci electron microprocessing themselves, containing a trasmitter bus, a storage device, a control unit, a buffer storage device, and a computing unit connected to. to the code bus and to the control signal busses; the control unit of the drives of the coordinated table, connected by two-way communications. with the computational unit and with the first control output and the information input of the mashina, the alignment unit of the coordinate axes connected to the code terminal, c. The informational input of the site f. connected with a computer unit, the control output of which is connected to the second control output of the mask, a deviation shaping unit whose output is connected to the third control output of the machine, a block of angular image transformations connected to the code strip to the output the block of alignment of the axes of coordinates and to the input of the block for the formation of deviations, about t l and so that, in order to increase the efficiency of the work, a block of changing the image heading, the inputs of which are connected respectively to and The output terminal of the buffer terminal of the device 1 and the control outputs of the control unit and the computing unit, the output ps5d is connected to the code bus.