SU428477A1 - SOURCE OF IONOVA P T “JtfSfjnOTsiidiluiLriys - Google Patents

Description

INSULATION refers to devices for obtaining. I intense full beams in a vacuum, Which can be used for spraying foam, in an acceleration: This is the technical i for marketing. Exposure sources based on (.-Compressed (hontraged) discharge with co-plasma plasma generation in the constriction area. In these sources, extraction is performed from the anode side of the focusing orifice using an extraction electrode located behind the co-section of the junction of the junction hole of the junction hole of the junction hole. electrode. This requires very precise alignment of the anode orifice and the intermediate electrode, which is one of the drawbacks of this type of source.

In order to increase efficiency and simplify and assemble the source, the thermal cathode is located IB space. Between the MiH pole: magnetic system, and the extraction electrode are located outside of the indicated spacer from different sides, and the channel in the intermediate electrode is made in a rotating shape facing to the anode.

The imp is a diagram of the ion source.

It contains a tungsten thermal cathode / in the form of a Ring, a ferromagnetic intermediate electrode 2 in the form of a hollow cone facing the cathode, a conical anode S with a hole

for gas inlet, the ferromagnetic pole Hbiit ikompakeik 4, which is one of the cathode leads, the cathode 5 from the magnetized material, the coil 6 — and the magnetic core 7, the accelerating electrode 8, insulators 9 and the housing 10. Electrodes are equipped with a cavity D. //.

Hermetizats.i between the source electrodes and isolator torsgmi 9 B form of ceramic rings

This is done by simultaneously compressing all the seals. The 1 rings of the casing 10. The sealing rings between the electrodes. And 2 and 5, 5 4 are simultaneously nzol rotor. In this HjiSKoro voltage with these and electrodes. The co-ordinate inaccuracy protects the insulators from sputtering from the cathode. The location of the cathode between the poles of the electromagnet allows the ions to be pulled out from the cathode side of the discharge narrowing.

The proposed nstochik works as follows.

When applying a pair of cathodes to the electrodes 4, 5 and a positive potential

with respect to the cathode on the electrodes 2, 3, an auxiliary discharge is ignited between the thermal cathode /. and prome} K} with the exact electrode .2, which, due to the limitation of current in the circuit of the electrode 2, is transferred through the channel to

Etool electrode and: and the anode 3. In the channel

a plasma clot forms, separated by a double electrostatic layer from the rest of the plasma on the cathode side of the Kaiala. The shape of the channel in the form of a thief facing the “anode” reduces the radius of curvature of the double electrostatic layer, and a weak magnetic field with a minimum of intensity on the discharge axis causes the dual electrostatic layer in the axial region to become concave and focus the ions, accelerated in a double electrostatic layer in the direction of the outlet in the electrode 4. In addition, a magnetic field having a transverse component with an electric field of the adode leads to an increase in the electron path length a constriction in the area due to their cycloidal motion.

Ions are taken with a developed plasma boundary that penetrates from the discharge through the hole in electrode 4: into a special expansion using an accelerating electrode 5.

The invention The ion source containing a thermal cathode, an intermediate electrode with a channel, an anode that removes an electrode and a magnetic system is recognized because, in order to increase efficiency and simplify source assembly, said thermal cathode is located in the space between the poles of the magnetic system, and the anode and the extracting the electrode is located outside the specified space from different sides, with the channel in the intermediate electrode made in the form of a funnel facing the anode.