SU421957A1 - MULTICHANNEL DEVICE FOR MONITORING THE PARAMETERS OF SEMICONDUCTOR DEVICES - Google Patents

Description

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A device is known for monitoring the parameters of semiconductor devices, however, it is very difficult and, when executed by its multi-channel, has low accuracy and reliability.

The purpose of the invention is to improve the accuracy and reliability of the device.

The goal is achieved by the fact that in the proposed device the output of the mode setting unit is connected via keys to the address register, the outputs of the keys are combined and connected to the input of the normalizing element whose output is connected to the input of the analog-digital converter and one of the inputs of the measuring unit with an analog-to-digital converter, and the output through logic matching circuits, the number of which is equal to the number of channels of the device associated with the inputs of the display circuit, the second inputs of the matching circuits are connected to regis the rub address, the output of the control circuit is connected to a memory, an analog-to-digital converter, a measuring unit and a display circuit.

The drawing shows a block diagram of the proposed device.

The device contains a magnetic storage device (MZU) /, address register 2, analog-digital converter 3, measuring unit 4, control circuit 5, normalizing element 6, mode setting unit 7, display circuit 8, logic circuit 9, 10, keys / /, 12. The number of keys and matching schemes is determined by the number of channels of the device.

The device works as follows. The command received from the control circuit 5, the address register 2, control keys //, 12, alternately connects the measuring

chains of the block of the task mode 7 to the normalizing element 6.

The mode setting block sets the energy mode to the controlled diodes. The normalizing element in the case of control of the reverse current of the diodes is a DC amplifier with a large input resistance, and in the general case, an element that provides the necessary amplitude and power of the switched signals.

From the output of the normalizing element, the voltage is fed to the input of the analog-digital converter 3 and to the input of the measuring unit 4.

The device uses an analog-to-digital converter with reverse conversion in the feedback circuit.

The operation of the device is divided into two cycles. During the first cycle, the monitored signal is converted to digital form and the code is memorized. In the second cycle, the instability of the monitored parameters is monitored. During the first cycle, the voltage that is applied to the input of the analog-digital converter is digitized and, upon command, received from the control circuit, the code is recorded in the MZU at the address specified by the address register 2. Each controlled device has its own address in MZU. After the conversion of all voltages proportional to the monitored parameters of the diodes, and the writing of codes in the MZU, the second cycle of operation of the device begins. In the second cycle, the measuring circuits are connected to measuring unit 4 via a normalizing element; at the same time, the code corresponding to this channel is read from the MSR and is written to the register of the analog-digital converter. After reading the code from the RAM, for further storage, the code is written back from the register to the RAM at the same address. The converted code in analog form is fed to another input of the measuring unit, which determines the magnitude and sign of the change in the monitored parameter and, when the drift value exceeds a certain given value, outputs a signal to match 9, 10 logic circuits, to which the address outputs of the address register are connected to other inputs. If there is a signal at both inputs of the coincidence circuit, the latter outputs a signal to the display circuit. The display circuit has the property of memorization and has a quantity of cells equal to the number of channels of the device. For a specified period of time there is a multiple comparison of the stored parameter values of each diode with the current one. The time between adjacent comparisons in one channel is determined by the number of channels and the speed of the elements included in the device. The control circuit 5 synchronizes the operation of the device as a whole, both with a small and with a long exposure time. Multi-channel device for monitoring parameters of semiconductor devices, for example, reverse current, containing mode setting unit, memory element, memory device, address register, analog-to-digital converter, control circuit, keys , the number of which is equal to the number of measurement channels, and the display circuit, characterized in that, in order to improve the accuracy and reliability of measurements, the output of the mode setting block is connected via keys to the address register, the outputs of the keys are combined and connected to the normal input element whose output is connected to the input of the analog-to-digital converter and one of the inputs of the measuring unit, the other input connected to the analog-digital converter, and the output through the coincidence logic, the number of which is equal to the number of channels of the device connected to the inputs of the display circuit, the second inputs of the matching circuits are connected to the address register, the output of the control circuit is connected to a memory device, an analog-digital converter, a measuring unit and a display circuit.