SU294544A1 - - Google Patents
Info
- Publication number
- SU294544A1 SU294544A1 SU1330320A SU1330320A SU294544A1 SU 294544 A1 SU294544 A1 SU 294544A1 SU 1330320 A SU1330320 A SU 1330320A SU 1330320 A SU1330320 A SU 1330320A SU 294544 A1 SU294544 A1 SU 294544A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- dielectric
- electrodes
- parallel
- coaxial
- vacuum
- Prior art date
Links
- 239000010408 film Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000010410 layer Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU1330320A SU294544A1 (enrdf_load_stackoverflow) | 1969-05-19 | 1969-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU1330320A SU294544A1 (enrdf_load_stackoverflow) | 1969-05-19 | 1969-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU294544A1 true SU294544A1 (enrdf_load_stackoverflow) | 1974-04-15 |
Family
ID=20445744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU1330320A SU294544A1 (enrdf_load_stackoverflow) | 1969-05-19 | 1969-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU294544A1 (enrdf_load_stackoverflow) |
-
1969
- 1969-05-19 SU SU1330320A patent/SU294544A1/ru active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Davidse et al. | Dielectric thin films through rf sputtering | |
| US3318790A (en) | Production of thin organic polymer by screened glow discharge | |
| Vossen | Glow discharge phenomena in plasma etching and plasma deposition | |
| US4382100A (en) | Application of a layer of carbonaceous material to a surface | |
| US4863756A (en) | Method and equipment for coating substrates by means of a plasma discharge using a system of magnets to confine the plasma | |
| US6066826A (en) | Apparatus for plasma treatment of moving webs | |
| US3297465A (en) | Method for producing organic plasma and for depositing polymer films | |
| US3661761A (en) | Rf sputtering apparatus for promoting resputtering of film during deposition | |
| DE69031629T2 (de) | Niedertemperatur-plasmatechnologie zum korrosionsschutz für stahl | |
| US4444805A (en) | Optical coating | |
| SU294544A1 (enrdf_load_stackoverflow) | ||
| US4803094A (en) | Metallized coating | |
| US4252838A (en) | Glow discharge fabrication of transparent conductive coatings | |
| JP2598342B2 (ja) | 多色表示装置の製造方法 | |
| US3846294A (en) | Method of coating the interior walls of through-holes | |
| JPS5730528A (en) | Vapor-separating member | |
| US3743587A (en) | Method for reactive sputter deposition of phosphosilicate glass | |
| Probyn | Sputtering of insulators in an RF discharge | |
| US3635750A (en) | Photopolymerized copolymer films | |
| US3996884A (en) | Device for processing an organic high molecular weight film | |
| US3966999A (en) | Method of processing an organic high molecular weight film | |
| US3344055A (en) | Apparatus for polymerizing and forming thin continuous films using a glow discharge | |
| JPS56121629A (en) | Film forming method | |
| JPH0149417B2 (enrdf_load_stackoverflow) | ||
| KR950003958B1 (ko) | 플라즈마 화학기상증착에 의한 박막제조방법 |