SU1756138A1 - Micromanipulator drive - Google Patents

Abstract

SUMMARY OF THE INVENTION: In the initial position, the movable link 2 is held by the operated clamps 3 and 4. To move the link 2, for example, to the right by one step, the lock 3 is turned off and power is supplied to the piezocylinder 1, which leads to an increase in its length and diameter .. Thus To move link 2, the radial | a midpoint of the inclined position of the mechanical shvev 5 and 6 and the axial force are simultaneously used and the axial force develops with the same element 1. After displacing link 2, lock 3 is turned off and the fixture 4 is turned off, and then the voltage is removed from the power supply Soil element 1.3 Il ,, ,, ..,.

Description

The invention relates to robotics ;; ke, precision instrument and mechanical engineering.

A micromanipulator drive is known, comprising a case with a piezoceramic vibrator placed in it, consisting of two piezoceramic rods, arranged at an angle to each other and connected to their ends with a moving link (Ed. USSR №960004, class B 7 / 00.1982 ). In piezoelectric elements, pulsed mechanical oscillations are excited, transformed into movement of a moving link due to frictional interaction of piezoelements with it. The device has a low loading capacity and is short-lived due to the friction-jerking nature of the transmission of forces to the moving link.

A well-known mikromanipul torus drive containing a mobile unit with a toothed rack and two prismatic piezoelectric enthe s. lining on the ends mated to the rack. The device provides low accuracy of movement of the movable link due to the presence of preferred discrete positions during fixation due to the use of a toothed rack, and also has a short service life due to wear of the toothed surface of the rack.

Closest to the invention is an AT micromanipulator drive containing located coaxial shaft (moving link) and piezoelectric element in the form of MtvwH), KnpaffvBoppochnymi ends of which are fixed with a clamp, mating with the shaft. the invention is the expansion of technological capabilities by increasing the travel step.

This is achieved by the fact that the micromanipulator drive, which contains a piezoelectric element, the opposite ends of which are connected via controlled locking pins to the moving link, is provided with mechanical links located in a longitudinal direction.

with

WITH

vj

01

SA) CO

plane relative to the axis of the movable link, obliquely to this axis, with one end of each of the mechanical links associated with the piezoelectric element, and the other with a corresponding lock.

The expansion of the technological capabilities of the device is due to the use of the radial force developed by the piezoelectric element simultaneously with the axial force for the additional movement of the moving link.

FIG. Figure 1 shows a variant of the drive of a micromotor with a hollow piezoelectric cylinder with radial polarization as a piezoelectric element; in fig. 2 - the same, with a piezoelectric bag with axial polarization having a through axial bore; in fig. 3 is a geometrical diagram, explaining the operation of the device.

The micromanipulator drive consists (Fig. 1) of a yozezoelement in the form of a hollow piezoceramic cylinder 1 with radial polarization, a movable link 2 coaxially aligned with it in the form of a rigid rod, coupled with controlled clamps 3 and 4 connected to the piezoelectric cylinder 1 by mechanical links 5 and 6, directed obliquely to the axis of the moving link 2, and the angles of inclination of links 5 and 6 are opposite in sign.

In another embodiment of the device design (Fig. 2), a piezoelectric package 7 with a through axial opening was used as a piezoelectric element.

The micromanipulator drive works as follows. In the initial position, the movable link 2 is retained relative to the piezocylinder 1 controlled by fictor 3 and 4. To move the movable link 2 to the right, the lock 3 is turned off and power is supplied to the piezocylinder 1. This increases the length and diameter of the piezocylinder 1, the movable link 2, clamped by the lock 4 associated with the right end of the piezocylinder 1, is moved right by extending the piezocylinder 1 and additionally by converting its diameter change into a linear movement of the fixture 4 and the movable link clamped by it 2 seconds by the force of the tilted links 6 After the piezocylinder 1 reaches the maximum deformation, the clamp 3 is turned on and the clamp 4 is switched off. The voltage from the piezo-cylinder 1 is released. At the same time, its length and diameter are reduced. A decrease in the diameter of the piezocylinder 1 is converted into a linear movement of the clamp 3 and the mobile link 2 clamped in it

using inclined links 5. This is how the use of the reverse stroke of the piezocylinder 1 for the additional displacement of the movable link 2 is carried out.

as the piezocylinder 1 returns to its original state, latch 4 is turned on, latch 3 is turned off, and the whole process is repeated. Moving link 2 to the left is carried out at the reverse

order of connection clamps 3 and 4.

A micromanipulator drive with a hollow piezopacket 7 with axial polarization as a piezoelectric element (Fig. 2) works in a similar way with the only difference being that

by increasing the length of the piezoelectric package 7, its diameter decreases.

The magnitude of the displacement of the mobile link 2 А I when the radius of the piezoelectric element 1 (7) changes by D h (Fig. 3) is determined by

formula

 1 & (-SH ",

where a is the angle of inclination of the links 5 (6) to the longitudinal axis of the movable link 2; h is the distance from the piezoelectric element 1 (7) to the latch 3

(four).

The change in the length L of the piezocylinder 1 under the action of the voltage U applied through its thickness b is expressed by the equation

35

AU d3iUL / b,

where bz1 is the piezomodule in the direction perpendicular to the vector of preliminary polarization.

The change in the radius A h of the piezocylinder 1 is hereby determined by the formula

hi U (d3iR / b + d33 / 2).

where ds3 is the piezomodule in the direction parallel to the vector of pre-polarization.

The change in the length of the piezoelectric package 7 under the action of the voltage U applied through the thickness t of the piezoelectric components

A L dsaUN,

where N is the number of piezo discs. The change in the radius of the piezoelectric package 7 in this case is

Ah7 d3iUR / t.

The invention is illustrated by the following example. Let L be 30 mm, R 20 mm, h 5 mm, a - 20 °, b 2.5 mm, t 1 mm, U 1 kV, d33 - 2. C / m, d3i -1. C / m

For the piezocylinder 1, we get A LI -1.2 µm, A hi -0.7 µm, A h 1.4 µm. Consequently, during one working cycle, the displacement A Ij is performed. A Li + 2 AN 4µm.

For the piezoelectric package 7, we get A L 6 µm, Dg17 -2 µm, And I 5.5 µm. Consequently, during one working cycle, A lЈ A L + 2 A µm is displaced.

Managed latches 3 and 4 can be made using electro

five

rheological fluid, and links 5 and b - in the form of metal membranes.

Claims (1)

Invention Formula A micromanipulator drive containing a piezoelectric element, the opposite ends of which are connected through controlled locks to a moving link, characterized in that, in order to expand technological capabilities, it is equipped with mechanical links located in the longitudinal plane relative to the axis of the moving link, inclined to this axis , with one end of each of the mechanical links associated with the piezoelectric element, and the other with a corresponding lock. fa 2. g phage.Z