SU1743771A1 - Automatic device for wiring of semiconductor instruments - Google Patents

Abstract

The invention relates to the production of semiconductor devices, in particular, to automatic machines for mounting wire interconnects of the contact areas of a housing and an instrument crystal, mainly multilevel, multi-output ICs, LSIs, VLSI with active non-destructive testing. The purpose of the invention is to increase productivity and accuracy, enhanced functionality. The device contains a frame 1, portal, rotary welding head 2, optical-television 10

Description

device E, devices for transporting articles 6.7 with a control unit and single-coordinated drives 10. The welding head 2 and the optical television device 9 are moved between devices for transporting products in a direction perpendicular to the direction of movement of the devices for moving iodipy. The latter are equipped with an additional drive 8 vertical movement of products Drives welding Yuzki and opiko-TV

This device is located on the portal. The control unit may contain reference raster lines 13 and photo heads 12 as feedback to the drives. A device for controlling the quality of welding of the lintel can be installed on the welding head or performed on a welding tool. The goal is achieved by rational use of movable welding head 2 and optical-television device 9 in servicing two workplaces alternately. 2 hp f-ly. 5 il.

The invention relates to the semiconductor devices, in particular, to mobile devices; pressing wire lines (meems) of the contact pads of the coopus and the device crystal mainly consist of multilevel And C, 5 / iC, LLBN of high topographic density, and high quality core texture. with active 100% counterfeg wire interconnects with pulling force

A known automatic installation for attaching wire leads of a semiconductor device, providing a frame with a device for determining the position of contact pgs located on it with respect to the housing leads, connecting devices for wire sheath-1s with drives I, displacement. The X. Y, Z coordinates, a device for transporting semiconductor case packages by a pneumatic unit connected to a control unit, is apt to determine the presence of wire jumpers.

The main drawbacks of the prototype are the impossibility of assembling MHOSG-, multi-output ICs, since it requires an increase (by an order of magnitude) of the working floor, bypassing the working pop optical-television device, and an eye fixedly fixed; it is impossible to control the quality of welding of bridges (the presence of bridges) of ICs of superdense configurations with a large number of leads in several levels and a radial-ray arrangement, so that sensors used are tactile-sensing and tangibly bulky, the inability to provide only 1-2 of the order µm, required when assembling an IC of superdense configurations, since there are no elements that provide feedback of the IC

displacements of these drives by the actuators,

The purpose of the invention is to improve the accuracy and enhance the functionality by eliminating the shortcomings of the dog type.

The goal is achieved by the fact that in an automatic machine containing a frame, a portal, a welding head with a welding tool /: an optical television device, a device for monitoring the quality of a chuck, a device for transporting a product that is installed on the frame, a control unit associated with A welding head, an optical-television-3i iof, rioro equipment, a quality control device for welding peemychki and a device for transmissions 1 /, are available at least as long as the device and The rotor is equipped with an Ic-ral line mainly /, welding tin and an op-tv device are installed with single chorus movement between the flight mouth to transport products in the direction perpendicular to the movement direction of the transportation

/ 13D sec. LI.

The welding station is installed with the possibility of rotation around its axis, and each transport device is equipped with an additional drive for vertical movement of products.

Drives of the welding head and optical-television: -j / systems are located on the main board.

In addition, the control unit of the automaton may contain these raster-like photo and photocopies, and the reference standards are fixed to the fixed parts of the drives, and the photo heads to the moving parts of the drives,

Device for controlling i i. gwa pri-; erki peremo; KL /, can either be set to a welder head, or it can be executed. -A p., Tool.

the drive of this device uses the drive of the welding head or / and the drive of the device for transporting the product.

FIG. 1 shows a wire-wiring machine; in fig. 2 is a positioning scheme, where a and d are loading and unloading positions; b, d - positions of micro welding; c, e — recognition positions; St - direction of movement of the left device for transporting products in positions a, b, c, Ynp. - the same, right in the position of g, d, Hopt. - the same as the optical-television device at position c, Xc. - the same, welding head and control device in position b, in fig. 3 shows node I in FIG. one; in fig. 4 - the same, option; in fig. 5 - quality control scheme for welding jumpers.

The wire-mounting machine contains a frame 1 (Fig. 1) with a lower horizontal surface A and a portal above it having parallel frontal B and rear B parallel surfaces, a rotatable welding head 2 with a welding tool 3 fixed in a holder 4 interacting with a contactless displacement sensor 5, two devices 6 and 7 for transporting products with drives 8 vertical movements, an optical television device 9, with drives 10 mounted on the frame, moving them horizontally from Roethke 11 and feedback devices, each of which is in the form of interacting with each other photo head 12 and the reference raster line 13; The working body 14 for controlling the quality of welding of the jumper to the positioning actuators of this working body 14, the drives of horizontal movements of the actuators are single-axis and arranged in two levels in pairs-parallel in each of them, namely the drives 10 of the transport devices 6 and 7 are fixed on the bottom the horizontal surface A of the frame 1, and the actuators 10 of the rotary welding head 2 and the optical television device 9, respectively, on the surfaces B and C of the portal of the frame 1 with the provision of alternate transverse movements of the carriage 11 carrying the rotary welding head 22 with respect to each of the carriages 11 carrying devices 6 and 7, as well as movements in opposite phase of the carriage 11 carrying the optical television device 9 with respect to each from the carriages 11, carrying devices 6 and 7, while the reference raster rulers

13 are fixed and parallel to the respective actuators 10, the photo heads 12 are fixed on the respective carriages 11, and the working body 14 is either fixed in the holder 4, or made directly on the welding tool 3 itself, the positioning drive of which relative to the device being processed (consisting the head 2, the drive 10 of its horizontal movement, the drive 10 of any of the moving devices 7 and the drive 8 of the vertical movement) is also a drive positioning device This body 14.

The machine works as follows.

A semi-finished product of the semiconductor device to be unwired (a crystal installed in the housing) is installed on the transport device 7 (Fig. 1) in the loading position a (Fig. 2) by an automatic robot arm, then the device is fixed by the arms of the device 7 and the carriage 11 on the left drive 10 moves to the position in (Fig. 2) recognition, above which the optical-television device 9 is located (in the initial position) on the carriage 11 of the corresponding drive 10. Using the drive 8, the vertical movements of the semi-finished product and the block The automaton autofocusing of the optical television device 9 of the technical vision systems, then using drives 10 orthogonal horizontal movements of the carriages 11 carrying the device 6 and the optical television device 9, searches for the reference areas of the topology images, recognizes and calculates the coordinates of the relative position contact pads of the crystal and the housing, at the same time on the right device 7 in the loading position g (Fig. 2) a semi-finished product of the next (second) semiconductor device is installed and at the time of the completion of the technical vision systems, if the second semi-finished product is fixed in the right device 7, both devices 6 and 7 start parallel-opposite movement relative to each other, simultaneously optical television device 9 on its carriage 11, the actuator 10 makes a transverse-counter movement with respect to the right device 7 and they are both set in position e (Fig. 1, 2) at this time the left device 6 is set to position a (figs 1, 2), above which the swivel welding head 2 is in the initial position with the welding tool 3 fixed in the holder 4, is now simultaneously in position e (fig. 1,2)

The technical vision system recognizes and calculates the coordinates of the contact pads of the second semi-finished product, and in position 5 (Fig. 1, 2 (wire installation of the interconnects of the contact pads of the housing and the crystal of the first semi-finished product is carried out) 100% active non-destructive welding quality of the jumper with an external force F (Fig. 5) applied to the bed of the jumper by the working body 14 positioned by the size Ah (Fig, 3, 4, 5). After these operations have been completed, the welding shaft 2 and the optical television / OO., E device 9 start pa alleles are all river movements relative to each other and are set from positions d1 and e (quir, 1, 2), while the right device 7 also starts moving nak to carriage 11 along drive 10 to position e (Figs. 1, 2) , and the left device 6 - first in position a for unloading the first p "zvarenksgo semi-finished product and for loading the third undigested, and then again the position in for recognition, which is simultaneously carried out by the wire. installation of the second semi-finished product on Hz.p. device V from which after razvarkg e

At position 1 (fig. 1, 2), it is unloaded, and a fourth undiluted semi-finished product is installed instead, then arrange 7 on the carriage 11 on the drive 10, move the driver to the position recognized, е 1 (fig. 1,2), but if when active control is detected, a defect is detected, then the semi-finished product is replaced at positions a or d as soon as possible (Figs. 1, 2).

Wire mounting is carried out at the positions of micro welding b and p (fig. 1, 2) with the following oftpasofvi:

Initially, the wire is filled into the capillary opening of tool 3 (Fig. 1, 3.4), providing an excess of prooo / ukm under its working end: according to the available information on the relative position (coordinates) of the crystal cusp and semi-finished instrument body, the tool is installed Above the first welding point, since the carriages 1 I of the drive of the CHO device 6 or 7 along the Y axis and the carriage 11 are simultaneously shifting

2 axis X (if necessary, the welding head also rotates around its axis); the tool 3 descends and performs the first welding, the loading is then evaluated using the sensor 1Z (Figs. 1, 3, 4), then, similarly to the previous, is set above the second welding point,

but

is lowered and performs the second welding, and then the working body (hook) 14 (Fig. 3, 4, 5) is positioned the same (moving the holder 4 of the welding tool

5 3) by the actuators 10 so that it becomes possible to hook the interconnect loop from below (Fig. 5), pull it up, while using the sensor 5 (Fig 1, 3, 4), the strength of the interconnect loop 10 is checked and, if it is satisfactory, the wire mounting process continues, i.e. unwinding of the device is carried out consistently, and if it is unsatisfactory, then the device is rejected, moved to position a or g

15 (FIG. 2) is discharged and a new semi-finished product is loaded in its place.

Recognition is carried out at positions c and e (Figs. 1, 2), while the semifinished product being processed is illuminated with an optical television set of 20 points, the device of the technical viewpoint system, the resulting image of topographic areas, information about their relative position is used to bypass welding points when carrying out wire mounting in positions b and d (fig, 1,2).

In positions b, c, d, and e, the semi-finished product is either a tool or an optical television device positioned in

iu within the working field c (FIG. 2), which bypasses all welding points with a welding tool, and during recognition, obtaining optical accessibility to all elements of the semi-fabric topology of the semiconductor device, and recognizing the processed semi-finished product is positioned by the carriage 11 of the actuator 10 along the V axis and drive 8 along the Z axis (ae focusing) of device 6 or 7. The optical motion control device 9 is moved by the carriage 11 of the actuator 10 along the Y axis, and when analyzing the obtained image of the topology of the semi-finished product cognition technical view system is used

A 4G5 image of a small magnification (for the contact areas of the body, for example, about 2) and a image of a large magnification O1 of the contact pads of the crystal, about 10) transmitted by 50 watts; two channels of two-channel optics TV device 9 on the corresponding target Vidicon sensors 3ioro device 9.

Example, the invention is used in

55 an EM-4240 wire terminal connection machine for installation with quality control in accordance with a & a bit more distinctive. Ј size of the multi-output (up to three hundred conclusions), a multi-level -. (up to n t h levels)

 SB1 / 1C in ceramic housings in pin and planar design of external leads with high topological density on the chip (the pitch between the contact pads on the chip is up to 70 microns).

All actuators of the machine are positioned by carriages with a block of electromagnets of a linear stepping motor (LSHD) on one axis drives, made in the form of an LSHD stator having a gear structure on surfaces interacting with the surfaces of the carriages.

The machine frame consists of two parts: the lower part is made in the form of a slab of gabbrodiabaza (stone), has a horizontal surface on which two drives of working tables are mounted parallel to the Y axis, and the upper part is fixed on the bottom plate and made in the form of a hollow metal casting a box-like portal with front and back surfaces, on which, parallel to the X axis, drives of the welding head and the optical television device are mounted, respectively.

Linear displacement transducers use the BE-164-40 photoelectric model (400 mm stroke) as feedback devices. The tool (hook) for applying a control wire to the wire jumper in order to conduct a 100% active non-destructive testing is performed directly on the side surface of the used KUT 101-40-80 tool (LCM 8.892.027-04) and positioned in the holder of the welding tool fixed on a rotary welding head.

Thus, this device allows to increase the accuracy, expand the functionality of the machine.

Claims (3)

Claims of the invention 1. A wire-mounting machine for semiconductor devices containing a steel, a portal, a welding head, a movable optical television device, a quality control device for welding the web, a device for transporting the product, installed parallel to the bed plane, a control unit associated with the actuators of the welding head and the device for transporting the product, characterized in increase accuracy, enhance functionality, the machine is equipped with at least one additional device for transporting the product, mounted on the frame parallel to the main one, the optical television device is equipped with a drive and installed with the possibility of single-axis movement in the direction perpendicular to the direction of movement transporting the product, the welding head is installed with the possibility of one-coordinate movement in the direction of the normal direction of movement of the device for transporting and rotating around its axis, the device for transporting the product is equipped with an additional movement drive in the direction perpendicular to the plane of the frame, the drives of the device for moving products are located on the frame, and drives of the welding head and the optical-television device are mounted on the portal. 2. Automatic pop. 1, characterized in that the control unit contains reference raster lines and photo heads, the reference raster lines fixed on the portal, and photo heads on movable parts drives, 3.Automat on PP. 1 and 2, characterized in that the device for controlling the quality of welding of the lintel is installed on the welding head or on the tool and kinematically associated with the drive of the welding head or the drive of the device for transporting the product. co h- I- “O w FIG (DU2.5