SU1707089A1 - Device for growing single crystals from melts - Google Patents

Abstract

The invention relates to the technology of semiconductor materials, and more specifically to devices for growing single crystals from the melt, and provides an increase in the stability of the speed of movement of the crystal holder with stretchings of crystal pulling in the order of 0.1 to 10 MM / H. THE DEVICE COMPOSES FROM K5VOpb with a heater and a crucible; a crystal or a crucible with a regulating unit for the power of the heater, a mechanism for extracting a crystal with a sensor for positka-, krn-steel and an adjustable e. RP-drive The difference lies in the rt; m that the METER POSITIONAL CRISTALLSDERA Lei Ebi is filled in the form of two puductives. - their rvi-e- -. one of which is attached to the body guides of the gearbox mechanism. and lgl - on the carriage, and b g ca p p irnc-ph i: .i, connected by t t osprits d., Vr.c i - the input of the rod input cve-n-cf r t, cane. Conjugated g: c R. n ::: - n t .-- ,, .- and guides polirov -: and pls. M .-, 1 a: l measure connected to the mechanism you: g and g .- .g. , through the elastic element. 5 silt with:

Description

The invention relates to a device for growing single crystals from a melt, preferably according to the Czochral method.

The aim of the invention is to increase the stability of the speed of movement of the crystal carrier at crystal drawing rates of from 0.1 to 10 mm / h.

Fig. 1 shows schematically the claimed device with a crucible mass sensor, general view; Fig. 2 illustrates the movement mechanism with the crystal holder position sensor; on fig.Z - the device with the sensor of weight of a crystal, a general view; figure 4 - section aa in figure 2; figure 5 - view B in Fig, 4.

The device comprises a frame 1, a crystallization chamber 2 installed on it with a heater 3 and a crucible 4, a crucible mass sensor 5 4. A mechanism for 6 drawing out a crystal 7 with an adjustable electric drive, including a DC motor 8, for example, DC-1 with a speedometer 9. The semiconductor converter 10 is made, for example, on the base of the Lensy converter UL -... and the registration unit 11, for example, BIN-1I, da1 ,,: the head of the crystal holder; -. done, -. With; mnin. in the form of two inductive rulers 12. o, .. ;; “of which are fixed on a coopus with the directions 13 of the pulling mechanism 6, and е.о, -. i

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about

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on his carriage 14 Diggies 5 mass of the crucible 4 is electrically connected to the cylinder 3 through the control unit 15, the control unit, the heater bridges, the Crystalization chamber 2 is connected to the mechanism B of extracting the crystal through the elastic element 16 made, for example, cuffs of elastic material or strength of the background, etc.

The device can be made with a sensor 17 of the mass of the growing crystal

(fig.Z).

The seal 18 for inserting the rod 19 of the crystal holder into the crystallization chamber 2 is placed in the glass 20 fixed in the Flange 21 of the housing 13 of the mechanism 6 for extracting the crystal using a nut 22 (Fig. 4).

The carriage 14 is housed in the flat Guides of the housing 13 of the Bt mechanism of crystal cleavage (-.) Indication lines and 12 stations 1 of the transmitter and the converter 10 are connected to the motor & adjustable electric drive.

The device operates as follows.

In the cavity of the heater 3 set the crucible 4 C. the original Eestiest. BEU l Mig.-from KRP: Gel-izionsionnchu chamber 2 VK. Esd-ny cooling and to-tgr c. -: yoTs include the mechanism of C et ty; - And I am KS EAST ZLLE 7. From the EYUGO moment N reads the length of the LL-cgo from ..., -. E G 1-kz 11 regis g-fv .. i- - | : n-- not ln ,,. .-g-,, d-- -. i TiJM:

Part 1 of Peg. With carriage; 4 p

.- housing 13 m 5n; - zmz 6 tightening and NPL from in / line lines 12 datn.k. position to the installer of the grid with a discrete length of. 5 µm is applied through the registration unit 11 during the process.

 Discharging into an adjustable electric drive converter 8 The specified speed of the crystal pulling out with the help of the converter “10 which Dt.Hi compares two signals — the fortune telling signature and the signal of the tachogenerator 9., stored on the electric motor 8, if there is a mismatch, the speed of the electric motor 8 is automatically corrected The error in maintaining the draw rate does not exceed ± 0.5%.

To maintain the diameter of the crystal being grown, a crucible 4 mass sensor 5 with a heater power control unit 15 is turned on (in the device operation circuit with a mass control of the growing crystal, the crystal mass sensor 17 is turned on). When a mismatch signal appears in the sensors 5 or 17 of the mass

crystal or crucible with a given program of the heater power control unit 15 changes the power supply mode /. heater 3, thereby changing the temperature in the working

zone, which maintains the constancy of the diameter of the grown crystal.

When a pressure oscillation occurs in a water-cooling system, the double-wall water-cooled crystallization chamber 2 changes its geometrical dimensions (including height) in time with the pressure change of water. Changing the vertical dimensions of the camera can reach 5 mm to 0.8 mm.

The elastic element 16, placed between the crystallization chamber 2 and the flange 21 of the mechanism for stretching the crystal, perceives the size variation

0 crystallization chamber, an obstacle to the periodic non-proclaimed ignition,: the position of the copper holder for the crucible. Thereby stabi- n:. and r u e s draw speed

5 crystal and ps loses the stability of the system: -: its control and system

mind:. :: .- rm-.1.- oegu, irueg.ch. | with electric drive.

Before the re-process i-ristilag. Izetzi.,; Yers5ir aot vkk / smart seal

0: In the input rod 1E cree; - -lizamuyu cam-iDV 2 For ets O stichi bye bye nut 22. s g .-. Wyut cT3vjH 20 and ooi appended O. 1. ...- from Psr. to; - about , - . about. a and about l about t n e and from

5 (. 1 lsg-sleptel to soespe-iBayet .. stability of movement of christians. Lsdrzhtel.

The invention allows for smooth movement of the crystal. +: Atel at

0 speed x 0.1-10 mm / h with an accuracy of maintaining the speed of drawing no more than 0.5%

About About

Claims (2)

1. Equipment for growing .-: a number of mono-5 crystals from the melt, mainly according to the Chohrzlsky method, containing a bed. .-; - nee her crystallization chamber with a heater and crucible, crystal or crucible mass sensors with a block 0 for adjusting the power of the nagzatelch and a crystal extrusion mechanism with a crystal holder position sensor and an adjustable electric actuator, including a housing with guides, a crystallodeter rod, a carriage, and a stem insertion seal into the crystallization chamber, characterized in that. in order to increase the stability of the speed of movement of the crystal carrier at the speed of drawing out crystals of about 0.1-10 mm / h, The position sensor of the crystal holder is made of two inductive rulers, one of which is fixed on the guides of the drawing mechanism, and the other on the carriage, and a recording unit connected to an adjustable electric drive; the frame of the drawing mechanism is fitted with a flange The connecting joint with the cup in which the stem input seal is placed and the mating surfaces of the carriage and the guides are made flat. 2. The device is pop.1. Which differs in that the crystallization chamber is connected to the flange of the mechanism for drawing the crystal through an elastic element. at 9 ° "g 9.  bodfHot ei / ia 9cHut Figz tt Fig1 FIG. five. View 5