SU1626138A1 - Device for measuring characteristics of materials - Google Patents
Device for measuring characteristics of materials Download PDFInfo
- Publication number
- SU1626138A1 SU1626138A1 SU894663735A SU4663735A SU1626138A1 SU 1626138 A1 SU1626138 A1 SU 1626138A1 SU 894663735 A SU894663735 A SU 894663735A SU 4663735 A SU4663735 A SU 4663735A SU 1626138 A1 SU1626138 A1 SU 1626138A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- metal rods
- rods
- segment
- rectangular waveguide
- axis
- Prior art date
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- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Изобретение относитс к контрольно- измерительной СВЧ-технике и может быть использовано в технологических процессах электронной промышленности при контроле электрофизических параметров цилиндрических образцов (ЦО) из полупроводниковых , диэлектрических материалов или их структур. Цель изобретени - повышение локальности измерений ЦО. Устр-во содержит отрезок 1 пр моугольного волновода , в котором расположены источник 2 СВЧ-колебаний, детектор 3 СВЧ-колебаний, два соосных металлических стержн 4 и 5, выполненных с возможностью перемещени вдоль своей оси, с отверсти ми 6 и 7 дл размещени ЦО, а также регистрирующий прибор 10. Дл повышени локальности измерений используетс подвижный ко- роткозамыкающий поршень 8 с пазом 9. Выполнение его с возможностью перемещени на рассто ние от стержней 4 и 5 обеспечивает эффективное взаимодействие СВЧ-пол в отрезке 1 преимущественно с частью ЦО в достаточно малом зазоре, а не с част ми стержней 4 и 5. Следствием этого вл етс сильна зависимость амплитуды сто чей волны и, следовательно, показаний прибора 10 от параметров ЦО. 4 ил.The invention relates to the control and measuring microwave technology and can be used in technological processes of the electronics industry in monitoring the electrical parameters of cylindrical samples (CO) of semiconductor, dielectric materials or their structures. The purpose of the invention is to increase the localization of measurements of the central heating station. The device contains a segment 1 of a rectangular waveguide, in which the source of 2 microwave oscillations is located, a detector of 3 microwave oscillations, two coaxial metal rods 4 and 5, which are movable along its axis, with holes 6 and 7 to accommodate the central heating as well as the registering device 10. To increase the measurement locality, a movable short-circuit piston 8 with a groove 9 is used. Performing it with the possibility of moving from the rods 4 and 5 ensures effective interaction of the microwave field in section 1 advantage But with a part of the central location in a sufficiently small gap, and not with parts of the rods 4 and 5. The consequence of this is a strong dependence of the amplitude of the standing wave and, consequently, the readings of the device 10 on the parameters of the central heating. 4 il.
Description
Фиг. 2FIG. 2
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Фиг.ЗFig.Z
Риг. t Rig. t
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU894663735A SU1626138A1 (en) | 1989-03-16 | 1989-03-16 | Device for measuring characteristics of materials |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU894663735A SU1626138A1 (en) | 1989-03-16 | 1989-03-16 | Device for measuring characteristics of materials |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1626138A1 true SU1626138A1 (en) | 1991-02-07 |
Family
ID=21434763
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU894663735A SU1626138A1 (en) | 1989-03-16 | 1989-03-16 | Device for measuring characteristics of materials |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1626138A1 (en) |
-
1989
- 1989-03-16 SU SU894663735A patent/SU1626138A1/en active
Non-Patent Citations (1)
Title |
---|
Авторское свидетельство СССР N; 788039, кл. G 01 R 27/26, 1980. Авторское свидетельство СССР № 1493939, кл. G 01 N 22/00, 1987. * |
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