SU1533496A1 - METHOD OF MEASURING THE DEFORMATION OF CRYSTALLINE STRUCTURE OF SURFACE LAYERS - Google Patents

METHOD OF MEASURING THE DEFORMATION OF CRYSTALLINE STRUCTURE OF SURFACE LAYERS

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Publication number
SU1533496A1
SU1533496A1 SU4336309/25A SU4336309A SU1533496A1 SU 1533496 A1 SU1533496 A1 SU 1533496A1 SU 4336309/25 A SU4336309/25 A SU 4336309/25A SU 4336309 A SU4336309 A SU 4336309A SU 1533496 A1 SU1533496 A1 SU 1533496A1
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SU
USSR - Soviet Union
Prior art keywords
deformation
sample
measuring
surface layers
ray
Prior art date
Application number
SU4336309/25A
Other languages
Russian (ru)
Inventor
В.В. Аристов
Ю.Н. Ерохин
А.А. Снигирев
А.Ю. Никулин
Original Assignee
Институт проблем технологии микроэлектроники и особочистых материалов АН СССР
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Application filed by Институт проблем технологии микроэлектроники и особочистых материалов АН СССР filed Critical Институт проблем технологии микроэлектроники и особочистых материалов АН СССР
Priority to SU4336309/25A priority Critical patent/SU1533496A1/en
Application granted granted Critical
Publication of SU1533496A1 publication Critical patent/SU1533496A1/en

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Abstract

Способ измерения деформации кристаллической структуры поверхностных слоев в контролируемом образце, включающий измерение угловой зависимости дифрагированной волны многокристальным рентгеновским дифрактометром и определение деформации по этой зависимости, отличающийся тем, что, с целью увеличения чувствительности, изготавливают тестовый образец из того же материала и по технологии, полностью соответствующей контролируемому образцу, деформирующим воздействием на поверхности исследуемого образца формируют периодическую структуру из чередующихся с постоянным периодом из интервала значений от 0,1 мкм до 2 длин экстинкции рентгеновского излучения областей с нарушенной и ненарушенной структурой, определяют деформацию в тестовом образце по интенсивности сателлитных пиков, возникающих при дифракции рентгеновского излучения на периодических нарушениях поверхности, и по ней судят о деформации контролируемого образца.A method for measuring the deformation of the crystal structure of the surface layers in a controlled sample, including measuring the angular dependence of the diffracted wave by a multi-crystal X-ray diffractometer and determining the deformation by this dependence, characterized in that, in order to increase the sensitivity, a test sample is made of the same material and technology fully consistent a controlled sample, a deforming effect on the surface of the sample under study form a periodic structure alternating with a constant period from a range of values from 0.1 μm to 2 x-ray extinction lengths of areas with disturbed and undisturbed structures, determine the strain in the test sample by the intensity of satellite peaks arising from x-ray diffraction on periodic surface irregularities, and judge it about the deformation of the controlled sample.

SU4336309/25A 1987-12-03 1987-12-03 METHOD OF MEASURING THE DEFORMATION OF CRYSTALLINE STRUCTURE OF SURFACE LAYERS SU1533496A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4336309/25A SU1533496A1 (en) 1987-12-03 1987-12-03 METHOD OF MEASURING THE DEFORMATION OF CRYSTALLINE STRUCTURE OF SURFACE LAYERS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4336309/25A SU1533496A1 (en) 1987-12-03 1987-12-03 METHOD OF MEASURING THE DEFORMATION OF CRYSTALLINE STRUCTURE OF SURFACE LAYERS

Publications (1)

Publication Number Publication Date
SU1533496A1 true SU1533496A1 (en) 2000-02-20

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Family Applications (1)

Application Number Title Priority Date Filing Date
SU4336309/25A SU1533496A1 (en) 1987-12-03 1987-12-03 METHOD OF MEASURING THE DEFORMATION OF CRYSTALLINE STRUCTURE OF SURFACE LAYERS

Country Status (1)

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SU (1) SU1533496A1 (en)

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