SU1514998A1 - Suspension vacuum valve with electromechanical actuator - Google Patents

Abstract

This invention relates to switching equipment for vacuum systems with electromechanical controls. The aim of the invention is to increase the reliability of operation by disabling the drive in the extreme positions of the gate from a sharp increase in the moment of resistance. When the shutter closes, the rotation from the actuator 7 is transmitted to the output shaft 14 with the pusher 21, which acts on the roller 19 of the spring-loaded stop 18 and drives the gear wheel 15 and its associated gear sector 6 with the bracket 5 connected to the carrier 3. At the moment of closing the further rotation of the shaft 14 leads to the sliding of the pusher relative to the stop 18 due to the embedding of the roller 19. 1 Cp f-ly, 3 ill.

Description

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The invention relates to switching equipment for vacuum systems with electromechanical controls and is intended for the hermetic shut-off of ultrahigh-vacuum communications.

The aim of the invention is to increase reliability in operation by disabling the drive in the extreme positions of the gate from a sharp increase in the moment of resistance

FIG. 1 shows the shutter, cross section; in fig. 2 is a view A of FIG. 1, with a complex local cut |, showing the connection of the control gear with the output: -the drive shaft. In FIG. 3 - the same in the Open position.

The valve consists of a body with a saddle 1, a gate 2 fixed on the driver 3, which is sealed by an elastic element — bellows .4 and rigidly connected outside the vacuum gate of the valve to the bracket 5, which can rotate in the bearing supports relative to the housing 1 and is equipped with a toothed sector b associated with a gear drive 7. The sealing of the sealing pair is carried out by the axially movable axial disk 8, connected with return springs 9 and tightly attached to the body 1 by flexible elastic links 10. -; . The movement of the disk 8 is controlled by means of an end cam mechanism 11 associated with a gear wheel 12, which through a gear transmission including an intermediate gear wheel 13 (figure 2) is connected with the output shaft 14 of a drive 7 "

The toothed sector b is connected to a gear wheel 15 placed on the output shaft 14 of the drive 7 with the possibility of free rotation relative to it provided by the bearing 16, the gear; the 1st wheel 15 is provided with a groove 17 made in the form of a flat helix and a stop 18 representing a roller 19, spring loaded with a spring 20 with an adjustable amount of compression, and pushed onto the shaft 14 of the drive 7, 21, c; packed up with a protrusion 22, cooperating with the helical groove 17, while the longitudinal groove in the pusher 21 provides the opportunity ei o radial about remescene relative} -3} iri 14. Furthermore, the shutter is provided with kontsegnynn pere1a yuchatel E,

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associated with the control gear 12 and tripping the motor in the Closed and Open positions (not shown).

The shutter works as follows.

When it is closed, the rotation from the electric motor of the drive 7 is transmitted through the reducer to the output shaft 14, which begins to rotate in the direction indicated by the arrow (Fig. 3), and also through the gear wheel 13 to the control gear 12 equipped with a profiled end cam. At the same time, the pusher 21, rotating with the shaft 14, acts on the roller 19 of the spring-loaded stop 18. The force of the spring 20 in the stop 18 transfers the torque required to move the slide gate 2. The force required to move the slide gate 2 to move the gate hole 2. , does not exceed the effort of embedding the roller 19 of the spring stop 18, and the pusher 21, rotating together with the shaft 14, carries the stop 18, the gear wheel 15 rotates and the gear sector 6 associated with it, Rotation of the gear sector 6 leads to rotation the bracket 5 connected to it together with the rigidly attached carrier 3, ensuring that the gate 2 moves to the extreme position Closed. Further movement of the gate 2 is impossible, and the sharply increased moment of resistance to rotation of the gear wheel 15 exceeds the moment for transmission of which the force of the spring 20 at stop 18 is calculated, and further rotation of the output shaft 14 causes the pusher to slip relative to the stop 18 by embedding the roller 19. Continuing rotation the shaft 14 causes a movement of the pusher 21 with respect to the remaining stationary, due to the presence of the bearing 16, a gear wheel 15 provided with a spiral groove 17. In this case, the protrusion 22 of the pusher 21 moves and spiral spiral slot 17, causes the radial movement of the pusher relative to the shaft 14, its removal from the stop 18. The distance between the turns of the spiral is chosen so that the radial movement of the pusher 2I relative to the shaft-14 removes the pusher from engagement with the support 18 during one rotation of the shaft 14 relative to the gear

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15. Further radial movement of the pusher does not affect the operation of the gate,

In contrast to the wheel 15, the rotation of the steering gear 12, as well as the output shaft 14, occurs throughout the entire operation cycle of the gate. The rotation of the gear wheel 12 leads to a relative displacement of the end profiles of the cam mechanism 11. The profile of the end cams of the mechanism 11 should ensure that the clearance gap between the pressure disc 8 and the gate 2 at the stage of blocking the through hole is closed. 12 leads to further displacement of the end profiles of the cam mechanism 11, causing axial movement of the pressure disc 8, which, affecting the gate

2 with a seal, provides sealing valve. In this case, the end switch is activated, turning off the electric motor and fixing the shutter position. Closed.

The opening of the shutter occurs in reverse order. With this, the motor, the shaft 14 with the pusher 21 and the gears 13, 12 rotate in the opposite direction. The offset of the end cams of the mechanism 11 occurs in the direction of decreasing the height of their profile and the pressure disk 8 moves under the action of the return springs 9 in the opposite direction, removing the sealing force from the gate 2, and then forming a guaranteed gap between it and itself. During this period, the gear wheel 15 with a spiral groove 17 remains stationary, and the protrusion 22 of the pusher 21, moving as the pusher with the shaft 14 rotates relative to the wheel 15 along the spiral groove 17 in the opposite direction, moves the pusher along the radius, approaching it to the stop 18. At the time of the occurrence of a guaranteed gap between the disk 8 and the gate 2, the pusher 21 contacts the roller 19 of the stop 18, pulling it behind itself and ensuring the rotation of the gear wheels 15 and sector 6 in the obstructed direction, while the bracket 5 sec. dilom

3 and gate 2 in the extreme position Open. In this case, by analogy with the closing cycle, the possibility of

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the further rotation of the gear wheel 15 and due to the embedding of the roller 19 of the spring-loaded stop 18, the pusher 21 o slips

initial position relative to

the stop 18. At the same time, the end switch associated with the control gear 12 of the switch switches off, which turns off the electric motor and locks the position of the shutter Open.

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The use of the cam mechanism 11, which changes the profile height from the minimum to the maximum per revolution of the gear wheel 12, determines its large diameter required to reduce the power of the drive 7, therefore in most cases the diameter of the control gear 12 in 2 -5 times the diameters of the remaining gears of the drive 7, which makes its output shaft 5 14 multi-turn. This determines the need for the spiral groove 17, which interacts with the protrusion 22 of the pusher 21 to ensure the radial mobility of the latter relative to the shaft 14. The number of turns of the flat helix 17 is determined by the number of revolutions performed by the output shaft 14 of the drive 7.

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Claims (1)

1. An ultrahigh vacuum gate with an electromechanical drive, in the case of which the output drive shaft and gate are mounted, fixed on the carrier, sealed by an elastic element and rigidly connected to the bracket, rotated relative to the cases sealed by an axially movable disk, hermetically connected to the case by elastic links and a cam mechanism controlled through a gear wheel, characterized in that Q that, for the sake of reliability in operation, it is equipped with a pusher mounted on the output shaft of the drive with the possibility of joint rotation, and the bracket is equipped with a gear 1: 5 connected with a gear wheel, which is mounted on the output shaft of the drive with the possibility of free rotation relative to it and provided with a spring-loaded stop, interactions (1tv1 SuffA UP.2 Bu fl thebes