SU1465863A1 - Lighting device for projecting optical printing - Google Patents

Abstract

The invention relates to optical instrumentation and can be used in projection exposure installations for microelectronics. The purpose of the invention is to increase the floor coverage. The image of the entrance face of the light integrator a 4, illuminated by source 1 using collector 2, is transferred by a field lens 6 into the entrance pupil of the objective 9, and then through the objective 14 and the condenser 17 into the entrance pupil of the projection lens. The image of the field diaphragm 5 by the lenses 9, 10 and the condenser 17 is transferred to the plane of the photomask. The light filter 7 with a radial change in transmittance evens out the distribution of illumination. The ratios connecting the focal distances of the lenses 9. and 14 are given, which make it possible to determine the optimal values of the edges of the light integrator at 4 in the form of a rectangular rod. 1s. and 2 z. p. f-ly, 4 ill. (L

Description

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J465863

The invention relates to optical systems and can be used in microelectronics in projection exposure installations.

The purpose of the invention is to increase the floor lighting, as well as adjust the shape and size of the illuminated floor.

FIG. 1 shows a principal jn on the optical scheme of the proposed illuminator; in fig. - light integrator in the form of a rectangular rod; in fig. 3 - the first image

. ”Оц ™ с.ер ™,„ „„ „Ekos., -Ер-, 5 ;;;, bT,: ™:;::; z Bo ° :: o Z ™ K

: s-T.Lrr -: - r.

The illuminator contains a light source 1, for example, a mercury arc lamp, a collector 2 in the form of an ellipsoidal reflector, a heat filter 3, a light integrator 4 made of quartz glass in the form of a direct silica glass 17, consisting of a positive meniscus 18 that is turned to the field diaphragm, and a positive lens 19, made of quartz glass.

The lighter works as follows.

Light from source 1 using collector 2 is focused on the first surface of the rectangular rod 4. Field lens 6 transmits multiplied images of the first surface directly

carbon rod, the end faces of which are refracting, and the lateral faces reflecting, and the edge dimensions are chosen from the relation

diaphragm then they are using a lens 14 and a condenser. 17 is transmitted to the entrance pupil of the projection lens (not shown). The field diaphragm 5 in the form of four orthogonal shutters with automatic adjustment is transmitted using lenses 9 and 14 and the condenser 17 to the plane of the photomask. The heat filter 3 and the bandpass file1, mp 7 are cut out from the spectral radiation of the source 30 operating line of the spectrum.

four

0.01 F, 6 A and O J F A and B 1.5 Aj. 15 A. C 25 A,

a field diaphragm 5 with an automatically changing position of the shutters, located at a distance of Oj-QOS F, 63 0.05 F from the light integrator, a field (collective) lens 6 ,. located next to a field diaphragm, made of quartz glass with a ratio of radii of 1.8: 1, element 7 changes the uniformity of illumination, in the form of a light filter with: radial change of transmission, band-pass filter 8, which transmits the working line of the spectrum, lens 9 with focal length F, consisting of a positive meniscus 10, - facing the concavity to the field diaphragm, a dosing lens 11 and a negative meniscus 12, facing the concavity to the field diaphragm 5, made of quartz glass, aperture diaphragm at 3, disposed behind the lens 9 at a distance L 6 0,05 F, with the lens 14 fokusnm distance F, j,, comprising telnlto negative 15 and positive lens 16.

;;;, bT,: ™:;:; z Bo ° :: o Z ™ K

Quartz glass made of quartz glass 17, consisting of a positive meniscus 18 facing the concavity of the field diaphragm and a positive lens 19 made of quartz glass.

The lighter works as follows.

The light from source 1 using collector 2 is focused on the first surface of the rectangular rod 4. Field lens 6 transmits the multiplied images of the first surface directly: s-T .Lrr -: - r.

diaphragm then they are using a lens 14 and a condenser. 17 is transmitted to the entrance pupil of the projection lens (not shown). The field diaphragm 5 in the form of four orthogonal shutters with automatic adjustment is transmitted using lenses 9 and 14 and the condenser 17 to the plane of the photomask. The heat filter 3 and the bandpass file1, mp 7 are cut out from the spectral radiation of the source 30 operating line of the spectrum.

The beam of rays incident on the input refracting edge of the rod is divided into parts by angle, each of which undergoes a different sequence and number of reflections from the side faces a, b, c, d in the meridional and sagittal sections of the beam. .Each of the beam parts forms an imaginary image on the input refracting-Q edge of the rod. The combination of imaginary images is a multiplied image of the input face. Each secondary image creates its own intrinsic illumination distribution on the output breaking edge of the rod. Summation of all secondary sources leads to a uniform distribution of illumination on the output refracting surface of the rod. The tolerance of light uniformity depends on the ratio a: b; from the size of the edges of the glass rod. FIG. 3, inside each rectangle, faces are indicated, the reflection from which leads to illumination of this area. For example, the designation a, b means that the illumination of this section of the field is emitted by radiation, first reflected from the face a, and then from the face b.

The application of the proposed illuminator makes it possible to uniformly illuminate the jpasMepoM 140 100 mm field,

Invention Formula

Claims (3)

1, A projection optical illuminator comprising a light source, a collector, a light integrator, a field lens, a light filter with a radial change in transmittance, a condenser and an aperture diaphragm, which, in order to increase the field of illumination, between the light filter with a radial change in factor the transmission and the condenser are equipped with two lenses, a field diaphragm is installed between the light integrator and the field lens, and the aperture diaphragm is placed between the first and second lenses, This light integrator is made in the form of a rectangular rod, on the side faces of which a reflective coating is applied. 2, the Illuminator according to claim 1, characterized in that the distance between the field lens and the first lens is equal to 0.4 F, the distance between the aperture stop and the second lens is 0.28 F, the distance between the first lens and the field stop does not exceed 0.05 F, the distance between the light integrator and the field diaphragm is not less than 0.005 F and not more than 0.05 F; the focal lengths of the first F and second F objectives satisfy the relation 15 2 F  F 64 f and the lengths of the edges A, B, C of the light integrator satisfy the relations 0.01 7, A O, 1 F,; A B 1.5 A; 15 F C 6 25 A. 25 3. The illuminator according to claim 1, characterized in that, in order to adjust the shape and size of the illuminated floor, the field diaphragm is made in the form of four orthogonal movable shutters, each of which is driven. / AT  / / / / / / ff FIG. 2 Fig.Z vs  -60 -And -fTWWTo th th 30 4o fo so  4 CMN