SU1450665A1 - METHOD OF CREATING SMALL N-P TRANSITIONS AND CONTACT TO THEM - Google Patents
METHOD OF CREATING SMALL N-P TRANSITIONS AND CONTACT TO THEMInfo
- Publication number
- SU1450665A1 SU1450665A1 SU3996157/25A SU3996157A SU1450665A1 SU 1450665 A1 SU1450665 A1 SU 1450665A1 SU 3996157/25 A SU3996157/25 A SU 3996157/25A SU 3996157 A SU3996157 A SU 3996157A SU 1450665 A1 SU1450665 A1 SU 1450665A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- creating small
- transitions
- contact
- silicide
- coating
- Prior art date
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
Способ создания мелких n-p-переходов и контактов к ним, включающий операции ионного легирования, термообработки и нанесения покрытия из силицидообразующего металла, отличающийся тем, что, с целью повышения выхода годных за счет устранения опасности проплавления n-слоя при уменьшении его толщины, в качестве силицидообразующего используют металл, обладающий величиной электроотрицательности, Х, удовлетворяющей условию: Х> Х> X, где Х- электроотрицательный легирующей примеси, X- электроотрицательность кремния, а термообработку проводят после нанесения покрытия из силицидообразующего металла при 550-1100 К в течение 15-45 мин.A method of creating small np-junctions and contacts to them, including the operation of ionic alloying, heat treatment and coating of a silicide-forming metal, characterized in that, in order to increase the yield by eliminating the danger of penetration of the n-layer while reducing its thickness use a metal having an electronegativity value, X, satisfying the condition: X> X> X, where X is an electronegative dopant, X is the electronegativity of silicon, and heat treatment is carried out after coating of silicide-forming metal at 550-1100 K for 15-45 minutes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU3996157/25A SU1450665A1 (en) | 1985-12-20 | 1985-12-20 | METHOD OF CREATING SMALL N-P TRANSITIONS AND CONTACT TO THEM |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU3996157/25A SU1450665A1 (en) | 1985-12-20 | 1985-12-20 | METHOD OF CREATING SMALL N-P TRANSITIONS AND CONTACT TO THEM |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1450665A1 true SU1450665A1 (en) | 1999-11-10 |
Family
ID=60536276
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU3996157/25A SU1450665A1 (en) | 1985-12-20 | 1985-12-20 | METHOD OF CREATING SMALL N-P TRANSITIONS AND CONTACT TO THEM |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1450665A1 (en) |
-
1985
- 1985-12-20 SU SU3996157/25A patent/SU1450665A1/en active
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