SU1401159A1 - Lubrication system of rotor supports of turbomolecular vacuum pump - Google Patents

Abstract

The invention relates to designs of turbomolecular pumps having liquid lubricated rotor bearings. The purpose of the invention is to increase the reliability of lubrication of the supports by adjusting the supply of oil to them. In the oil bath 1, a vertical tube 2 is placed along the axis of the pump, the upper end of which is located in the axial channel of the rotor shaft with a gap. At the bottom of the bath 1, an adjustable gas supply device 6 is installed on the outside. The capillary tube 7 communicates with the device 6 and is coaxially placed in the tube 2. The upper end of the capillary is located above the holes 8 made in the tube 2 in the zone of the bottom of the bath 1. Air flow control through the device 6 it allows to regulate the flow of oil to the supports and thereby increase the reliability of lubrication of the supports of the rotor shaft. 2 Il.

Description

(ABOUT

sd

with

fPu s.2

The invention relates to vacuum technology, in particular, to designs of turbomolecular pumps having liquid lubrication of rotor bearings.

The purpose of the invention is to increase the reliability of lubrication of the supports by adjusting the supply of oil to them.

FIG. I shows the turbomolecule ry pump, longitudinal section; in fig. 2 - the bottom of an oil bath with a tube and a caliber; node I in FIG. one.

The lubrication system of the rotor supports of the turbomolecular vacuum pump contains an oil bath 1 and a vertical tube 2 placed along it along the pump axis, the upper end of which is located in the axial channel 3 of the shaft 4 of the rotor 5 with a gap. In addition, the system contains an adjustable gas supply device 6 mounted on the bottom of the oil bath 1 on the outside, and a capillary tube 7 communicated with the device 6 and placed coaxially in the vertical tube 2. The tube 2 in the zone of the bottom of the oil bath 1 is equipped holes 8, and the upper end of the capillary 7 is located above the holes 8.

The system works as follows.

When the rotor 5 rotates and air flows into the capillary tube 7 through the device 6 and the tube 2, a bubble of air forms under the capillary 1, which, increasing in Volume, covers the entire cross section of tube 2 and. Lift up to the upper end of the tube 2, pushing a portion of the oil out of it into the channel 3 of the shaft 4.

1

five

50

jQ

five

The oil fills the gap between the tube 2 and the wall of the channel 3 and, due to the effect of centrifugation, rises along the wall of the channel 3, going to the supports.

The next bubble pushes the next batch of oil, etc. The waste oil flows into the bath 1 and through the holes 8 enters the capillary 7 and again participates in the lubrication of the supports.

Regulation of the amount of air flow through the device 6 allows to regulate the flow of oil to the supports and thereby increase the reliability of lubricating the supports of the rotor shaft.

Claims (1)

Invention Formula The lubrication system of the rotor supports of the turbomolecular vacuum pump contains an oil bath and a vertical tube placed along the pump axis, the upper end of which is located in the axial channel of the rotor shaft with a gap that is different in order to increase the reliability of lubrication of the supports by regulating the supply of oil to them, the system further comprises an adjustable gas supply device installed on the bottom of the oil bath from the outside, and a capillary tube communicated with the adjustable gas filling device and coaxially accommodating The tube is located in the vertical tube, and the last in the zone of the bottom of the oil bath is provided with openings, and the upper end of the capillary is located above the openings.