SU1385900A1 - Method and apparatus for ion beam production - Google Patents

Abstract

The invention relates to a technique for producing streams of charged particles and may find application in ion implantation, doping, and the deposition of films and coatings. The aim of the invention is to increase the CGS of the ion source, the density of the ionic current and the cross section of the ion beam. The target surface is affected by laser radiation, whose power is equal to the critical evaporation power of the target material, in which heat loss due to thermal conductivity is negligible. The jet of evaporated substance propagating through holes in a row of flat electrodes towards the laser beam is ionized by an additional discharge between the tube and electrodes. The extraction of ions from the plasma is carried out by applying a voltage to the electrodes of an accelerating system, the planes of which are perpendicular to the electrodes of the drawing system and parallel to the optical axis, 2 s.p. f-ly, 1 silt, -. - e to a

Description

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The invention relates to the field of technical physics will help to be used for the implementation of various technical processes such as alloying of metal surfaces and semiconductors, for applying surface coatings for passivating metal surfaces, etc.

The aim of the invention is to increase the efficiency of the ion source, increase the ion current density and the cross-sectional area of the ion beam.

The drawing shows the ion source

The vacuum chamber 1 of the ion source 15 is due to the fact that, in order to

 Tests of the source showed that in the discharge the density of the particles is realized, providing a non-current current density of more than tOO mA / cm.

Claims (2)

1. A method of producing an ion beam, which includes the effect of a focused pulsed laser radiation on a solid surface, the extraction and formation of an ion beam by an electrostatic field, O TL and Holds the target tube 2 with a stripped working substance; an optical window of 3 liters of focused pulsed laser radiation is positioned opposite the coordinate. On the axis of the Optical window and the target tube, there are electrodes A with a hole between them, the solid-state target is pressed into a metal tube to a depth of five tube diameters, and its walls contribute to the formation of a vapor stream of the working substance. The focusing lens 5 and the laser 6 are also located on the optical axis outside the vacuum chamber. The ion beam is formed by electrodes 7. The method is carried out as follows. The laser-focused laser focused radiation through the window 3 and the holes in the electrodes 4 direct the surface of the material pressed into the tube. 2. The laser radiation power is chosen so that intense evaporation of the working substance begins, and the heat loss due to thermal conductivity becomes small. Under the action of powerful laser radiation, the substance in the tube evaporates and the outgoing jet of vapor propagates counter-radiation from the laser through the holes in the Ls electrodes. fill the inter-electrode gaps. The power supply 8 provides a discharge between the electrodes A after switching on the laser. The discharge between electrodes A is ignited as the space between the electrodes is filled with steam. The voltage from the source 9 applied to the electrodes 7 provides for the extraction of the HOHHoro beam. 0 five 0 five 0 five 0 five increasing the efficiency of the ion source, increasing the ion current density and the cross section of the extracted ion beam, the laser radiation power per unit surface is set equal to the energy at which the evaporation process dominates the thermal conductivity in the surface energy balance, the resulting jet of evaporated material is ionized by electric discharge whose electric field vector is parallel to the velocity vector of the steam jet, and the extraction of ions from the discharge plasma is carried out by an electric field with a vector Perpendicular to the velocity vector of the steam jet. 2. A device for producing an ion beam containing a solid target placed in an evacuated volume, a pulsed laser located outside this volume, with a focusing lens in front of the window for introducing laser radiation into the evacuated volume drawing electrodes and in order to increase the efficiency of the ion source, increase the ion flux density and the cross section of the extracted ion beam, the target is made in the form of a tube into which the working substance is pressed to a depth equal to n m and diameters The cuttings are additionally introduced with a row of flat electrodes with holes located in front of the tube, the diameter of the holes is equal to the diameter of the active element of the laser, the centers of the holes are located on the axis of the focusing lens and the target, and the drawing electrodes are arranged in parallel. this axis and perpendicular to the plane of the electrodes. %