SU1348641A1 - Optronic device for measuring angular deviation of object - Google Patents

Abstract

The invention relates to a measurement technique and can be used to measure the angular deviations of objects. The aim of the invention is to improve the accuracy of control by determining the angle of rotation of an object by the magnitude of the displacement of two marks formed by the optical elements of the device. The beams of the illuminator 1 pass the mark 2, are reflected from the beam splitter 3, pass through the collimator lens 4 and enter the lens 5, which forms an image of the mark on the input end of the regular optical fiber bundle 6. The beam beams pass through the optical fiber bundle 6, enter the projection lens 7, which forms the image of mark 2 at the position-window-sensitive unit 8. Beams of rays after mark 2, which pass through the beam splitter 3 without reflection, enter the projection lens 7, which forms the image marks on the output end of the fiber optic cable 6. Beams of beams after the fiber optic bundle enter the lens 5, then the lens 4, which forms the second mark 2 image on the position sensitive device 8, which is between The value of the angular deviation of the object. 1 il. (L 00 00 O5 4

Description

The invention relates to a measurement technique and can be used to measure the angular deviations of objects.

The purpose of the invention is to improve the measurement accuracy by determining the angle of rotation according to the magnitude of the displacement of two brands formed by the optical elements of the device.

The drawing shows the functional diagram of the device.

The device contains an illuminator 1 and an optically coupled mark 2 and a beam splitter 3, the reflecting plane of which is optically coupled with the mark 2, ITO successively aligned with the beam reflected from beamer 3, the collimator lens 4, in which front focus plane is located the mark 2, a lens 5 mounted on a measurement object (not shown), a regular fiber optic bundle 6, the input end of which is installed in the rear focal plane of the lens 5, the projection 1; the ion lens 7 optically conjugated to the reflective the beam splitter 3 and mounted so that the image plane is aligned with the front focal plane of the collimator lens 4, in the subject aposcis of which the output end of the regular fiber optic harness 6 is installed, the position-sensitive block 8 installed in the front focal plane of the collimator Matrix lens 4.

The device works as follows.

The illuminator 1 illuminates the mark 2. Beams of the illuminator 1, reflected from the beam splitter 3, enter the collimator lens 4. Parallel beams of light after the collimator lens 4 fall into the lens 5, which forms the image of the mark 2 on the input end of the regular fiber-optic bundle 6. The image of the mark 2 at the output end of the regular fiber optic bundle 6 is transferred by the projection lens to the position sensitive unit 8.

Beams of rays. Those that pass through the beam splitter 3 fall on the projection lens 7, which forms the image of mark 2 at the output end of the regular fiber-optic bundle 6. Beams of rays that have passed through 486412

the fiber-optic cable harness 6 is cut into the lens 5. A parallel beam of light after lens 5 enters the collimator lens 4, which forms an image of mark 2 on the position-sensitive unit 8.

I

Thus, on the position-sensing block there will be two images of the mark 2. Since the reflection coefficient of the beam splitter 3 is not equal to the transmittance of the beam splitter 3, the illumination of the two images of the research institute mark 2 will be different.

The position sensitive unit 8 determines the magnitude of the angular displacement of the object, and h, by the magnitudes of the projections of the U 1 line connecting two

There are 20 images of mark 2, and a sign on the basis of which image of mark 2 is above and which is below. In this case, two images of mark 2 are distinguished by illumination.

25

Thus, the proposed optoelectronic device provides an increase in the accuracy of control due to the fact that the magnitude of V and X, in two

30 times more for the two brands formed by the optical elements of the device.

Claims (1)

Invention Formula An optoelectronic device for measuring the angular deviations of an object, containing an illuminator and an optically coupled mark and a beam splitter, the reflecting plane of which is optically coupled to the mark, arranged successively along the rays reflected from the beam splitter, a collimator lens, in the front focal plane of which the mark A lens mounted on the measurement object and a position-sensitive unit, characterized in that, in order to increase the measurement accuracy, it is equipped with a regular fiber optic pticheskim wiring, an input end of which is mounted in the back focal plane of the lens, a projection lens, optically conjugated reflective plane beamsplitter and set so that its image plane is aligned with the front focal plane of the collimator lens. 313486А14 In the object plane of which the device-sensitive unit is installed, the output end of the regular in / out in the front focal plane of the colli-optical-optical bundle and the positioning objective lens are installed.