SU1312384A1 - Device for measuring linear shift of object - Google Patents

Abstract

The invention relates to the field of measurement technology. The purpose of the invention is to determine the measurement accuracy by reducing errors and the influence of external influences. Mirror-lens reflector 1 is attached to the object. The device contains a displacement compensator, which includes an optical system that forms an optical equisignal zone, a plane-paral-. a drive plate 2 with a drive 11, an anti-phase voltage generator 10 connected to the signal processing unit 6, a plane-parallel position sensor 2 of the width 2 connected to the recorder 15. A mirror-lens reflector 1 offset from the equi-angular zone reflects the light flux incident on the object. The reflected flux is directed to the photodetector 5, the signal from which is fed to the signal processing unit 6, where the motion control signal of the plane-parallel plate 2 is generated to realize the zero method. Turning the plate 2 causes the projection of the radiator 12 to be shifted to the position-sensitive receiver 14 of the sensor of the position of the plate 2. The signal from the output of the receiver 14 is processed by the recorder 15, which generates information about the object offset in digital form. 1il I (L

Description

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This invention relates to a measurement technique.

The purpose of the invention is to increase the measurement accuracy by reducing errors and the influence of external influences.

The drawing shows the functional diagram of the device.

The device contains a mirror-lens reflector 1 mounted on the object, a displacement compensator consisting of a plane-parallel plate 2, an object 3, a beam splitter 4, in the focal plane of which a photodetector 5 is located, a signal processing unit 6, the input of which is connected to the output of the photodetector 5 , a rectangular prism 7, the beam-splitting edge of which is located in the focal plane of the lens 3, the first 8 and second 9 emitters located on the same axis symmetrically with respect to the catheter faces of the rectangular prism 7, forming x beam splitting edge, an anti-phase voltage generator 10, the first and second outputs of which are connected respectively to the first 8 and second 9 radiators, the third output is connected to the second input of the signal processing unit 6, the output of which is connected to the input of the drive 11, the output of which is connected to plane-parallel plate 2, position sensor plane-parallel plate

2, consisting of a point emitter 12, 35 for placement on an object, a compensatory associated lens 13 and a position-sensitive photo detector 14, the plane-parallel plate 2 located between the lens 13 and the position-sensitive photo receiver 14, an IS recorder connected to the output of the position-sensitive photodetector 14.

The device works as follows.

The antiphase generator 10 provides for the supply of antiphase electric pulses to the radiators 8 and 9, as well as the generation of a reference signal for the processing unit 6

In the focal plane of the lens 3, there is an edge of a rectangular prism 7, the faces of which are alternately irradiated, and it creates in space an optical equisignal zone, which is the measuring base, by a certain amount relative to the equivalent signal zone of the specular-lens reflector 1

the beam is in the initial direction, and the displacement of the reflected equi-angular zone relative to the initial one is equal to the double displacement of the reflector.

Passing through the lens 3 in the opposite direction, the beam is directed by the beam splitter 4 to the photodetector 5, the signal from which is fed to the processing unit 6, where based on this signal and the reference coming from the power generator 10, a control command of the plane-parallel plate 2 is generated to implement the zero method . The rotation of the plane-parallel plate 2 causes a parallel displacement of the line of sight of the displacement compensator and a simultaneous identical displacement of the projection of the emitter 12 of the sensor of the position of the plane-parallel plate on the position-sensitive photodetector 14, the signal from which is processed by the recorder 15.

The use of a multi-element photodetector, for example, a CCD, makes it possible to obtain information about the displacement of the line of sight of the setter, and accordingly, of the object, linearly and numerically.

Claims (1)

Invention Formula A device for measuring the linear displacement of an object, containing a control element intended a moving torus consisting of optically coupled plane-parallel plate, lens, photodetector, signal processing unit, the input of which is connected to the photoreceiver output, an actuator whose input is connected to the output of the signal processing unit, and the output is connected to a plane-parallel plate, and a recorder, tl and h and y; e in order to increase the measurement accuracy, it is equipped with an antiphase voltage generator, one of the inputs of which is connected to the second input of the signal processing unit, with a rectangular prism, the first and second sources: w radiation, located on the same axis symmetrically with respect to the catheter faces of the rectangular prism, the inputs of the first and second radiation sources are associated respectively with the first and second outputs of the antiphase voltage generator, a beam splitter, located between the photodetector 313123844 and the lens of the compensator of the displacement-sensitive-photo photo along the light emission of the perceptor, the output of which is connected to second and second radiation sources by the recorder, while the plane-parallel so that the beam-splitting edge of the straight plate is located between the angle prism is located in the Fo-5 lens and the position-sensitive plane of the lens, the sensor photo detector of the position sensor, The position of the plane-parallel control element is made in a plate consisting of a point-like mirror-lens reflector, radiator, optically coupled to be installed so that its lens, the optical axis of which is 0 optical axis is shifted relative to parallel to the optical axis of the optical axis of the lens of the compresorov displacement, displacement ir array computer.