SU1305031A1 - Industrial robot gripping device - Google Patents

Abstract

The invention relates to mechanical engineering, in particular to semiconductor manufacturing equipment, and can be used in the construction of industrial robots, manipulators, and mechanical arms used in electrical, electronic control of electrical parameters of electronic devices. The aim of the invention is to enhance the functionality by ensuring that semiconductor devices are tested: when they are captured and transferred. When power is supplied to the heating element 5, fixed on the plate 4, made of a material with reversible thermomechanical shape memory, jaws 7 mounted on a pair of two shoulders 2 are mixed. Sponges 7, made of an elastic current-conducting material, are elliptical in shape, orient and clamp the flat terminal of the semiconductor device while simultaneously connecting the contacts to its control terminal. Then, the second pair of jaws is brought together, covering the cylindrical part of the semiconductor device with conductive jaws. After capturing, the device is connected to the measurement system and, in the transfer process, the device parameters are measured. 4 il. View A i (L so about SP about so (Rig.2

Description

The invention relates to mechanical engineering, in particular, to technological equipment of subconductor production, and can be used in the construction of industrial robots, manipulators and mechanical hands used in; Electrotechnical electronic industry for control of electrical parameters of electronic devices.

The purpose of the invention is the extension of functionality by ensuring the testing of semiconductor devices during their capture and transfer.

FIG. 1 shows a gripper, a general view of FIG. 2 is a view A of FIG. 1-, FIG. 3 - section B-E1 in FIG. one; FIG. 4 is a sectional view B-B in FIG. one.

The grip of an industrial robot comprises a housing 1, in the slots of which two main 2 and an additional 3 double-sided levers are installed in parallel planes, at one end of which there are jaws that simultaneously play the role of electrical contacts, and the other ends are connected to their movement drives, each of which is made in the form of a plate 4 of a material having a reversible thermomechanical memory of the form on which the heating element 5 is fixed. The plate 4 with its ends is fixed on the levers with the help of fingers 6 is set rotatably curved. The sponges 7 of one of the pairs of levers, for example the levers 2, are made of resilient conductive material, are bent in the shape of ellipses and rigidly connected to the levers, and the sponges 8 of the other pair of levers 3 are also made of resilient conductive material, are M-shaped and mounted on correspondingly movable in two mutually perpendicular planes. In addition, pins 10, which interact with the control lead of the semiconductor device 1 1, are fixed on the arms of the pair 2 through insulators 9.

Making the jaws 7 in the form of ellipses makes it possible, when gripping the test device 11, to orient it so that the planes of its cathode tip 12 are always parallel to the larger axis of the ellipses.

If the planes of the cathode output 12 of the device are not parallel

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If the axis of the ellipse sponge 7, then when interacting with the cathode output of the captured device 11, the latter is forcibly unfolded.

The air supply channel 13 is also made in the housing 1, which, if necessary, provides for forced cooling of the plate drive 4. In addition, the housing is provided with fixing and fastening elements 14, by means of which the tong is attached to the arm of the robot or the manipulator.

Sponges 7 and 8, contacts 10 are electrically connected with the measuring apparatus for monitoring the electrical parameters of the device under test 11.

The device works as follows.

The grab is applied to the semiconductor device 11, which occupies a vertical position in the grab position. In this case, the shoulders of the two shoulders arms are divorced, and the drive plates 4 occupy the initial position.

After that, a command is issued to turn on the power supply of the heating element 5 of the plate 4 of two shoulders 2, to which the jaws 7 and the contacts 10 are attached. The plate 4 heats up to 60 ° C, changes its shape and goes into the working position (Fig. 2).

When plate 4 moves from irrelevant, which position into the working shoulders of the double-arm levers of pair 2 come closer, thereby simultaneously orienting the device 11, connecting pin 10 to its control output, capturing (connecting) its cathode output using sponges 7. With a delay in a time of 0.6-1 seconds, a command is sent from the control unit to turn on the heating element 5, plate 4 double-arm levers 3. Plate 4, uninterruptedly to 60 ° C, also changes its shape, connecting and capturing the anode output of the device 11 withfloating jaws 8, which are self-aligning, slightly elastically deforming, and evenly compressing the anode output of the device 11, providing a reliable electrical contact, and therefore a secure grip. Then the manipulator arm moves with the grip to the instrument sorting position. When moving the gripper from the pickup position of the device 11 to the position of its sorting, the non3130503 is measured.

walkable electrical parameters of the test device.

At the sorting position of the devices, electrical power is disconnected from the heating elements 5, plates 5 4, which are cooled down by convection heat exchange with the environment and plate 4 from the working position to the initial position. In this case, the shoulders of the double-arm lever arms are separated in a plane parallel to the planes, freeing the device 11 from being clamped, which then enters the sorting device by electrical parameters.

If it is necessary to cool the plate with a J5 mold, the ends of which zakleptletin A can be forced off with the help of cold air coming in through the air inlet ducts 13 made in housing 1,

Claims (1)

Invention Formula The grip of an industrial robot primarily for semiconductor devices, comprising a housing in which a pair of two main double-arm levers are installed, located in one plane 20 25 on the levers and the heating element fixed on this plate, the sponges of one of the pairs of levers are made of an elastic conductive material, are bent in the shape of ellipses and connected to the levers, and the sponges of the other pair of levers are also made of an elastic conductive material are M-shaped and mounted on respective levers with the possibility of movement in two mutually perpendicular planes. bones, on one end of which sponges are installed, and the other ends are connected with the drive of their movement, about t and that with the aim of expanding the functionality, it is equipped with an additional pair of double shoulders with sponges and with a drive at opposite ends, installed in the housing and the location of the main levers, while the drive of each pair of levers is made in the form of plates of material made of reversible thermomechanical pas on the levers and the heating element fixed on this plate, the sponges of one of the pairs of levers are made of an elastic conductive material, are bent in the shape of ellipses and connected to the levers, and the sponges of the other pair of levers are also made of an elastic conductive material are M-shaped and mounted on respective levers with the possibility of movement in two mutually perpendicular planes. 9g.1 fil ff Editor N. Bobkova Compiled by F.Mayorov Tehred L.Serdyukova Proofreader M.Samborska Order 1373/14 Circulation 954 Subscription VNIIPI USSR State Committee for inventions and discoveries 113035, Moscow, Zh-35, Raushsk nab., 4/5 Production and printing company, Uzhgorod, Projecto st., 4 FIG.