SU1283525A1 - Optoelectronic device for checking nonflatness - Google Patents

Abstract

BACKGROUND OF THE INVENTION The invention relates to monitoring devices used to control the flatness of objects. The aim of the invention is to increase the accuracy of control, which is achieved through the use of a system of reflectors installed after the source of collimated radiation. The device contains a source of collimated radiation 1, a housing 2, a system of 3 reflectors, a coordinate-sensitive photodetector 4, a platform 5, an electronic signal processing unit 6, whose input is connected to a coordinate-sensitive photodetector 4, a thermal insulation layer 7, and a system 3 reflectors consists of two mirrors that form a dihedral angle, and a beam splitter placed relative to the mirrors so that its beam-dividing plane coincides with the bisector of the dihedral angle. Platform 5 is mounted on a counter iruemy object 10. 2 yl. (L

Description

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BACKGROUND OF THE INVENTION The invention relates to monitoring devices used to control the flatness of objects.

The purpose of the invention is to improve accuracy.

Figure 1 shows the functional diagram of the device, figure 2 - the implementation of the system of reflectors.

The device (FIG. 1) contains a source of collimated radiation 1, a housing 2, a system of 3 reflectors, a coordinate-sensitive photodetector 4, a platform 5, an electronic unit 6 for signal processing, the input of which is connected to a coordinate-sensitive photodetector 4, thermally insulated diy layer 7, and the system of 3 reflectors consists of two mirrors 8, forming a dihedral angle, and a beam splitter 9, placed relative to k mirrors, so that its beam-splitting plane coincides with the bisectors of the dihedral angle. Platform 5 is installed on the controlled object 10

The device works as follows.

The beam of rays from the source of collimated radiation is divided into two beams of radiation in the system of 3 reflectors and falls into two areas of the coordinate-sensitive photodetector 4 placed on the platform 5. The latter moves along the surface of the object under test 10.

The deviation of the surface of the object under test 10 from the plane leads to the displacement of the platform 5, and, therefore, of the coordinate-sensitive photodetector 4 relative to two beams of rays at the output of the system 3 of reflectors. The signal processing electronics 6, the input of which is connected to the coordinate-sensitive photodetector 4, captures the difference of photocurrents from the two sites of the photoreceiver 4, proportional to the displacement of the platform 5, i.e. the flatness of the surface of the test object 10.

To reduce the effect of heating the source of collimated radiation on the system of 3 reflectors between the source of collimated radiation and the casing 2, a de-insulation layer 7 is installed. Heating the source of collimated radiation 1 can lead to

the parallel displacement of the light beam at the output by the value of K and the angle of inclination.

Since the beam-splitting plane of the beam splitter 9 coincides with the bisector of the dihedral angle formed by mirrors 8 and the direction of measurement, two beams of rays 1 and l (Fig. 2) at the output of system 3

the reflectors will be symmetrical with respect to the direction of measurement at any displacements and inclinations of the beam of rays I of the source 1 of the collimated radiation, and hence the difference

photocurrents from two sites of the coordinate-sensitive photodetector 4 will be unchanged.

Figure 2 shows that if the beam of rays from the source of collimated radiation moves to position II (angle of inclination and linear displacement by the value of k), then at the output of the system 3 of reflectors two beams of rays II and II will also be symmetrical with respect to the direction of measurement .

Thus, changing the direction of the beam of the source of collimated radiation 1 does not affect

measurement results, which leads to an increase in the accuracy of control.

Claims (1)

Invention Formula Optoelectronic device for control of flatness, containing sequentially installed source of collimated radiation, platform, coordinate-sensitive a photodetector placed on the platform and an electronic signal processing unit whose input is connected to a coordinate-sensitive photodetector, characterized in that, in order to increase accuracy, it is equipped with a system of reflectors installed between the source of collimated radiation and the platform, forming a dihedral angle, and a beam splitter placed in relation to the mirrors so that its beam-splitting plane coincides with the bisector of the dihedral angle and direction the source of collimated radiation is set at an angle to the direction of measurement, the beam splitter is located at the exit of the source of collie 31283525 each of the arrays from one of the coordinate sites is optically coupled to an appropriately sensitive photodetector. G and Direction isg R - /