SU1268799A1 - Vacuum sorption pump - Google Patents

Abstract

The invention relates to vacuum technology and allows for improved pumping x-ki pump and increase its reliability. In the annular gap between the vessel 2 with the refrigerant and the sorption element (ESS) 3 there is a radiation heat exchanger in the form of disks 5, 6. The disks 5 and 6 are placed relative to each other with axial gaps 7, 8 and alternately fixed on the SE 3 with thermal contact that provides an intense heat sink from the getter and allows to increase its absorption capacity. The lack of contact between the solar cell 3 and the vessel 2 eliminates the possibility of its emergency stop during operation of the pump. 2 Il. y (L to Oi 00 1 fig. 2 WITH with

Description

(54) VACUUM SORPTION PUMP (57) The invention relates to a vacuum technique and can improve the pumping characteristics of the pump and increase its reliability. In the annular gap between the vessel 2 with the refrigerant and the sorption element (SE) 3, a radiation heat exchanger is installed in the form of disks 5, 6. The disks 5 and 6 are placed relative to each other with axial gaps 7, 8 and are alternately fixed to the SE 3 with a thermal contact, which provides intensive heat dissipation from the getter and allows to increase its absorption capacity. The lack of contact between the SE 3 and the vessel 2 excludes the possibility of its emergency stop during operation of the pump. 2 ill.

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SU „„ 1268799

The invention relates to vacuum equipment, namely, to the designs of vacuum sorption pumps.

The purpose of the invention is to improve the pumping characteristics of the pump and increase its reliability.

In FIG. I presents a pump, cross section; in FIG. 2 - radiation heat exchanger, axial section.

The vacuum sorption pump contains a housing I, a vessel 2 with a refrigerant placed in it, covering its movable sorption element 3 and a getter evaporator 4. The sorption element 3 is installed relative to the vessel 2 with an annular gap in which the radiation heat exchanger is located in the form of a set of disks 5 and 6, placed one relative to the other with axial gaps 7 and 8 and alternately fixed with thermal contact on the sorption element 3 and vessel 2.

The pump operates as follows.

Previously, the housing cavity is evacuated by an external pump to a residual pressure of I -10 ² Pa. Liquid nitrogen is poured into the vessel 2, the getter evaporator 4 is turned on, and the sorption element 3 is rotated around the vessel 2. The getter sprayed by the evaporator 4 is deposited on the outer surface of the element 3 in the form of a thin film. The heat from element 3 is intensively removed to liquid nitrogen in the vessel 2 by heat transfer by radiation from the disks to the disks 5 through the gaps 7 and 8. The cooled thin film of getter material actively absorbs gas molecules entering the cavity of the pump housing I. Intensive heat dissipation from the getter allows you to increase its absorption capacity, and therefore improve its pumping characteristics. The lack of contact between the sorption element and the vessel for the refrigerant eliminates the possibility of an emergency stop of the element during the operation of the pump, which provides increased reliability.

Claims (1)

The claims A vacuum sorption pump comprising a housing, a vessel 20 with a refrigerant disposed inside it, covering its movable sorption element and getter evaporator, characterized in that, in order to improve pumping performance and increase reliability, the sorption element is installed relative to the vessel with 25 annular gap and in the latter a radiation heat exchanger is located in the form of a set of disks placed relative to each other with axial clearances and alternately secured with thermal contact on the sorption element and vessel.