SU1232841A1 - Suspension unit of cryopump cooled vessel - Google Patents

Description

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The invention relates to vacuum and cryogenic engineering, in particular, to the structures of suspension units for cooled vessels of vacuum cryosorption and cryocondensate pumps.

The purpose of the invention is to increase the efficiency of the cryopump by reducing the heat leakage to the vessel with a liquid refrigerant agent.

Fig, 1 shows a cryopump with a suspension unit of a cooled vessel, a longitudinal section; in fig. 2 node suspensionJ cut; Fig. 3 is the same, with a cavity in the walls and the bottom of the glass.

The suspension unit of the cooled cryopump vessel contains the top 1 and bottom 2 coaxial tubes, the last of which is connected to the vessel 3, connected to the tubes 1 and 2 of the thermal bridge and the insert to the transverse screens 4 9 that have offset holes from one another. contains at least one cup 6 with a bottom 7 / facing the top tube 1 and having a central opening and the thermal bridge is made in the form of cylindrical shells 8 arranged one inside the other, the ends of which are connected in series with the help of rings O spacers 9 with the tubes 1 and 2 and between them, the glass 6 is disposed between adjacent shells, and is in the form vkladsh krppki 10 placed in

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the openings of the bottom 7 of the cup 6, as well as in the lid 10, are made of sealed cavities 11 and 12 filled with cryosorbent gas and placed in them

5 heat shields 13 and 14.

In the process of the cryopump operation, refrigerant vapor from vessel 3 passes through labyrinth channels formed between tube 1 1 and 1 and 2 of shell 8, sh 8,

K1 ring spacers 9, cup 6 and holes 5 of transverse shields 4. Shell B and ring spacers 9 increase the thermal resistance of the suspension unit, and labyrinth

15 channels provide intensive heat exchange of waste vapors with the walls of the shells, ensuring the removal of part of the heat that passes through the thermal bridge. A key 10 is required for the initial

20 filling the vessel during which it is open (removed). The presence of sealed cavities 11 and 12 and screens 13 and 14 excludes heat exchange through the walls of the glass and between 25 pairs having different temperatures, and the presence of cryosorbent gas condensing on cooling and capable of absorbing the gas flowing in cavity 11 and 12 provides

30 vacuum in these cavities,

Thus, the heat gain through the suspension assembly is significantly reduced, which increases the cost-effectiveness of Cryonaco ™ 35 sa.

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Compiled by V. Krkovsky Editor A, Kozoriz Tehred O. Sopko Proofreader L, Patay

Order 2751/35 Circulation 586 Subscription

VNIIPI USSR State Committee

for inventions and discoveries 113035, Moscow, Zh-355 Raushsk nab., d. A / 5

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Printing company, Uzhgorod, st. Project, 4

Claims (2)

1. NODE SUSPENSION OF A COOLED CRYONASOSE VESSEL containing upper and lower coaxial tubes, the last of which is connected to the vessel, a thermal bridge connected to the tubes and a liner with transverse screens having openings offset from one another, characterized in that, in order to increase the efficiency of the cryopump by reducing heat influx to the vessel, it additionally contains at least one glass with a bottom facing the upper tube and having a Central hole, and the thermal bridge is made in the form located one in another cylindrical shells, the ends of which are successively connected by means of ring spacers with the tubes and with each other, the glass being located between adjacent shells, and the insert is made in the form of a cover placed in the hole of the “bottom of the stack on”. 2. A knot by π. 1, characterized in that in the walls and bottom of the glass, as well as in the lid, sealed cavities filled with cryosorbent gas are made with heat shields placed therein.