SU1204805A1 - Process for manufacturing turbo-molecular pump - Google Patents

Description

one

The invention relates to vacuum technology, in particular to designs of turbomolecular pumps.

(TMN ;.

 The purpose of the invention is to increase the speed of operation and operational reliability.

FIG. 1 shows the MTH produced by the proposed method; a pro- tse incision in FIG. 2 is a sectional view in FIG. 1.

TMN 3 manufactured by the proposed method includes a housing 1 with a shaft 2 accommodated in it, stator disks with blades 3 and 2 rotor disks with vanes 4 mounted on the housing 1. The stator and rotor blades 3 and 4 are provided with connecting rings 5 and 6,

The method of manufacturing TMH involves vytoshchenie on the stator and rotor disk blanks of the slots with the formation of the blades 3 and 4 and the connecting rings 5 and 6 s, the subsequent twisting of the blades 3 and 4, the installation of the manufactured stator and rotor disks in the housing 1 and fixing the connecting. 6 (the last of them) on the shaft 2 of the pump, and the stator disks in the housing 1, and the slots on the rotor disk headers are made from the periphery to the center with the formation of internal connecting rings 6. The slots on the stator disk blanks are also performed}: from the periphery to the center

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with the formation of inner connecting rings 5, they are placed when mounted in housing 1 with gaps S relative to shaft 2, 5 stator disks are fixed in housing 1 by fastening blades 3 ends in it, and the latter are twisted in the opposite direction to spin blades 4 rotary disks. When rotating shaft 2, the gas flow density in the interscapular channel in the direction from the inlet to the outlet of the pump is differentiated along the radius. In the first approximation, the flux density is proportional to the relative speed of the rotor and stator vanes. Transferring the twist zone of the stator blades of the pump's periphery to a smaller diameter increases the average density of the gas flow and the area of the interscapular channel, which causes an increase in gas flow in the direction of pumping5 increase the speed of the pump.

The presence of the proposed pump, the stator disc connecting ring; interconnecting the roots of the blades, dramatically increases the stiffness of the stator disk, which in turn improves the operational reliability of the pump, especially when the atmosphere breaks or aerodynamic deceleration of the pump shaft.

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(pyff.S. VNShShI Order 8506/34 Circulation 585 Subscription

Branch OR Patent% Uzhgorod, ul..Proektna, 4

Claims (1)

METHOD FOR PRODUCING A TURBO-MOLECULAR PUMP, which includes making slots on the stator and rotor disk blanks with the formation of blades and connecting rings, subsequent twisting of the blades, installing the manufactured stator and rotor disks in the housing and fixing the connecting rings of the latter on the pump shaft, and stator disks in the housing, the slots on the rotor disk blanks. perform from the periphery to the center with the formation of -internal connecting rings, characterized in that, in order to improve performance and operational reliability, the slots on the stator disk blanks are also performed from the periphery to the center with the formation of internal connecting rings, place them when installed in the housing with gaps relative to the shaft, the stator disks are fixed in the housing by fixing the ends of the blades in it, and the latter is twisted in the opposite direction to the spinning of the blades of the rotor discs. SU-1204805 <Putl