SU1129672A1 - Apparatus for fixing semiconductor wafers on faceplate of centrifuge - Google Patents

Abstract

DEVICE, SCHEMBER OF FIXING OF SEMICONDUCTOR PLATES ON THE CENTRIFUPI PLANTER, containing der, mounted on sliders placed with the ability to move in the faceplate plane using spacing screws, characterized in that, in order to increase reliability in operation, the holders are designed as L-shaped two plates levers hinged on the sliders, and the centers of mass of the roachag are shifted relative to the point of their attachment on the sliders 1C from the same Figure 1;

Description

one

The invention relates to semiconductor industrial equipment and can be used to secure semiconductor plates and other products on the centrifuge faceplate when conducting quality control of the surface of the plates by scanning with a light beam or for other technological operations associated with the rotation of the plate.

A device for attaching semiconductor wafers is known, which comprises holders in the form of elastic plates Til.

However, the need to release the plates when they are removed from the device is inconvenient for its maintenance and reduces the performance

The closest to the technical essence of the invention is a device for securing semiconductor wafers on a centrifuge faceplate, containing holders of semiconductor wafers mounted on sliders arranged to move in the plane of the faceplate through running screws | 2j.

The disadvantage of this device is that the plates are not securely attached when rotating the faceplate,

 The goal is to improve reliability.

The goal is achieved by the fact that in the device for fixing semiconductor plates on the centrifuge faceplate, containing semiconductor plate holders mounted on sliders arranged to move in the faceplate plane by means of spindle screws, the holders are made in the form of L-shaped double-arm levers hinged on sliders, take the centers of mass ry296722

chagov shifted relative to their point of attachment to the sliders.

FIG. 1 shows the proposed device, a general view; in FIG. 25, section A-A in FIG. one; in fig. 3 holder, working position.

The device contains holders 1 mounted on sliders 2 and placed in the slots 3 of the faceplate 4 mounted on the centrifuge shaft 5. Sliders 2 have the ability to move in the plane of the faceplate 4 along. means of running screws 6 installed in the sliders 2 and fixed with their ends on the faceplate 4. The holders 1 are made in the form of two-arm L-shaped levers hinged on the sliders 2 by means of the axes 7, and the center 0 of the mass of each of the levers is offset relative to points are fastened in such a way that in the initial state the lever is in the tilted position under the action of its weight. five

The device works as follows

By rotating the spindle screws 6, slide 2 with the holders 1 Q in the position corresponding to the configuration and dimensions of the processed semiconductor wafer. Then load the plate into the device and turn on the centrifuge drive. As the faceplate 4 rotates, the holders 1 rotate on axles 7 under the action of centrifugal forces and clamp the plate. After finishing the processing and stopping the faceplate 4, the holding bodies 1 are rotated to the starting position under the action of the force of their weight, releasing the processed plate.

The device provides reliable mounting of semiconductor wafers and their automatic release after the end of the processing cycle.

FIG 2

Fig.Z

Center passes

Claims (1)

DEVICE FOR FASTENING SEMICONDUCTOR PLATES ON THE CENTRIFUGI PLANE, containing der- and jater mounted on sliders that can be moved in the plane of the face plate using spindles, characterized in that, in order to increase reliability in operation, the holders are made in the form of L-shaped two shoulders levers pivotally mounted on the sliders, and the centers of mass of the arms are offset from the point of attachment to the sliders