SU1108966A1 - Method of manufacturing silicon transistor structures with dielectric insulation - Google Patents

Method of manufacturing silicon transistor structures with dielectric insulation

Info

Publication number
SU1108966A1
SU1108966A1 SU3565110/25A SU3565110A SU1108966A1 SU 1108966 A1 SU1108966 A1 SU 1108966A1 SU 3565110/25 A SU3565110/25 A SU 3565110/25A SU 3565110 A SU3565110 A SU 3565110A SU 1108966 A1 SU1108966 A1 SU 1108966A1
Authority
SU
USSR - Soviet Union
Prior art keywords
transistor structures
dielectric insulation
manufacturing silicon
silicon transistor
manufacturing
Prior art date
Application number
SU3565110/25A
Other languages
Russian (ru)
Inventor
О.Н. Данцев
Ю.А. Комаров
Т.Б. Шер
Original Assignee
О.Н. Данцев
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by О.Н. Данцев filed Critical О.Н. Данцев
Priority to SU3565110/25A priority Critical patent/SU1108966A1/en
Application granted granted Critical
Publication of SU1108966A1 publication Critical patent/SU1108966A1/en

Links

SU3565110/25A 1983-03-11 1983-03-11 Method of manufacturing silicon transistor structures with dielectric insulation SU1108966A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU3565110/25A SU1108966A1 (en) 1983-03-11 1983-03-11 Method of manufacturing silicon transistor structures with dielectric insulation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU3565110/25A SU1108966A1 (en) 1983-03-11 1983-03-11 Method of manufacturing silicon transistor structures with dielectric insulation

Publications (1)

Publication Number Publication Date
SU1108966A1 true SU1108966A1 (en) 1994-04-15

Family

ID=60517318

Family Applications (1)

Application Number Title Priority Date Filing Date
SU3565110/25A SU1108966A1 (en) 1983-03-11 1983-03-11 Method of manufacturing silicon transistor structures with dielectric insulation

Country Status (1)

Country Link
SU (1) SU1108966A1 (en)

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