SU1046802A1 - Container for semiconductive wafers - Google Patents

Abstract

Containers for semiconductor plates, mainly silicon, containing a case, a lid, a lock and a handle pivotally connected to the lid by means of an axis, characterized in that, with the aim of expanding the functional and operational capabilities, it is provided with spring-loaded lids and a lock located on the axis of the handle, moreover, the lock is made in the form of a latch with a protrusion and an L-shaped stop mounted with. the ability to interact with the latch axis of the handle, and the case is provided with a quartz protective substrate fixed in its bottom part. (F 00

Description

The invention relates to equipment for the production of semiconductor devices and can be used for storing and transporting silicon wafers on different processes.

A known container for transporting non-ferrous metal concentrates comprising a body, a lid, a handle and an Ell lock.

However, this container is not adapted to transport thin flat products and, due to its design features, cannot be used to transport semiconductor wafers.

Closest to the present invention is a container consisting of a body, a lid, a lock and a handle pivotally connected to the lid by. C axis. .

The known container is designed to provide sealing of the products placed inside and is inconvenient for placing and transporting boats with semiconductor plates, since it allows access to them only through the opening in the upper part of the container. In addition, it does not allow mechanization of loading and unloading boats due to the lack of end holes.

The purpose of the invention is to expand the functional and operational capabilities of the container.

This goal is achieved in that the container for semiconductor wafers, mainly silicon, comprising a housing, a lid, a lock and a handle pivotally connected to the lid by means of an axis, is provided with spring-loaded lids and a retainer arranged on the axis of the handle; L-shaped stop installed with the ability to interact with the latch axis of the handle, and the case is equipped with a quartz protective substrate fixed in its bottom part.

Figure 1 shows the container with the open krplkoy, general view; Figure 2 is the same, with the lid closed; in FIG. 3, section A-A in FIG. 2 (the handle is raised) in FIG. 4 is the node I in FIG. 2 (the handle is in the raised position); figure 5 is the same (the handle in the lowered position To

The container for semiconductor wafers of FIG. 1-3) consists of body 1 and

covers 2 made of 0.4 mm thick stainless steel sheet and connected by a hinge 3. On the sides of the container are spring-loaded covers 4 which are held in the closed or open position by spring mechanisms 5. The handle 6 for transferring the container is rigidly connected to the axis 7, having in the center there is a latch 8. Tara is equipped with a lock, which is a latch 9 connected to the lid 2, made in the form of an elastic metal plate, at one end of which there is an L-shaped support 10, and on the other a lug 11, which comes when the container is closed. 12, attached to the housing 1. The latch 9 is made with a slot 13, which includes a metal rod attached to the lid 2 with a spring 15, which serves to hold the latch in the closed position. A quartz protective substrate 17 is fixed at the bottom of the container with a pin 16, necessary to prevent the occurrence of metal scuffing on the inner surface of the container when the boat 18 with silicon plates 19 is moved during loading in the diffusion furnace, and to exclude the possibility of metal particles falling on yachi boats. The movement of the boat into the furnace is carried out with the help of a pusher 20 connected to the stem 21. The container is mounted on legs 22 and is kept from being guided by guides 23 from moving in the loading chamber.

To place the boat 18 with silicon plates 19 inside the container, the latter is mounted on the legs 22, the handle 6 is lowered, the back of the spring-loaded covers 4 is folded back and the L-shaped stop 10 is pressed 10. When the L-shaped stop 10 is pressed, the spring 15 is compressed, slightly raised and the protrusion 11 of the latch 9 opens from behind the bracket 12 and the upper lid 2 opens. After the boat 18 is placed on the quartz substrate 17 of the boat 18, the upper lid 2 is lowered. The container is locked with the latch 9,

the spring-loaded lids 4 are closed and the container is transported by the handle 6 to the feed chamber of the diffusion furnace. During carrying, when the handle 6 is in the raised position, the L-shaped stop 10 of the latch 9 interacts with the latch 8 of the axis 7 to prevent accidental pressing of the support 10 and the subsequent unexpected opening of the lid 2. The container placed in the loading chamber opens and the pusher 20, the boat 18 moves the .9 furnace. At the end of the diffusion process, the boat is moved using the Bct pusher to move into the container.

The use of the proposed packaging greatly facilitates the transfer of semiconductor wafers, which, by mechanizing the process of loading and unloading boats, speeds up the processing of wafers.

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Claims (1)

TARE FOR SEMICONDUCTOR PLATES, mainly silicon, containing a body, a cover, a lock and a handle, pivotally connected to the cover by an axis, characterized in that, in order to expand its functional and operational capabilities, it is equipped with spring-loaded covers and a latch located on the axis of the handle moreover, the lock is made in the form of a latch with a protrusion and L-shaped emphasis installed with. the possibility of interaction with the handle axis retainer, and the case is equipped with a quartz protective substrate fixed in its bottom part. eleven