SK282806B6 - Process for producing wear-resistant boride layers on metal material surfaces - Google Patents
Process for producing wear-resistant boride layers on metal material surfaces Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/28—Deposition of only one other non-metal element
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Abstract
Description
Oblasť technikyTechnical field
Vynález sa týka spôsobu výroby boridových vrstiev na povrchy kovových materiálov odolných proti oteru.The invention relates to a process for producing boride layers on surfaces of abrasion resistant metal materials.
Doterajší stav technikyBACKGROUND OF THE INVENTION
Výroba boridových vrstiev odolných proti oteru sa vykonáva v praxi väčšinou pri použití pevných boračných materiálov, napríklad vo forme práškov, pást alebo granulátov.The production of abrasion-resistant boride layers is practically carried out mostly using solid boronizing materials, for example in the form of powders, pastes or granules.
Tieto spôsoby vyžadujú nevýhodne vysoké náklady na prácu pri balení, rozbaľovaní a čistení častí. Čistenie sa vykonáva pomocou kombinácie mytia a kefovania alebo vrhania. Vzhľadom na to, že prášky, pasty a granuláty sú iba raz použiteľné, vznikajú problémy tiež pri likvidácii spotrebovaného boračného činidla.These methods require disadvantageously high labor costs for packaging, unpacking and cleaning the parts. Cleaning is carried out using a combination of washing and brushing or throwing. Since powders, pastes and granules are only once to be used, problems also arise in the disposal of spent boronizing agent.
Okrem toho je známe tiež použitie kvapalných boračných činidiel, napríklad vo forme tavenín solí. Všetky tieto spôsoby sa však nedajú vykonávať vzhľadom na problémy, zásadne spojené so soľnými kúpeľmi so zreteľom na bezpečnosť použitia, čistenia dielov po spracovaní a likvidácii kúpeľov, prípadne ich produktov odbúravania.In addition, it is also known to use liquid boronizing agents, for example in the form of salt melts. However, not all these processes can be carried out due to the problems inherent in salt baths with regard to the safety of use, cleaning of parts after processing and disposal of the baths or their degradation products.
V súvislosti s tým sa vykonávali rôzne pokusy boridácie s plynnými boračnými činidlami (postup CVD). Pri použití organických zlúčenín bóru (bórtrimetyl, bórtrialkyl) prebieha prevažne nauhlíkovanie namiesto borácie a pri použití dibóranu dochádza k bezpečnostné - technickým problémom kvôli jedovatosti a nebezpečenstvu explózie.Accordingly, various boronization experiments were carried out with gaseous boronizing agents (CVD procedure). The use of organic boron compounds (borotrimethyl, bortrialkyl) is predominantly carburized instead of boration, and the use of diborane leads to safety-related technical problems due to toxicity and the risk of explosion.
Použitie chloridu boritého ako bór poskytujúceho média sa nemôže presadiť na základe prevádzkových problémov pri tvorbe vrstvy. Pôvodom týchto problémov je tvorba chlorovodíka, nastávajúca pri borácii v zmesiach BC13 - H2.The use of boron trichloride as the boron-providing medium cannot be enforced due to the operational problems of layer formation. The origin of these problems is the formation of hydrogen chloride occurring during boronization in BC1 3 - H 2 mixtures.
Pri borácii materiálov na báze železa pomocou chloridu boritého prebiehajú nasledujúce základné reakcie:The following basic reactions take place in the boronization of iron-based materials with boron trichloride:
BC13 + 3 H2 + 2 Fe-> 2 FeB+6 HCIBC1 3 + 3 H 2 + 2 Fe-> 2 FeB + 6 HCl
BC13 + 3 H2 + 4 Fe -> 2 Fe2B + 6 HCI.BC1 3 + 3 H 2 + 4 Fe -> 2 Fe 2 B + 6 HCl.
Plynný chlorovodík, ktorý vznikol pri borácii pomocou chloridu boritého, reaguje so železom podkladového materiálu za tvorby ľahko prchavého chloridu železnatého:Hydrogen chloride gas, produced by boron trichloride boronation, reacts with the iron of the base material to form a readily volatile ferrous chloride:
HCI + Fe -> FeCl2 HCl + Fe -> FeCl 2
Chloridy železa majú pri teplotách spracovania v rozmedzí 500 °C až 1200 °C, prichádzajúcich do úvahy pri použití, vysoké tlaky pár, takže dochádza k trvalému silnému odparovaniu chloridov železa. To vedie k tvorbe otvorov medzi boridovou vrstvou a podkladovým materiálom, čo sa už vytýkalo ako nedostatok pri BC13 - postupe. Potlačenie tvorby otvorov je možné iba vtedy, keď sa podarí pri začiatku borácie v priebehu krátkeho času vyrobiť tesne uzatvorenú boridovú vrstvu. To je prevádzkovo - technicky tak ťažké, že sa doteraz spoľahlivo a reprodukovateľné nepodarilo.The iron chlorides have high vapor pressures at treatment temperatures in the range of 500 ° C to 1200 ° C, which are considered in use, so that the iron chlorides evaporate constantly. This leads to the formation of holes between boride layer and the underlying material, which is always criticized as failing in the BC1 3 - process. Suppression of hole formation is only possible when a tightly sealed boride layer is produced within a short time at the start of the boration. This is so operationally and technically difficult that it has not been reliable and reproducible so far.
Okrem čisto termického variantu CVD - borácie sú známe tiež pokusy o boráciu, podporovanú plazmou (PACVD - borácia). Tu sa používal iba dibóran a chlorid boritý s nevýhodami, známymi už z termického postupu CVD. Súhrn známych postupov sa nachádza v Review „Engineering the Surface with Boron Based Materials,,, Surface Engineering 1985, Vol. 1, č. 3, str. 203 - 217.In addition to the purely thermal variant of CVD-boration, plasma-assisted boronation (PACVD-boration) experiments are also known. Here, only diborane and boron trichloride were used, with the disadvantages already known from the thermal CVD process. A summary of known procedures is found in the review of "Engineering the Surface with Boron Based Materials", Surface Engineering 1985, Vol. 1, no. 3, p. 203-217.
Úlohou predloženého vynálezu je vypracovanie spôsobu výroby proti oteru odolných boridových vrstiev na ko vových materiáloch, ktorý by nebol zaťažený uvádzanými nevýhodami.SUMMARY OF THE INVENTION It is an object of the present invention to provide a process for the production of abrasion-resistant boride layers on metal materials without the disadvantages of the aforementioned disadvantages.
Podstata vynálezuSUMMARY OF THE INVENTION
Uvedená úloha bola podľa predloženého vynálezu vyriešená vypracovaním spôsobu, ktorého podstata spočíva v tom, že sa ako nosič bóru zmieša aspoň jeden halogenid bóru zvolený zo skupiny zahrnujúcej fluorid boritý, bromid boritý a jodid boritý' s vodíkom a prípadne argónom a/alebo dusíkom na prípravu reakčného plynu, ktorý obsahuje 1 až 35 % objemových halogenidu bóru a takto získaná zmes sa pomocou plazmového výboja tak aktivuje, že sa umožní prechod bóru z plazmy na povrch kovu.The object of the present invention is to provide a process comprising mixing at least one boron halide selected from the group consisting of boron trifluoride, boron tribromide and boron iodide with hydrogen and optionally argon and / or nitrogen as the boron carrier. % of the reaction gas containing 1 to 35% by volume of boron halide and the mixture thus obtained is activated by a plasma discharge so as to allow boron to pass from the plasma to the metal surface.
Reakčný plyn môže dodatočne obsahovať ako nosič bóru chlorid boritý.The reaction gas may additionally contain boron trichloride as the boron carrier.
Výhodne obsahuje reakčný plyn 5 až 20 % objemových halogenidu bóru, obzvlášť výhodne obsahuje 5 až 15 % objemových halogenidu bóru.Preferably, the reaction gas contains 5 to 20% by volume of boron halide, particularly preferably 5 to 15% by volume of boron halide.
Výhodne obsahuje reakčný plyn 20 až 90 % objemových vodíka, obzvlášť výhodne obsahuje 20 až 50 % objemových vodíka.Preferably, the reaction gas contains 20 to 90% by volume of hydrogen, particularly preferably 20 to 50% by volume of hydrogen.
Výhodne obsahuje reakčný plyn fluorid boritý.Preferably, the reaction gas comprises boron trifluoride.
Obzvlášť výhodne sa ako halogenid bóru použije fluorid boritý.Boron trifluoride is particularly preferably used as the boron halide.
Reakčný plyn sa do priestoru spracovania privádza v množstve výhodne 0,5 až 2 1 za minútu, obzvlášť výhodne asi 11/min.The reaction gas is fed to the treatment area in an amount of preferably 0.5 to 2 L per minute, particularly preferably about 11 / min.
Borácia sa vykonáva výhodne za tlaku v rozmedzí 0,1 až 1,0 kPa za pôsobenia plazmového výboja, ako je napríklad známe zo zariadenia na poťahovanie za pôsobenia plazmy.The boration is preferably carried out at a pressure in the range of 0.1 to 1.0 kPa under the action of a plasma discharge, such as is known from a plasma coating apparatus.
Potrebné teploty spracovania výhodne 400 °C až 1200 °C, obzvlášť výhodne 850 °C až 950 °C sa dosahujú pomocou samotnej plazmy alebo predovšetkým vo vysokoteplotnej oblasti nad 900 °C za podpory dodatočného vykurovania.The required processing temperatures, preferably 400 ° C to 1200 ° C, particularly preferably 850 ° C to 950 ° C, are achieved by means of plasma alone or, in particular, in the high temperature region above 900 ° C with the aid of additional heating.
Výhodne je čas spracovania 30 až 240 minút, obzvlášť výhodne 30 až 120 minút.The processing time is preferably 30 to 240 minutes, particularly preferably 30 to 120 minutes.
Hrúbka boridovej vrstvy sa zvyčajne riadi časom spracovania, pričom so zvyšujúcim sa časom spracovania sa tiež zväčšuje hrúbka vrstvy.The thickness of the boride layer is usually governed by the processing time, and with increasing processing time the thickness of the layer also increases.
Ako ďalšie plyny môže reakčný plyn obsahovať ešte argón a/alebo dusík. Tým sa dá riadiť aktivita prenosu bóru a dosiahne sa dostatočné ohriatie vzoriek plazmou. Zloženie reakčného plynu sa tak môže meniť v širokých medziach vždy podľa podmienok spracovania a boridovaného materiálu.As further gases, the reaction gas may also contain argon and / or nitrogen. This can control boron transfer activity and achieve sufficient heating of the samples by plasma. The composition of the reaction gas can thus vary within wide limits, depending on the processing conditions and the boridized material.
Spôsob podľa predloženého vynálezu je vhodný najmä na boráciu železných materiálov.The process of the present invention is particularly suitable for boronizing ferrous materials.
Pri spôsobe podľa predloženého vynálezu sa pomocou plazmového výboja prevedú molekuly vodíka, obsiahnuté v reakčnom plyne, na atomámy vodík. Atomámy vodík redukuje halogenid bóru (BY3) a umožňuje tým prenos vodíka na povrch spracovávaného materiálu. Tento prenos je možné znázorniť pomocou nasledujúcej reakčnej schémy:In the process of the present invention, the hydrogen molecules contained in the reaction gas are converted to atomic hydrogen by means of a plasma discharge. Atomic hydrogen reduces boron halide (BY 3 ) and thus allows the transfer of hydrogen to the surface of the material to be treated. This transfer can be illustrated by the following reaction scheme:
ΒΥ3 + 3 H —> B + 3 BYΒΥ 3 + 3 H-> B + 3 BY
B + xMe -> MexB.B + x Me -> Me x B.
Je možné tiež prevedenie BY3 na BY2 pomocou plazmy, pričom potom môžu prebiehať nasledujúce reakcie:It is also possible to convert BY 3 to BY 2 by plasma, whereupon the following reactions can take place:
BY2 -> B + 2 BY3 BY 2 -> B + 2 BY 3
B + x Me -> MexB.B + x Me-> Me x B.
V nadväznosti na boráciu je možné podrobiť boridovaný materiál následnému spracovaniu, aby sa eventuálne vytvorený FeB premenil na Fe2B. Toto sa môže napríklad dosiahnuť procesom žíhania v nadväznosti na spracovanie boráciou tak, že sa skončí prívod halogenidu bóru a spracovávaný materiál sa nechá ešte určitý čas pri teplote spracovania. Čas tohto difúzneho spracovania sa riadi podľa množstva prítomného FeB a je zvyčajne 20 až 60 minút.Following the boronization, the boronized material can be subjected to a post-treatment to convert eventually formed FeB to Fe 2 B. time at processing temperature. The time of this diffusion treatment depends on the amount of FeB present and is usually 20 to 60 minutes.
Vykonávanie spôsobu podľa predloženého vynálezu môže prebiehať napríklad v známom zariadení, vhodnom na poťahovanie pomocou plazmy. Toto pozostáva v podstate z nasledujúcich komponentov:The process according to the invention can be carried out, for example, in a known apparatus suitable for plasma coating. This consists essentially of the following components:
- Z vákuového respicientu (reaktora) na podávanie spracovávaných dielov. Reaktor by mal byť vyhrievateľný a mal by dovoľovať prácu pri teplote v rozmedzí 400 °C až 1200 °C.- From a vacuum reactor (reactor) for feeding workpieces. The reactor should be heatable and allow working at temperatures between 400 ° C and 1200 ° C.
- Z čerpadlového systému na evakuáciu reaktora a nastavenie pracovného tlaku.- From a pump system to evacuate the reactor and adjust the working pressure.
- Z plynom zásobujúcej jednotky na miešanie a dávkovanie reakčnej zmesi.Gas supply units for mixing and dispensing the reaction mixture.
- Z napájania pulz - plazma - prúdom na výrobu a udržanie plazmového výboja vo vákuovom recipiente, pričom použitý výkon môže kolísať pulznou frekvenciou, prípadne pulznou šírkou v širokom rozmedzí.From a pulse-plasma-current supply to produce and maintain the plasma discharge in a vacuum recipient, the power used may vary in pulse frequency or pulse width over a wide range.
- Zo systému neutralizácie plynu a likvidácie, ako i systému na riadenie a kontrolu prevádzkových parametrov, ktoré priebeh procesu riadia a kontrolujú.- From the gas neutralization and disposal system as well as the system for managing and controlling the operating parameters that control and control the process.
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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DE19602639A DE19602639A1 (en) | 1996-01-25 | 1996-01-25 | Process for the production of wear-resistant boride layers on metallic material surfaces |
PCT/EP1997/000298 WO1997027345A1 (en) | 1996-01-25 | 1997-01-23 | Process for producing wear-resistant boride layers on metal material surfaces |
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SK101298A3 SK101298A3 (en) | 1998-12-02 |
SK282806B6 true SK282806B6 (en) | 2002-12-03 |
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SK1012-98A SK282806B6 (en) | 1996-01-25 | 1997-01-23 | Process for producing wear-resistant boride layers on metal material surfaces |
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EP (1) | EP0876516B1 (en) |
JP (1) | JP3222144B2 (en) |
AT (1) | ATE193334T1 (en) |
CA (1) | CA2244248C (en) |
CZ (1) | CZ289443B6 (en) |
DE (2) | DE19602639A1 (en) |
HU (1) | HUP9900939A3 (en) |
PL (1) | PL181781B1 (en) |
SK (1) | SK282806B6 (en) |
WO (1) | WO1997027345A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100583262B1 (en) * | 1997-12-15 | 2006-05-25 | 폭스바겐 악티엔 게젤샤프트 | Plasma boronizing |
DE19842515C1 (en) * | 1998-09-17 | 2000-04-20 | Sabine Boehm | Surface treatment of metallic materials comprises plasma-activated thermo-chemical diffusion of a property-changing material from the plasma of a gaseous treatment atmosphere using a target positioned in an electric field |
DE19845463A1 (en) * | 1998-10-02 | 2000-04-06 | Stiftung Inst Fuer Werkstoffte | Wear resistant boride layers are produced, e.g. on steel or titanium alloy substrates, by gas boriding using volatile boron compounds containing boron-oxygen and/or boron-nitrogen bonds |
CZ305985B6 (en) * | 2013-02-15 | 2016-06-08 | Technická univerzita v Liberci | Guide pulleys of hardened steel for wire drawing |
CZ305986B6 (en) * | 2013-02-15 | 2016-06-08 | Technická univerzita v Liberci | Cladded thread-cutting tools of high-speed cutting steel, especially screw-cutting taps |
CN110512170A (en) * | 2019-10-12 | 2019-11-29 | 河海大学常州校区 | A kind of titanium alloy boronizing method |
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US3677799A (en) * | 1970-11-10 | 1972-07-18 | Celanese Corp | Vapor phase boron deposition by pulse discharge |
JPH07286254A (en) * | 1994-04-21 | 1995-10-31 | Sumitomo Metal Ind Ltd | Steel sheet excellent in secondary working brittleness resistance and its production |
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1996
- 1996-01-25 DE DE19602639A patent/DE19602639A1/en not_active Withdrawn
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1997
- 1997-01-23 CA CA002244248A patent/CA2244248C/en not_active Expired - Fee Related
- 1997-01-23 AT AT97901592T patent/ATE193334T1/en not_active IP Right Cessation
- 1997-01-23 CZ CZ19982351A patent/CZ289443B6/en not_active IP Right Cessation
- 1997-01-23 PL PL97328200A patent/PL181781B1/en not_active IP Right Cessation
- 1997-01-23 WO PCT/EP1997/000298 patent/WO1997027345A1/en active IP Right Grant
- 1997-01-23 JP JP52653797A patent/JP3222144B2/en not_active Expired - Fee Related
- 1997-01-23 SK SK1012-98A patent/SK282806B6/en not_active IP Right Cessation
- 1997-01-23 DE DE59701754T patent/DE59701754D1/en not_active Expired - Fee Related
- 1997-01-23 EP EP97901592A patent/EP0876516B1/en not_active Expired - Lifetime
- 1997-01-23 HU HU9900939A patent/HUP9900939A3/en unknown
Also Published As
Publication number | Publication date |
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JPH11507993A (en) | 1999-07-13 |
CZ289443B6 (en) | 2002-01-16 |
SK101298A3 (en) | 1998-12-02 |
HUP9900939A3 (en) | 2001-01-29 |
JP3222144B2 (en) | 2001-10-22 |
DE59701754D1 (en) | 2000-06-29 |
CZ235198A3 (en) | 1999-08-11 |
EP0876516A1 (en) | 1998-11-11 |
DE19602639A1 (en) | 1997-07-31 |
PL328200A1 (en) | 1999-01-18 |
CA2244248C (en) | 2001-11-20 |
CA2244248A1 (en) | 1997-07-31 |
PL181781B1 (en) | 2001-09-28 |
HUP9900939A2 (en) | 1999-07-28 |
EP0876516B1 (en) | 2000-05-24 |
WO1997027345A1 (en) | 1997-07-31 |
ATE193334T1 (en) | 2000-06-15 |
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