SG99381A1 - Auto-bake out system - Google Patents

Auto-bake out system

Info

Publication number
SG99381A1
SG99381A1 SG200200118A SG200200118A SG99381A1 SG 99381 A1 SG99381 A1 SG 99381A1 SG 200200118 A SG200200118 A SG 200200118A SG 200200118 A SG200200118 A SG 200200118A SG 99381 A1 SG99381 A1 SG 99381A1
Authority
SG
Singapore
Prior art keywords
auto
out system
bake out
bake
Prior art date
Application number
SG200200118A
Inventor
Myint Maung Myo
Original Assignee
Chartered Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chartered Semiconductor Mfg filed Critical Chartered Semiconductor Mfg
Publication of SG99381A1 publication Critical patent/SG99381A1/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/02—Details
    • H05B7/12—Arrangements for cooling, sealing or protecting electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Control Of Temperature (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
SG200200118A 2001-02-20 2002-01-08 Auto-bake out system SG99381A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/785,117 US6476367B2 (en) 2001-02-20 2001-02-20 Auto-bake out system

Publications (1)

Publication Number Publication Date
SG99381A1 true SG99381A1 (en) 2003-10-27

Family

ID=25134494

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200200118A SG99381A1 (en) 2001-02-20 2002-01-08 Auto-bake out system

Country Status (2)

Country Link
US (1) US6476367B2 (en)
SG (1) SG99381A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8025269B1 (en) 2007-10-16 2011-09-27 National Semiconductor Corporation Chamber lid lifting apparatus
CN103853055B (en) * 2012-11-28 2016-12-28 北京北方微电子基地设备工艺研究中心有限责任公司 The real-time control method of reaction chamber baking and device
EP3123816B1 (en) * 2014-03-24 2017-12-27 BSH Hausgeräte GmbH Cooking appliance device having a self-controlling bypassing unit
US20210074498A1 (en) * 2019-09-06 2021-03-11 Communitronics Corp. Mutually exclusive power controller with master lockout

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5607511A (en) 1992-02-21 1997-03-04 International Business Machines Corporation Method and apparatus for low temperature, low pressure chemical vapor deposition of epitaxial silicon layers
US4816098A (en) * 1987-07-16 1989-03-28 Texas Instruments Incorporated Apparatus for transferring workpieces
US5336324A (en) 1991-12-04 1994-08-09 Emcore Corporation Apparatus for depositing a coating on a substrate
US5730801A (en) 1994-08-23 1998-03-24 Applied Materials, Inc. Compartnetalized substrate processing chamber
ATE206026T1 (en) * 1997-05-16 2001-10-15 Bourgeois Prod Coop METHOD AND DEVICE FOR DISTRIBUTING COMMUNITY MEALS
TW393308B (en) * 1997-06-13 2000-06-11 Matsushita Electric Ind Co Ltd Rice cooker

Also Published As

Publication number Publication date
US20020113065A1 (en) 2002-08-22
US6476367B2 (en) 2002-11-05

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