SG87208A1 - Method for electrochemical deposition of metal using modulated waveforms - Google Patents

Method for electrochemical deposition of metal using modulated waveforms

Info

Publication number
SG87208A1
SG87208A1 SG200101441A SG200101441A SG87208A1 SG 87208 A1 SG87208 A1 SG 87208A1 SG 200101441 A SG200101441 A SG 200101441A SG 200101441 A SG200101441 A SG 200101441A SG 87208 A1 SG87208 A1 SG 87208A1
Authority
SG
Singapore
Prior art keywords
metal
electrochemical deposition
modulated waveforms
waveforms
modulated
Prior art date
Application number
SG200101441A
Inventor
Gandikota Srinivas
Duboust Alain
Neo Siew
Chen Liang-Yuh
Cheung Robin
A Carl Daniel
Shih Hong
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG87208A1 publication Critical patent/SG87208A1/en

Links

SG200101441A 2000-03-08 2001-03-08 Method for electrochemical deposition of metal using modulated waveforms SG87208A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US18782100P 2000-03-08 2000-03-08
US26440000P 2000-06-22 2000-06-22

Publications (1)

Publication Number Publication Date
SG87208A1 true SG87208A1 (en) 2002-03-19

Family

ID=26883434

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200101441A SG87208A1 (en) 2000-03-08 2001-03-08 Method for electrochemical deposition of metal using modulated waveforms

Country Status (1)

Country Link
SG (1) SG87208A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3770594A (en) * 1971-12-10 1973-11-06 Buckbee Mears Co Plating metal onto small flexibly based conductors
US4789437A (en) * 1986-07-11 1988-12-06 University Of Hong Kong Pulse electroplating process
WO1999018266A1 (en) * 1997-10-06 1999-04-15 Learonal, Inc. Programmed pulse electroplating process

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3770594A (en) * 1971-12-10 1973-11-06 Buckbee Mears Co Plating metal onto small flexibly based conductors
US4789437A (en) * 1986-07-11 1988-12-06 University Of Hong Kong Pulse electroplating process
WO1999018266A1 (en) * 1997-10-06 1999-04-15 Learonal, Inc. Programmed pulse electroplating process

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