SG86994A1 - Method of fabricating a silicon microphone - Google Patents

Method of fabricating a silicon microphone

Info

Publication number
SG86994A1
SG86994A1 SG9702440A SG1997002440A SG86994A1 SG 86994 A1 SG86994 A1 SG 86994A1 SG 9702440 A SG9702440 A SG 9702440A SG 1997002440 A SG1997002440 A SG 1997002440A SG 86994 A1 SG86994 A1 SG 86994A1
Authority
SG
Singapore
Prior art keywords
fabricating
silicon microphone
microphone
silicon
Prior art date
Application number
SG9702440A
Inventor
Bendapudi Seishu
Abhijit Bandyopadhyay
Lian Jun Liu
Shao Dong Wu
Pang Dow Foo
Original Assignee
Inst Of Microelectronics Nat U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Of Microelectronics Nat U filed Critical Inst Of Microelectronics Nat U
Priority to SG9702440A priority Critical patent/SG86994A1/en
Publication of SG86994A1 publication Critical patent/SG86994A1/en

Links

SG9702440A 1997-07-11 1997-07-11 Method of fabricating a silicon microphone SG86994A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG9702440A SG86994A1 (en) 1997-07-11 1997-07-11 Method of fabricating a silicon microphone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG9702440A SG86994A1 (en) 1997-07-11 1997-07-11 Method of fabricating a silicon microphone

Publications (1)

Publication Number Publication Date
SG86994A1 true SG86994A1 (en) 2002-03-19

Family

ID=20429697

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9702440A SG86994A1 (en) 1997-07-11 1997-07-11 Method of fabricating a silicon microphone

Country Status (1)

Country Link
SG (1) SG86994A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5177661A (en) * 1989-01-13 1993-01-05 Kopin Corporation SOI diaphgram sensor
US5178015A (en) * 1991-07-22 1993-01-12 Monolithic Sensors Inc. Silicon-on-silicon differential input sensors
US5452268A (en) * 1994-08-12 1995-09-19 The Charles Stark Draper Laboratory, Inc. Acoustic transducer with improved low frequency response

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5177661A (en) * 1989-01-13 1993-01-05 Kopin Corporation SOI diaphgram sensor
US5178015A (en) * 1991-07-22 1993-01-12 Monolithic Sensors Inc. Silicon-on-silicon differential input sensors
US5452268A (en) * 1994-08-12 1995-09-19 The Charles Stark Draper Laboratory, Inc. Acoustic transducer with improved low frequency response

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