SG73407A1 - Process for forming metal deposited film containing aluminium as main component by use of alkyl aluminium hydride - Google Patents

Process for forming metal deposited film containing aluminium as main component by use of alkyl aluminium hydride

Info

Publication number
SG73407A1
SG73407A1 SG1996006757A SG1996006757A SG73407A1 SG 73407 A1 SG73407 A1 SG 73407A1 SG 1996006757 A SG1996006757 A SG 1996006757A SG 1996006757 A SG1996006757 A SG 1996006757A SG 73407 A1 SG73407 A1 SG 73407A1
Authority
SG
Singapore
Prior art keywords
main component
film containing
deposited film
forming metal
metal deposited
Prior art date
Application number
SG1996006757A
Inventor
Osamu Ikeda
Shigeyuki Matsumoto
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of SG73407A1 publication Critical patent/SG73407A1/en

Links

SG1996006757A 1990-02-19 1991-02-18 Process for forming metal deposited film containing aluminium as main component by use of alkyl aluminium hydride SG73407A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3619490 1990-02-19

Publications (1)

Publication Number Publication Date
SG73407A1 true SG73407A1 (en) 2000-06-20

Family

ID=12462917

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996006757A SG73407A1 (en) 1990-02-19 1991-02-18 Process for forming metal deposited film containing aluminium as main component by use of alkyl aluminium hydride

Country Status (1)

Country Link
SG (1) SG73407A1 (en)

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