SG45410A1 - Process for forming deposited film by use of alkyl aluminum hydride - Google Patents

Process for forming deposited film by use of alkyl aluminum hydride

Info

Publication number
SG45410A1
SG45410A1 SG1996006548A SG1996006548A SG45410A1 SG 45410 A1 SG45410 A1 SG 45410A1 SG 1996006548 A SG1996006548 A SG 1996006548A SG 1996006548 A SG1996006548 A SG 1996006548A SG 45410 A1 SG45410 A1 SG 45410A1
Authority
SG
Singapore
Prior art keywords
aluminum hydride
deposited film
alkyl aluminum
forming deposited
forming
Prior art date
Application number
SG1996006548A
Inventor
Kazuo Tsubouchi
Kazuya Masu
Nobuo Mikoshiba
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2006557A external-priority patent/JP2831770B2/en
Application filed by Canon Kk filed Critical Canon Kk
Publication of SG45410A1 publication Critical patent/SG45410A1/en

Links

SG1996006548A 1989-09-09 1990-09-07 Process for forming deposited film by use of alkyl aluminum hydride SG45410A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP23392489 1989-09-09
JP23392689 1989-09-09
JP2006557A JP2831770B2 (en) 1989-09-09 1990-01-16 Deposition film formation method

Publications (1)

Publication Number Publication Date
SG45410A1 true SG45410A1 (en) 1998-01-16

Family

ID=27277220

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996006548A SG45410A1 (en) 1989-09-09 1990-09-07 Process for forming deposited film by use of alkyl aluminum hydride

Country Status (1)

Country Link
SG (1) SG45410A1 (en)

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