SG71846A1 - Process for preparing nitride film - Google Patents

Process for preparing nitride film

Info

Publication number
SG71846A1
SG71846A1 SG1998003816A SG1998003816A SG71846A1 SG 71846 A1 SG71846 A1 SG 71846A1 SG 1998003816 A SG1998003816 A SG 1998003816A SG 1998003816 A SG1998003816 A SG 1998003816A SG 71846 A1 SG71846 A1 SG 71846A1
Authority
SG
Singapore
Prior art keywords
nitride film
preparing nitride
preparing
film
nitride
Prior art date
Application number
SG1998003816A
Inventor
Yukichi Takamatsu
Takeo Yoneyama
Yoshiyasu Ishihama
Original Assignee
Japan Pionics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Pionics filed Critical Japan Pionics
Priority to SG1998003816A priority Critical patent/SG71846A1/en
Publication of SG71846A1 publication Critical patent/SG71846A1/en

Links

SG1998003816A 1998-09-24 1998-09-24 Process for preparing nitride film SG71846A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG1998003816A SG71846A1 (en) 1998-09-24 1998-09-24 Process for preparing nitride film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG1998003816A SG71846A1 (en) 1998-09-24 1998-09-24 Process for preparing nitride film

Publications (1)

Publication Number Publication Date
SG71846A1 true SG71846A1 (en) 2000-04-18

Family

ID=20430108

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998003816A SG71846A1 (en) 1998-09-24 1998-09-24 Process for preparing nitride film

Country Status (1)

Country Link
SG (1) SG71846A1 (en)

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