SG71037A1 - Inorganic seal for encapsulation of an organic layer and method for making the same - Google Patents
Inorganic seal for encapsulation of an organic layer and method for making the sameInfo
- Publication number
- SG71037A1 SG71037A1 SG1997002882A SG1997002882A SG71037A1 SG 71037 A1 SG71037 A1 SG 71037A1 SG 1997002882 A SG1997002882 A SG 1997002882A SG 1997002882 A SG1997002882 A SG 1997002882A SG 71037 A1 SG71037 A1 SG 71037A1
- Authority
- SG
- Singapore
- Prior art keywords
- encapsulation
- making
- same
- organic layer
- inorganic seal
- Prior art date
Links
- 238000005538 encapsulation Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000012044 organic layer Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/022—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/312—Organic layers, e.g. photoresist
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3192—Multilayer coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
- H01L21/0214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material being a silicon oxynitride, e.g. SiON or SiON:H
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/958—Passivation layer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/724,877 US5861658A (en) | 1996-10-03 | 1996-10-03 | Inorganic seal for encapsulation of an organic layer and method for making the same |
Publications (1)
Publication Number | Publication Date |
---|---|
SG71037A1 true SG71037A1 (en) | 2000-03-21 |
Family
ID=24912291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1997002882A SG71037A1 (en) | 1996-10-03 | 1997-08-08 | Inorganic seal for encapsulation of an organic layer and method for making the same |
Country Status (6)
Country | Link |
---|---|
US (2) | US5861658A (zh) |
JP (1) | JPH10112459A (zh) |
KR (1) | KR100257429B1 (zh) |
CN (1) | CN1110855C (zh) |
MY (1) | MY115683A (zh) |
SG (1) | SG71037A1 (zh) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001006253A2 (en) | 1999-07-16 | 2001-01-25 | Board Of Regents, The University Of Texas System | Detection system based on an analyte reactive particle |
US6866901B2 (en) | 1999-10-25 | 2005-03-15 | Vitex Systems, Inc. | Method for edge sealing barrier films |
US20100330748A1 (en) | 1999-10-25 | 2010-12-30 | Xi Chu | Method of encapsulating an environmentally sensitive device |
US7198832B2 (en) * | 1999-10-25 | 2007-04-03 | Vitex Systems, Inc. | Method for edge sealing barrier films |
AU2001234709A1 (en) * | 2000-01-31 | 2001-08-07 | Board Of Regents, The University Of Texas System | Method of preparing a sensor array |
US7746496B2 (en) * | 2000-03-28 | 2010-06-29 | Mongonet | Method and system for pay per use document transfer via computer network transfer protocols |
US7439096B2 (en) * | 2001-02-21 | 2008-10-21 | Lucent Technologies Inc. | Semiconductor device encapsulation |
JP4118029B2 (ja) * | 2001-03-09 | 2008-07-16 | 富士通株式会社 | 半導体集積回路装置とその製造方法 |
US8808457B2 (en) | 2002-04-15 | 2014-08-19 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
EP1502097A2 (en) | 2002-04-26 | 2005-02-02 | Board of Regents, The University of Texas System | Method and system for the detection of cardiac risk factors |
JP4088120B2 (ja) * | 2002-08-12 | 2008-05-21 | 株式会社ルネサステクノロジ | 半導体装置 |
US7585546B2 (en) * | 2003-08-11 | 2009-09-08 | Finisar Corporation | Surface passivation and sealing of micro-optics devices for improved performance in harsh environments |
US7098544B2 (en) * | 2004-01-06 | 2006-08-29 | International Business Machines Corporation | Edge seal for integrated circuit chips |
US20050181535A1 (en) * | 2004-02-17 | 2005-08-18 | Yun Sun J. | Method of fabricating passivation layer for organic devices |
US8105849B2 (en) | 2004-02-27 | 2012-01-31 | Board Of Regents, The University Of Texas System | Integration of fluids and reagents into self-contained cartridges containing sensor elements |
US8101431B2 (en) | 2004-02-27 | 2012-01-24 | Board Of Regents, The University Of Texas System | Integration of fluids and reagents into self-contained cartridges containing sensor elements and reagent delivery systems |
US7566634B2 (en) * | 2004-09-24 | 2009-07-28 | Interuniversitair Microelektronica Centrum (Imec) | Method for chip singulation |
CA2610793A1 (en) | 2005-05-31 | 2007-05-10 | Labnow, Inc. | Methods and compositions related to determination and use of white blood cell counts |
US7767498B2 (en) | 2005-08-25 | 2010-08-03 | Vitex Systems, Inc. | Encapsulated devices and method of making |
US7893459B2 (en) * | 2007-04-10 | 2011-02-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Seal ring structures with reduced moisture-induced reliability degradation |
JP5448304B2 (ja) * | 2007-04-19 | 2014-03-19 | パナソニック株式会社 | 半導体装置 |
US9184410B2 (en) | 2008-12-22 | 2015-11-10 | Samsung Display Co., Ltd. | Encapsulated white OLEDs having enhanced optical output |
US9337446B2 (en) | 2008-12-22 | 2016-05-10 | Samsung Display Co., Ltd. | Encapsulated RGB OLEDs having enhanced optical output |
US8106487B2 (en) | 2008-12-23 | 2012-01-31 | Pratt & Whitney Rocketdyne, Inc. | Semiconductor device having an inorganic coating layer applied over a junction termination extension |
US7897433B2 (en) * | 2009-02-18 | 2011-03-01 | Advanced Micro Devices, Inc. | Semiconductor chip with reinforcement layer and method of making the same |
US8590338B2 (en) * | 2009-12-31 | 2013-11-26 | Samsung Mobile Display Co., Ltd. | Evaporator with internal restriction |
US8058108B2 (en) | 2010-03-10 | 2011-11-15 | Ati Technologies Ulc | Methods of forming semiconductor chip underfill anchors |
CN102637612B (zh) * | 2012-05-03 | 2014-07-30 | 福建华映显示科技有限公司 | 固设半导体芯片于线路基板的方法及其结构 |
US9105531B2 (en) * | 2012-07-19 | 2015-08-11 | Renesas Electronics Corporation | Semiconductor device |
KR102450399B1 (ko) | 2015-10-06 | 2022-09-30 | 삼성전자주식회사 | 박막 트랜지스터, 그 제조 방법, 그리고 상기 박막 트랜지스터를 포함하는 전자 장치 |
JP2017163072A (ja) * | 2016-03-11 | 2017-09-14 | パナソニックIpマネジメント株式会社 | 素子チップおよびその製造方法 |
WO2017174608A1 (en) | 2016-04-06 | 2017-10-12 | Abb Schweiz Ag | Semiconductor chip with moisture protection layer |
CN110010508A (zh) * | 2019-04-10 | 2019-07-12 | 深圳市锐骏半导体股份有限公司 | 一种解决钝化层对功率器件可靠性影响的方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4495220A (en) * | 1983-10-07 | 1985-01-22 | Trw Inc. | Polyimide inter-metal dielectric process |
US4692786A (en) * | 1985-02-07 | 1987-09-08 | Lindenfelser Timothy M | Semi-conductor device with sandwich passivation coating |
US5126290A (en) * | 1991-09-11 | 1992-06-30 | Micron Technology, Inc. | Method of making memory devices utilizing one-sided ozone teos spacers |
US5294295A (en) * | 1991-10-31 | 1994-03-15 | Vlsi Technology, Inc. | Method for moisture sealing integrated circuits using silicon nitride spacer protection of oxide passivation edges |
US5472900A (en) * | 1991-12-31 | 1995-12-05 | Intel Corporation | Capacitor fabricated on a substrate containing electronic circuitry |
FR2687012A1 (fr) * | 1992-02-03 | 1993-07-30 | France Telecom | Dispositif josephson et son procede de fabrication. |
US5356834A (en) * | 1992-03-24 | 1994-10-18 | Kabushiki Kaisha Toshiba | Method of forming contact windows in semiconductor devices |
US5284801A (en) * | 1992-07-22 | 1994-02-08 | Vlsi Technology, Inc. | Methods of moisture protection in semiconductor devices utilizing polyimides for inter-metal dielectric |
-
1996
- 1996-10-03 US US08/724,877 patent/US5861658A/en not_active Expired - Lifetime
-
1997
- 1997-07-24 KR KR1019970034646A patent/KR100257429B1/ko not_active IP Right Cessation
- 1997-08-08 SG SG1997002882A patent/SG71037A1/en unknown
- 1997-08-29 MY MYPI97004000A patent/MY115683A/en unknown
- 1997-09-02 CN CN97118202A patent/CN1110855C/zh not_active Expired - Fee Related
- 1997-09-08 JP JP9242266A patent/JPH10112459A/ja active Pending
- 1997-09-30 US US08/941,447 patent/US5854141A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5854141A (en) | 1998-12-29 |
MY115683A (en) | 2003-08-30 |
CN1190796A (zh) | 1998-08-19 |
KR19980032241A (ko) | 1998-07-25 |
US5861658A (en) | 1999-01-19 |
KR100257429B1 (ko) | 2000-05-15 |
CN1110855C (zh) | 2003-06-04 |
JPH10112459A (ja) | 1998-04-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG71037A1 (en) | Inorganic seal for encapsulation of an organic layer and method for making the same | |
EP0781075A4 (en) | METHOD FOR SEALING AN ORGANIC ELECTROLUMINESCENT ELEMENT AND ORGANIC ELECTROLUMINESCENT ELEMENT | |
GB2329506B (en) | An organic light-emitting device and the method of manufacturing the same | |
AU8385598A (en) | Cold seal package and method for making the same | |
IL138174A0 (en) | Electroluminescent device and method of manufacturing same | |
GB2359573B (en) | Apparatus and method for open hole gravel packing | |
AU1531099A (en) | Composition and method for encapsulating photovoltaic devices | |
GB2341484B (en) | Barrier layer and fabricating method of the same | |
AU9296398A (en) | Method and apparatus for the offshore installation of multi-ton packages such asdeck packages and jackets | |
EP1009035A4 (en) | SEMICONDUCTOR COMPONENT WITH INSULATED GATE AND METHOD FOR THE PRODUCTION THEREOF | |
AU1332200A (en) | Controlled environment sealing apparatus and method | |
GB2328795B (en) | Multi-color organic electroluminescence device and method for manufacturing same | |
HUP0101896A3 (en) | Method and system for the application of lacquer | |
AU2416597A (en) | Material layer and method for manufacturing said layer | |
HUP0004569A3 (en) | Method and seal element for sealing/insulating holes | |
GB9717145D0 (en) | Insulated gate semiconductor device and method of manufacturing the same | |
NO304717B1 (no) | Forseglingsmetode | |
AU5238899A (en) | Electroluminescent devices and method of forming same | |
EP0860883A4 (en) | TRANSISTOR AND MANUFACTURING METHOD THEREOF | |
GB2333813B (en) | Sealing assembly and method | |
GB2321781B (en) | Organic electroluminescence device and method for manufacturing the same | |
EP0818839A3 (en) | Composite electrode containing an organic disulfide compound and method for producing the same | |
EP0880306A4 (en) | ORGANIC ELECTROLUMINESCENT ELEMENT AND MANUFACTURING METHOD THEREOF | |
HK1030130A1 (en) | Material for organic electroluminescence device and method for producing the same | |
SG55279A1 (en) | Method of working an organic film |