SG67382A1 - Method to inhibit the formation of ion implantation induced edge defects - Google Patents
Method to inhibit the formation of ion implantation induced edge defectsInfo
- Publication number
- SG67382A1 SG67382A1 SG1997000956A SG1997000956A SG67382A1 SG 67382 A1 SG67382 A1 SG 67382A1 SG 1997000956 A SG1997000956 A SG 1997000956A SG 1997000956 A SG1997000956 A SG 1997000956A SG 67382 A1 SG67382 A1 SG 67382A1
- Authority
- SG
- Singapore
- Prior art keywords
- inhibit
- formation
- ion implantation
- edge defects
- induced edge
- Prior art date
Links
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9716401A GB2323706B (en) | 1997-03-13 | 1997-03-24 | Method to inhibit the formation of ion implantation induced edge defects |
GB9706080A GB2323703B (en) | 1997-03-13 | 1997-03-24 | Method to inhibit the formation of ion implantation induced edge defects |
SG1997000956A SG67382A1 (en) | 1997-03-25 | 1997-03-25 | Method to inhibit the formation of ion implantation induced edge defects |
DE19716368A DE19716368A1 (en) | 1997-03-13 | 1997-04-18 | Ion implantation method for semiconductor manufacture e.g. DRAM |
NL1005932A NL1005932C2 (en) | 1997-03-13 | 1997-04-29 | A method for preventing the formation of ion implantation-induced edge defects. |
CN97110966A CN1072390C (en) | 1997-03-13 | 1997-04-29 | Ion implantation in semiconductor substrate |
FR9705289A FR2760895B1 (en) | 1997-03-13 | 1997-04-29 | METHOD FOR IMPLANTING IONS INTO A SUBSTRATE TO MINIMIZE DEFECT FORMATION |
US08/857,733 US5989986A (en) | 1997-03-13 | 1997-05-16 | Method to inhibit the formation of ion implantation induced edge defects |
NL1010154A NL1010154C2 (en) | 1997-03-13 | 1998-09-22 | Ion implantation method for semiconductor manufacture e.g. DRAM - by determining surface layer thickness through which implantation can be carried out, providing it and implanting ions into substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG1997000956A SG67382A1 (en) | 1997-03-25 | 1997-03-25 | Method to inhibit the formation of ion implantation induced edge defects |
Publications (1)
Publication Number | Publication Date |
---|---|
SG67382A1 true SG67382A1 (en) | 1999-09-21 |
Family
ID=20429606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1997000956A SG67382A1 (en) | 1997-03-13 | 1997-03-25 | Method to inhibit the formation of ion implantation induced edge defects |
Country Status (1)
Country | Link |
---|---|
SG (1) | SG67382A1 (en) |
-
1997
- 1997-03-25 SG SG1997000956A patent/SG67382A1/en unknown
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